公开(公告)号：US20100123891A1

公开(公告)日：2010-05-20

申请号：US12620376

申请日：2009-11-17

申请人： Tomohiro Harayama ,  Takashi Meguro

发明人： Tomohiro Harayama ,  Takashi Meguro

IPC分类号： G03B27/62 ,  G03B27/32

CPC分类号： G03F7/70358 ,  G03F7/70266 ,  G03F7/70533 ,  G03F7/70575 ,  G03F7/70783

摘要： An apparatus including an original stage that holds an original, a substrate stage that holds a substrate, and a projection optical system that projects a pattern of the original onto the substrate, and being configured to scan and expose the substrate during a period in which the speeds of the original stage and the substrate stage change, comprises a controller configured to correct, a distortion generated in an image transferred onto the substrate due to at least one of deformation of the original stage in response to a change in speed of the original stage and deformation of the substrate stage in response to a change in speed of the substrate stage, based on a correction value determined by an acceleration of the substrate stage.

摘要翻译： 一种包括保持原稿的原稿台，保持基板的基板台和将原稿的图案投影到基板上的投影光学系统的装置，并且被配置为在基板的扫描和曝光期间扫描和曝光基板 初级阶段和基底台变化的速度包括控制器，其被配置为校正由于原始阶段的变形响应原始阶段的速度的变化而转移到基板上的图像中产生的失真 并且基于由衬底台的加速度确定的校正值，响应于衬底台的速度变化而导致衬底载台的变形。

公开(公告)号：US06965428B2

公开(公告)日：2005-11-15

申请号：US10704638

申请日：2003-11-12

申请人： Yasuyo Muto ,  Kazunori Iwamoto ,  Yukio Takabayashi ,  Takashi Meguro

发明人： Yasuyo Muto ,  Kazunori Iwamoto ,  Yukio Takabayashi ,  Takashi Meguro

IPC分类号： H01L21/683 ,  H01L21/027 ,  H01L21/68 ,  H01L21/687 ,  G03B27/58 ,  G03B27/62

CPC分类号： H01L21/68785 ,  G03F7/707 ,  G03F7/70716 ,  H01L21/68 ,  H01L21/68792 ,  Y10T279/23

摘要： A stage apparatus has a substrate holding unit which chucks and holds a substrate, and includes a flat surface having a recess where the substrate holding unit is to be mounted. A fixing member fixes a projection support provided to the substrate holding unit onto the flat surface. The substrate holding unit is supported by the fixing member while a distal end of the projection support is in contact with the recess of the flat surface and the remaining portion of the substrate holding unit is not in contact with the flat surface.

摘要翻译： 平台装置具有夹持和保持基板的基板保持单元，并且包括具有要安装基板保持单元的凹部的平坦表面。 固定构件将设置在基板保持单元上的突起支撑件固定到平坦表面上。 基板保持单元由固定构件支撑，而突起支撑件的远端与平坦表面的凹部接触，并且基板保持单元的剩余部分不与平坦表面接触。

公开(公告)号：US06425960B1

公开(公告)日：2002-07-30

申请号：US09549704

申请日：2000-04-14

申请人： Yoshihito Yoshizawa ,  Yoshio Bizen ,  Shunsuke Arakawa ,  Michihiro Nagao ,  Takashi Meguro

发明人： Yoshihito Yoshizawa ,  Yoshio Bizen ,  Shunsuke Arakawa ,  Michihiro Nagao ,  Takashi Meguro

IPC分类号： H01F116

CPC分类号： H01F1/15341 ,  C22C33/003 ,  C22C45/02 ,  H01F1/15308 ,  H01F1/15333

摘要： A soft magnetic alloy strip is manufactured by a single roll method. The soft magnetic alloy strip is 0.2×d mm or less (, which “d” is a width of the strip,) in warpage in the widthwise direction of the strip, and has a continuous, long length not less than 50 m, in which a width of an air pockets occurring on a roll contact face is not more than 35 &mgr;m, a length of the air pockets is not more than 150 &mgr;m, and the centerline average roughness Ra of the roll contact face is not more than 0.5 &mgr;m.

摘要翻译： 软磁合金条通过单辊法制造。 在软带宽度方向上的软翘曲方向上，软磁合金条的长度为0.2xdmm以下（“d”是条的宽度），长度不小于50μm的连续长度，其中 在辊接触面上出现的气穴的宽度不大于35μm，气穴长度不大于150μm，辊接触面的中心线平均粗糙度Ra不大于0.5μm。

公开(公告)号：US5352268A

公开(公告)日：1994-10-04

申请号：US19657

申请日：1993-02-19

申请人： Takashi Meguro ,  Hideki Nakamura ,  Yoichi Mochida ,  Tsutomu Inui

发明人： Takashi Meguro ,  Hideki Nakamura ,  Yoichi Mochida ,  Tsutomu Inui

IPC分类号： H01F1/147 ,  H05K9/00 ,  H01F1/047

CPC分类号： H01F1/14733

摘要： A flat-shaped fine Fe-Ni alloy powder suitable for use as a magnetic shield coating material for cards or the like. The powder has a mean particle size of 0.1 to 30 .mu.m, a mean thickness not greater than 2 .mu.m and a coercive force not greater than 400 A/m. The flat-shaped fine powder is produced by preparing an Fe-Ni alloy powder of a composition which exhibits, in a bulk state, a saturated magnetostriction constant value falling within the range of .+-.15.times.10.sup.-6 and which contains, by weight, 70 to 83% Ni, 2 to 6% Mo, 3 to 6% Cu, 1 to 2% Mn, not more than 0.05% C and the balance Fe and incidental impurities, pulverizing the alloy powder by an attrition mill, and annealing the pulverized powder in a fluidized or moving state in a substantially non-oxidizing atmosphere.

摘要翻译： 适合用作卡片等的磁屏蔽涂层材料的扁平状Fe-Ni合金粉末。 粉末的平均粒径为0.1〜30μm，平均粒径不大于2μm，矫顽力不大于400A / m。 扁平状细粉末是通过制备组合物的Fe-Ni合金粉末制造的，该组合物在大体积状态下呈现在+/- 15×10 -6范围内的饱和磁致伸缩常数值， 70〜83％的Ni，2〜6％的Mo，3〜6％的Cu，1〜2％的Mn，不大于0.05％的C，余量为Fe和杂质，用磨粉机粉碎合金粉末， 在基本上非氧化性气氛中处于流化或移动状态的粉碎粉末。

公开(公告)号：US4851267A

公开(公告)日：1989-07-25

申请号：US087938

申请日：1987-08-21

申请人： Mikiyoshi Miyauchi ,  Takashi Meguro ,  Hisao Serizawa ,  Hiroaki Kusanagi

发明人： Mikiyoshi Miyauchi ,  Takashi Meguro ,  Hisao Serizawa ,  Hiroaki Kusanagi

IPC分类号： B22F7/04 ,  B22F7/08 ,  C23C24/08 ,  C23C24/10 ,  F16H55/06

CPC分类号： C23C24/08 ,  B22F7/08 ,  F16H55/06

摘要： A method of coating a metal article comprising the steps of mixing a slurry of carbides or borides of metals selected from the group consisting of metals belonging to groups IVB and VIB of the periodic table, an organic binder and an organic solvent and then spray coating the slurry on the surface of the article, then machining the coating on the article, and heating the article under pressure so that the organic binder in the coating is heated and eliminated, and placing a metallic binder and the coated article in a furnace whereupon the metallic binder is dissolved and combined with the article.

摘要翻译： 一种涂覆金属制品的方法，包括以下步骤：将选自属于周期表第IVB族和第VIB族的金属，有机粘合剂和有机溶剂的金属的碳化物或硼化物的浆料混合，然后喷涂 浆料在制品的表面上，然后在制品上加工涂层，并在压力下加热制品，使得涂层中的有机粘合剂被加热和去除，并将金属粘合剂和涂覆制品放置在炉中，由此金属 粘合剂溶解并与制品组合。

公开(公告)号：US4525222A

公开(公告)日：1985-06-25

申请号：US609837

申请日：1984-05-14

申请人： Takashi Meguro ,  Yasunobu Ogata ,  Yoshizo Sawada

发明人： Takashi Meguro ,  Yasunobu Ogata ,  Yoshizo Sawada

IPC分类号： C22C19/07 ,  C22C45/00 ,  C22F1/00 ,  H01F1/153 ,  H01F1/00

CPC分类号： H01F1/15341 ,  C22C45/00

摘要： A method of heat-treating an amorphous material as that the amorphous material has a high magnetic permeability, is disclosed in which an amorphous material having a Curie temperature T.sub.c higher than or equal to its crystallization temperature T.sub.x is held for a short time at a temperature T satisfying relations T.gtoreq.0.95 T.sub.c and T.gtoreq.T.sub.x.

摘要翻译： 公开了一种使非晶材料具有高导磁率的非晶材料的热处理方法，其中具有高于或等于其结晶温度Tx的居里温度Tc的非晶材料在温度下保持短时间 T满足关系T> / = 0.95 Tc和T> / = Tx。

公开(公告)号：US4474604A

公开(公告)日：1984-10-02

申请号：US490044

申请日：1983-04-29

申请人： Hideki Nakamura ,  Takashi Meguro ,  Noboru Hanai

发明人： Hideki Nakamura ,  Takashi Meguro ,  Noboru Hanai

IPC分类号： B22F9/10 ,  B22F9/14 ,  C25C5/00 ,  B01J2/02

CPC分类号： B22F9/10 ,  B22F9/14

摘要： A method of producing high-grade metal or alloy powder, improved to eliminate undesirable inclusions and to reduce the production cost. A solid electrode material made of a metal or alloy, having a composition substantially equal to the composition of aimed metal or alloy powder, is heated and molten in a vacuum chamber by application of a plasma, arc, electron beam or laser beam. The molten metal or alloy in the form of droplets fall into collision with the surface of a roll rotating at a high speed so as to be pulverized and partially solidified. The particles of the metal or alloy scattered by the roll is directed to one side of the roll and are spheroidized and solidified into fine particles before they are collected in a collecting box disposed at one side of the roll within the vacuum chamber.

摘要翻译： 一种生产高级金属或合金粉末的方法，改进以消除不期望的夹杂物并降低生产成本。 由金属或合金制成的固体电极材料，具有基本上等于目标金属或合金粉末的组成的组成，通过施加等离子体，电弧，电子束或激光束在真空室中加热和熔融。 液滴形式的熔融金属或合金与高速旋转的辊的表面碰撞，从而被粉碎和部分固化。 由辊散布的金属或合金的颗粒被引导到辊的一侧，并且在它们被收集在设置在真空室内的辊的一侧的收集箱中之前被球化并固化成细颗粒。

公开(公告)号：US20190228605A1

公开(公告)日：2019-07-25

申请号：US16317170

申请日：2016-07-12

申请人： Ryuichiro YAO ,  Takashi MEGURO

发明人： Ryuichiro YAO ,  Takashi MEGURO

IPC分类号： G07C13/00

摘要： An information providing system includes a distribution device configured to distribute a display information item corresponding to an address information item, a controller configured to link the address information item to an identification information item, a transmitter in a place where an entertainment is held, the transmitter configured to transmit a transmission signal obtained by encoding the identification information item, and a receiving terminal configured to receive the transmission signal from the transmitter and decode the transmission signal into the identification information item. The display information item displays a ranking based on a number of received votes each of entrants for the entertainment has received. The distribution device is configured to update, at predetermined time intervals, the display information item that indicates the ranking based on the number of received votes and to set the address information item to correspond to a plurality of display information items.

公开(公告)号：US07463335B2

公开(公告)日：2008-12-09

申请号：US11762286

申请日：2007-06-13

申请人： Yoshikazu Miyajima ,  Takashi Meguro

发明人： Yoshikazu Miyajima ,  Takashi Meguro

IPC分类号： G03B27/72 ,  G03B27/42

CPC分类号： G03F7/70066 ,  G03F7/70075 ,  G03F7/709

摘要： An exposure apparatus for illuminating an original through an illumination system and for transferring a pattern of the original onto a substrate. The apparatus includes a movable element having a blade, the blade being provided in the illumination system and blocking at least a portion of illumination light, a stator configured to relatively move the movable element, and a resilient supporting member configured to resiliently support the stator without contacting the stator.

摘要翻译： 一种用于通过照明系统照亮原稿并将原稿的图案转印到基板上的曝光装置。 该装置包括具有刀片的可移动元件，刀片设置在照明系统中并且阻挡照明光的至少一部分，被配置为相对移动可移动元件的定子以及构造成弹性地支撑定子而没有 接触定子。

公开(公告)号：US20060114433A1

公开(公告)日：2006-06-01

申请号：US11251837

申请日：2005-10-18

申请人： Yoshikazu Miyajima ,  Takashi Meguro

发明人： Yoshikazu Miyajima ,  Takashi Meguro

IPC分类号： G03B27/42

CPC分类号： G03F7/70066 ,  G03F7/70075 ,  G03F7/709

摘要： Disclosed is an exposure apparatus for projecting, by exposure, a pattern of an original onto a substrate, the exposure apparatus including comprising a light blocking system for blocking at least a portion of exposure light, a driving system for moving the light blocking system, and a reaction force absorbing system for absorbing a drive reaction force of the driving system, wherein the driving system includes a stator, and wherein the reaction force absorbing system absorbs the reaction force by moving the stator of the driving system. With this structure, adverse influence of vibratory external disturbance to be caused by a drive reaction force as the blade of the light blocking system is driven, can be reduced significantly.

摘要翻译： 公开了一种曝光装置，用于通过曝光将原稿的图案曝光到基板上，所述曝光装置包括包括用于遮挡至少一部分曝光光的遮光系统，用于移动遮光系统的驱动系统，以及 用于吸收驱动系统的驱动反作用力的反作用力吸收系统，其中所述驱动系统包括定子，并且其中所述反作用力吸收系统通过移动所述驱动系统的定子来吸收所述反作用力。 利用这种结构，驱动作为遮光系统的叶片的驱动反作用力引起的振动外部干扰的不良影响可以显着降低。