公开(公告)号：US07559139B2

公开(公告)日：2009-07-14

申请号：US11970704

申请日：2008-01-08

Applicant: Masahiro Sugiura ,  Kunio Hiyama ,  Susumu Ogino

Inventor： Masahiro Sugiura ,  Kunio Hiyama ,  Susumu Ogino

IPC: H05K3/02 ,  H05K3/10

CPC classification number: G01R3/00 ,  G01R1/07342 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A method for manufacturing a probe unit includes: (a) preparing a substrate; (b) forming a hollow part in the substrate; (c) forming a sacrificial layer that buries the hollow part on the substrate; (d) forming a first layer on the substrate, wherein one end of the first layer is positioned on the sacrificial layer; (e) forming a second layer on the first layer at least excepting the one end; and (f) removing the sacrificial layer.

Abstract translation: 探针单元的制造方法包括：（a）准备基板; （b）在基板中形成中空部分; （c）形成牺牲基底上的中空部分的牺牲层; （d）在所述基板上形成第一层，其中所述第一层的一端位于所述牺牲层上; （e）在所述第一层上形成至少除了所述一端之外的第二层; 和（f）去除牺牲层。

公开(公告)号：US20080115354A1

公开(公告)日：2008-05-22

申请号：US11970704

申请日：2008-01-08

Applicant: Masahiro Sugiura ,  Kunio Hiyama ,  Susumu Ogino

Inventor： Masahiro Sugiura ,  Kunio Hiyama ,  Susumu Ogino

IPC: H01S4/00 ,  H05K3/10

CPC classification number: G01R3/00 ,  G01R1/07342 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A probe unit comprises a substrate and a lead formed on the substrate and having a tip part projecting from an edge of the substrate and contacting to an electrode of a sample, and a thick part of which thickness is thicker than the tip part. The probe unit can make continuity with a sample firmly with a proper contact pressure while lowering electrical resistance of leads.

Abstract translation: 探针单元包括基板和形成在基板上的引线，并且具有从基板的边缘突出并与样品的电极接触的尖端部分，并且其厚度比顶端部分厚。 探头单元可以在适当的接触压力下牢固地对样品进行连续性，同时降低引线的电阻。

公开(公告)号：US20050285609A1

公开(公告)日：2005-12-29

申请号：US11168319

申请日：2005-06-29

Applicant: Masahiro Sugiura ,  Kunio Hiyama ,  Susumu Ogino

Inventor： Masahiro Sugiura ,  Kunio Hiyama ,  Susumu Ogino

IPC: G01R1/073 ,  G01R3/00 ,  G01R31/02

CPC classification number: G01R3/00 ,  G01R1/07342 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A probe unit comprises a substrate and a lead formed on the substrate and having a tip part projecting from an edge of the substrate and contacting to an electrode of a sample, and a thick part of which thickness is thicker than the tip part. The probe unit can make continuity with a sample firmly with a proper contact pressure while lowering electrical resistance of leads.

Abstract translation: 探针单元包括基板和形成在基板上的引线，并且具有从基板的边缘突出并与样品的电极接触的尖端部分，并且其厚度比顶端部分厚。 探头单元可以在适当的接触压力下牢固地对样品进行连续性，同时降低引线的电阻。