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公开(公告)号：US10935404B2
公开(公告)日：2021-03-02
申请号：US15771938
申请日：2016-09-12
申请人： TrueDyne Sensors AG
发明人： Patrick Reith , Christof Huber , Hagen Feth
摘要： A MEMS sensor for measuring at least one measured variable, especially a density, a flow and/or a viscosity, a flowing fluid, is described, comprising: at least one microfluidic channel having a channel section excitable to execute oscillations; and an exciter system for exciting a desired oscillation mode, causing the channel section to execute oscillations in a predetermined plane of oscillation. The MEMS sensor has improved oscillation characteristics at least in part because the channel section is composed of an anisotropic material, having directionally dependent elasticity and which is spatially oriented such that a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section perpendicular to the plane of oscillation is greater than a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section in the plane of oscillation.
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公开(公告)号：US20190317037A1
公开(公告)日：2019-10-17
申请号：US16471162
申请日：2017-11-22
摘要： The present disclosure relates to a gas analyzer for measuring density and/or viscosity of a medium. The gas analyzer includes a connection panel having first and second media openings, each of which extends from a first surface to a second surface of the connection panel. A sensor panel is joined together with the connection panel on a first joint plane, and a cover panel is joined together with the sensor panel on a second joint plane, on a sensor panel face facing away from the connection panel. The cover panel has a cover panel cavity which communicates with the first and second media openings, and the sensor panel has at least one oscillator cavity which communicates with the first and second media openings. The sensor panel has a micromechanical oscillator arranged in the oscillator cavity and excitable to mechanically vibrate perpendicularly to the joint planes.
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公开(公告)号：US20210372907A1
公开(公告)日：2021-12-02
申请号：US17286116
申请日：2019-09-16
申请人： TrueDyne Sensors AG
发明人： Steffen Zehnle , Christof Huber , Josua Ritter
摘要： A method for verifying a density and/or viscosity measuring device in a measuring station of a process installation during ongoing operation, in which a medium flows through a main channel of the process installation, comprising steps: providing a side channel, which is connected as a bypass of the main channel, wherein the side channel is fluidically connected to the main channel via two regions of the main channel with mutually differing diameters; providing a MEMS-based master or control density measuring device in the side channel such that the MEMS-based master or control density measuring device is flowed through by the medium; performing at least one verification measurement with the MEMS-based master or control density measuring device; and verifying the density and/or viscosity measuring device based on the at least one verification measurement performed by the MEMS-based master or control density measuring device.
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公开(公告)号：US20180348033A1
公开(公告)日：2018-12-06
申请号：US15771938
申请日：2016-09-12
申请人： TrueDyne Sensors AG
发明人： Patrick REITH , Christof HUBER , Hagen FETH
CPC分类号： G01F1/8445 , G01F1/8404 , G01F1/849 , G01F1/8495
摘要： A MEMS sensor for measuring at least one measured variable, especially a density, a flow and/or a viscosity, a flowing fluid, is described, comprising: at least one microfluidic channel having a channel section excitable to execute oscillations; and an exciter system for exciting a desired oscillation mode, causing the channel section to execute oscillations in a predetermined plane of oscillation. The MEMS sensor has improved oscillation characteristics at least in part because the channel section is composed of an anisotropic material, having directionally dependent elasticity and which is spatially oriented such that a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section perpendicular to the plane of oscillation is greater than a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section in the plane of oscillation.
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5.发明公开公开(公告)号：US20240053234A1
公开(公告)日：2024-02-15
申请号：US18551743
申请日：2022-02-21
申请人： TrueDyne Sensors AG
CPC分类号： G01N1/2035 , G01N1/38 , G01N2001/383
摘要： A method for determining a concentration of an analyte in a sample stream containing the analyte and a solvent includes: preparing a measured stream by diluting the sample stream with a solvent stream; ascertaining a concentration of the analyte in the measured stream; and ascertaining the concentration of the analyte in the sample stream as a function of the measured stream concentration and a dilution ratio of sample stream and measured stream. An apparatus of the invention includes: a first Coriolis mass flow measuring device for measuring a solvent stream as a function of the sample stream for diluting the sample stream; a second Coriolis device for ascertaining a mass flow of the measured stream; a density measuring device for ascertaining a density of the measured stream; and a computing and operating unit for computing the concentration of the analyte in the sample stream.
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公开(公告)号：US11428553B2
公开(公告)日：2022-08-30
申请号：US16956601
申请日：2018-11-15
申请人： TrueDyne Sensors AG
发明人： Josua Ritter , Patrick Reith , Fabio Schraner
摘要： The invention relates to a method for producing a customer-specific sensor on the basis of a standard sensor using a sensor development package, the sensor development package comprising at least the standard sensor and a customization unit, and the method for producing the customer-specific sensor having at least the following steps: customizing the customization unit to an application designated by a customer; introducing the sensor development package into the designated application of the customer so that the customer can test the sensor development package in the application; testing the sensor development package introduced into the designated application, by the customer; and producing the customer-specific sensor.
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公开(公告)号：US20240210225A1
公开(公告)日：2024-06-27
申请号：US18390776
申请日：2023-12-20
发明人： Christof Huber , Sandro Schwab , Ralf Emanuel Bernhardsgrütter , Fabio Schraner , Josua Ritter , Jakob Schaab , Marcel Giger , Jürgen Dorsch
CPC分类号： G01F1/684 , G01N9/002 , G01N33/0027
摘要： A thermal flow meter for measuring a flow rate of a gas includes: a measurement channel for guiding the gas between a channel inlet and a channel outlet; a thermal flow sensor disposed in the measurement channel; a density sensor including an oscillator operable to be acted upon by the gas; a temperature sensor element configured to determine a gas temperature; a pressure sensor element configured to determine a gas pressure; and a measuring-operating circuit configured to: determine a density value of the gas based on a natural frequency of the oscillator; identify a composition of the gas based on the density value, the gas pressure, and the gas temperature; and as a function of the composition, output a flow rate measured value corrected with respect to a cross-sensitivity of the flow rate to the composition of the gas based on flow rate-dependent signals of the thermal flow sensor.
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公开(公告)号：US20230304967A1
公开(公告)日：2023-09-28
申请号：US18004826
申请日：2021-06-21
申请人： TrueDyne Sensors AG
IPC分类号： G01N29/02 , G01N29/036
CPC分类号： G01N29/022 , G01N29/036 , G01N2291/021 , G01N2291/0256 , G01N2291/02818 , G01N2291/0427
摘要： A device includes: a chip, which includes a oscillatable cantilever with a first piezoelectric transducer for exciting cantilever oscillation, wherein the first cantilever extends into a cavity of the chip; a cantilever temperature sensor in an end section of the cantilever; a second temperature sensor spaced from the cantilever; a heating element located in the free end section of the cantilever and separated from the second temperature sensor by at least one cavity section; and an evaluation unit for determining density and viscosity as well as thermal conductivity and specific heat capacity of a gas mixture based respectively on oscillation characteristics of the cantilever and measured values of gas temperature from the cantilever temperature sensor, the second temperature sensor and a power consumption of the heating element.
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公开(公告)号：US11768094B2
公开(公告)日：2023-09-26
申请号：US16955165
申请日：2018-11-15
申请人： TrueDyne Sensors AG
发明人： Patrick Reith , Christof Huber
摘要： The present disclosure relates to a method for determining a volumetric and/or mass flow rate of a medium flowing in a tube, wherein a density and/or a viscosity of the fluid is/are determined using a MEMS sensor chip, wherein the medium flowing in the tube at least partially flows through a measuring channel of the MEMS sensor chip to determine the density and/or the viscosity of the fluid, and wherein the volumetric and/or mass flow rate of the medium is determined regardless of the medium based on a detected pressure drop over the measuring channel of the MEMS sensor chip and the density and/or viscosity determined by the MEMS sensor.
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公开(公告)号：US11112340B2
公开(公告)日：2021-09-07
申请号：US16471162
申请日：2017-11-22
摘要： The present disclosure relates to a gas analyzer for measuring density and/or viscosity of a medium. The gas analyzer includes a connection panel having first and second media openings, each of which extends from a first surface to a second surface of the connection panel. A sensor panel is joined together with the connection panel on a first joint plane, and a cover panel is joined together with the sensor panel on a second joint plane, on a sensor panel face facing away from the connection panel. The cover panel has a cover panel cavity which communicates with the first and second media openings, and the sensor panel has at least one oscillator cavity which communicates with the first and second media openings. The sensor panel has a micromechanical oscillator arranged in the oscillator cavity and excitable to mechanically vibrate perpendicularly to the joint planes.
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