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公开(公告)号：US20180202884A1
公开(公告)日：2018-07-19
申请号：US15743678
申请日：2016-07-12
Inventor： Yael Nemirovsky
IPC: G01L11/00
CPC classification number: G01L11/002 , G01L21/12 , G01N27/4077
Abstract: A pressure sensing device that includes a pressure sensing element that is of microscopic scale and has a pressure level dependent thermal parameter; a signal source that is configured to supply an input electrical signal to the pressure sensing element; and a monitor that is configured to (a) measure electrical output signals generated by the pressure sensing element as a result of the supply of the input electrical signal and (b) estimate a pressure level applied on the pressure sensing element based on the electrical output signals.
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公开(公告)号：US11079318B2
公开(公告)日：2021-08-03
申请号：US16081953
申请日：2017-03-09
Inventor： Yael Nemirovsky , Amikam Nemirovsky
Abstract: There is provided a gas sensing device for sensing a certain gas that is associated with a certain spectral band, the gas sensing device may include a passive gas sensor that is configured to generate passive gas sensor detection signals that are responsive to the certain spectral band; a passive dummy sensor that is configured to generate passive dummy sensor detection signals that are indifferent to the certain spectral hand; and at least one circuit that is configured to detect a presence or absence of the certain gas within a certain volume that is located within the fields of view of the passive gas sensor and the passive dummy sensor based on a comparison between the passive gas sensor detection signals and the passive dummy sensor detection signals.
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公开(公告)号：US20200292443A1
公开(公告)日：2020-09-17
申请号：US16081953
申请日：2017-03-09
Inventor： Yael Nemirovsky , Amikam NEMIROVSKY
Abstract: There is provided a gas sensing device for sensing a certain gas that is associated with a certain spectral band, the gas sensing device may include a passive gas sensor that is configured to generate passive gas sensor detection signals that are responsive to the certain spectral band; a passive dummy sensor that is configured to generate passive dummy sensor detection signals that are indifferent to the certain spectral band; and at least one circuit that is configured to detect a presence or absence of the certain gas within a certain volume that is located within the fields of view of the passive gas sensor and the passive dummy sensor based on a comparison between the passive gas sensor detection signals and the passive dummy sensor detection signals.
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4.发明申请公开(公告)号：US20190011415A1
公开(公告)日：2019-01-10
申请号：US15748723
申请日：2016-08-01
Inventor： Yael Nemirovsky , Amikam NEMIROVSKY , Shmuel Melman
CPC classification number: G01N33/0031 , G01N25/30 , G01N33/0027
Abstract: A gas sensing device that includes a (a) gas reactive element that has a gas dependent temperature parameter; and (b) a semiconductor temperature sensing element that is spaced apart from the gas reactive element and is configured to sense radiation emitted from the gas reactive element and generate detection signals that are responsive to a temperature of the gas reactive element; wherein the gas reactive element and the semiconductor temperature sensing element are of microscopic scale.
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公开(公告)号：US11585773B2
公开(公告)日：2023-02-21
申请号：US16580120
申请日：2019-09-24
Inventor： Yael Nemirovsky
Abstract: A gas sensing device, comprising a bulk and an array of gas sensing elements that are thermally isolated from the bulk, wherein each gas sensing element of a plurality of gas sensing elements of the array comprises (i) a gas reactive element that has a gas dependent temperature parameter; (ii) a semiconductor temperature sensing element that is thermally coupled to the gas reactive element and is configured to generate detection signals that are responsive to a temperature of the gas reactive element; and (iii) multiple heating elements that are configured to heat the gas reactive element to at least one predefined temperature.
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Patent Agency Ranking
公开(公告)号：US20190207053A1
公开(公告)日：2019-07-04
申请号：US16231947
申请日：2018-12-25
Inventor： Yael NEMIROVSKY , Amikam NEMIROVSKY
IPC: H01L31/18 , H01L31/09 , H01L31/0232 , H01L31/0203 , H01L21/3065 , G01J5/02
Abstract: A method for manufacturing a thermal sensor, the method may include forming, using ion etching, one or more first holes that pass through (a) an initial layer, (a) a first oxide layer, (c) a first semiconductor substrate; filling the one or more first holes with oxide to form supporting elements; fabricating one or more thermal semiconductor sensing elements; forming one or more second holes in the one or more upper layers and the first oxide layer; applying an isotropic etching process to remove the first semiconductor substrate and expose the supporting elements to provide a suspended first oxide layer.
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公开(公告)号：US10811556B2
公开(公告)日：2020-10-20
申请号：US16231947
申请日：2018-12-25
Inventor： Yael Nemirovsky , Amikam Nemirovsky
IPC: H01L31/09 , H01L31/18 , H01L31/0232 , H01L31/0203 , G01J5/02 , H01L21/3065 , G01J5/04 , G01J5/08 , G01J5/20 , G01J5/00
Abstract: A method for manufacturing a thermal sensor, the method may include forming, using ion etching, one or more first holes that pass through (a) an initial layer, (a) a first oxide layer, (c) a first semiconductor substrate; filling the one or more first holes with oxide to form supporting elements; fabricating one or more thermal semiconductor sensing elements; forming one or more second holes in the one or more upper layers and the first oxide layer; applying an isotropic etching process to remove the first semiconductor substrate and expose the supporting elements to provide a suspended first oxide layer.
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公开(公告)号：US10598557B2
公开(公告)日：2020-03-24
申请号：US15743678
申请日：2016-07-12
Inventor： Yael Nemirovsky
IPC: G01L11/00 , G01L21/12 , G01N27/407
Abstract: A pressure sensing device that includes a pressure sensing element that is of microscopic scale and has a pressure level dependent thermal parameter; a signal source that is configured to supply an input electrical signal to the pressure sensing element; and a monitor that is configured to (a) measure electrical output signals generated by the pressure sensing element as a result of the supply of the input electrical signal and (b) estimate a pressure level applied on the pressure sensing element based on the electrical output signals.
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公开(公告)号：US20180202865A1
公开(公告)日：2018-07-19
申请号：US15316182
申请日：2015-05-07
Applicant: TODOS TECHNOLOGIES LTD.
Inventor： YOAV SHOHAM
CPC classification number: G01J5/24 , G01J5/0806 , G01J5/20 , G01J2005/202
Abstract: A sensing device (20) includes a pair of infrared sensors comprising respective temperature-sensitive transistors (32, 34), which are configured to generate respective output signals in response to incident thermal radiation, and which are coupled together in a differential circuit topology so as to amplify a difference between the respective output signals.
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公开(公告)号：US11609217B2
公开(公告)日：2023-03-21
申请号：US16948170
申请日：2020-09-04
Inventor： Yael Nemirovsky , Amikam Nemirovsky , Shmuel Melman
Abstract: A method for sensing gas by a gas sensing device, the method may include generating, by a semiconductor temperature sensing element that is spaced apart from a gas reactive element and is thermally coupled to the gas reactive element, detection signals that are indicative of a temperature of the gas reactive element; wherein the gas reactive element and the semiconductor temperature sensing element are of microscopic scale; and processing, by a readout circuit of the gas sensing device, the detection signals to provide information about a gas that affected the temperature of the gas reactive element.
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