Optical waveguide device and optical microscope using the same
    1.
    发明授权
    Optical waveguide device and optical microscope using the same 失效
    光波导器件和光学显微镜使用相同

    公开(公告)号:US5452382A

    公开(公告)日:1995-09-19

    申请号:US232192

    申请日:1994-05-04

    摘要: An optical waveguide device formed by a material showing anisotropy for refraction index and an optical instrument using the same device. The device comprises an electro-optic single crystal substrate on which are formed a first core portion higher in refractive index than the substrate with respect to both ordinary and extraordinary rays and a second core portion higher in refractive index than the substrate with respect to extraordinary rays pnly whereby the first core portion forms a single-moded waveguide for ordinary rays, and the overlapping region of the first and second core portions forms a double-moded waveguide for extraordinary rays. This optical waveguide device is used in place of a pinhole elementin an optical system of a confocal scanning optical microscopeso as to guide illuminating light to an object to be detected and to guide the reflected light from the object into a detector. This microscope includes a polarization conversion element for converting the polarizing direction of the illuminating light to one different from that of reflected light. The optical waveguide device functions as a single-moded waveguide for the illuminating light and as a double-moded waveguide for the reflected light.

    摘要翻译: PCT No.PCT / JP93 / 01264 Sec。 371日期:1994年5月4日 102(e)日期1994年5月4日PCT 1994年7月25日PCT公布。 公开号WO94 / 06041 日期:1994年3月17日。一种由表示折射率各向异性的材料形成的光波导装置和使用该装置的光学仪器。 该器件包括电光单晶衬底,在其上形成有相对于普通和非常光线而具有比衬底更高的折射率的第一芯部分,以及相对于非常光线而言,折射率高于衬底的第二芯部分 由此第一芯部分形成用于普通光线的单模波导,并且第一和第二芯部分的重叠区域形成用于非常光线的双模波导。 该光波导装置用于代替共焦扫描光学显微镜的光学系统中的针孔元件,以将照明光引导到待检测的物体,并将来自物体的反射光引导到检测器中。 该显微镜包括用于将照明光的偏振方向转换为与反射光不同的偏振方向的偏振转换元件。 光波导器件用作用于照明光的单模波导和用作反射光的双模波导。

    Confocal laser scanning microscope with dual mode waveguide
    2.
    发明授权
    Confocal laser scanning microscope with dual mode waveguide 失效
    共焦激光扫描显微镜双模波导

    公开(公告)号:US5389783A

    公开(公告)日:1995-02-14

    申请号:US73712

    申请日:1993-06-09

    IPC分类号: G02B21/00 H01J3/14

    摘要: A confocal laser scanning differential interference microscope includes an illumination optical system for radiating a laser light spot onto an object, a focusing optical system for focusing light reflected by the object onto a detection surface, a detection optical system for detecting the reflected light focused on the detection surface, a scanning device for scanning the laser light spot relative to the object, and an optical element arranged between the focusing optical system and the detection optical system, and having a waveguide device for propagating the reflected light focused by the focusing optical system. The waveguide device has waveguides in at least two directions perpendicular to the optical axis of incident light. The waveguides constitute a double-mode transmission waveguide, which selects either of a combination of a 0th-order mode and a 1st-order mode and the 0th-order mode alone in each of the two directions of the reflected light from the object according to amplitude distributions of electric fields in the two directions of the incident light as waveguide modes in the two directions upon propagation of the incident light, and propagates light in the selected modes. The detection optical system receives light emerging from the waveguide, and detects whether the waveguide in each of the two directions is the combination of the 0th-order mode and the 1st-order mode, or the 0th-order mode alone, thereby detecting amplitude distributions of the electric fields, in the two directions, of the reflected light from the object.

    摘要翻译: 共焦激光扫描微分干涉显微镜包括用于将激光光点照射到物体上的照明光学系统,用于将被物体反射的光聚焦在检测面上的聚焦光学系统,用于检测聚焦在物体上的反射光的检测光学系统 检测表面,用于相对于物体扫描激光光点的扫描装置和布置在聚焦光学系统和检测光学系统之间的光学元件,并且具有用于传播由聚焦光学系统聚焦的反射光的波导装置。 波导装置在垂直于入射光的光轴的至少两个方向上具有波导。 波导构成双模传输波导,其根据对象的反射光的两个方向中的每一个中单独选择0次模式和1次模式的组合以及0次模式 入射光的两个方向上的电场的振幅分布作为入射光传播时的两个方向上的波导模式,并以所选择的模式传播光。 检测光学系统接收从波导出射的光,并且检测两个方向中的每个方向上的波导是否是0次模式和1次模式的组合,或者单独的0次模式,从而检测振幅分布 在两个方向的电场中,来自物体的反射光。

    System for detecting an optical information and scanning microscope
system
    3.
    发明授权
    System for detecting an optical information and scanning microscope system 失效
    用于检测光学信息和扫描显微系统的系统

    公开(公告)号:US5617500A

    公开(公告)日:1997-04-01

    申请号:US443225

    申请日:1995-05-17

    IPC分类号: G02B21/00 G02B6/10 G11B7/00

    CPC分类号: G02B21/002

    摘要: This laser scanning microscope has a second light source for emitting second light into one of branch channel waveguides, and a third photodetector for detecting a light intensity distribution formed on the end face of the trunk channel waveguide based on the second light, and a controller for controlling the voltage to be applied from a voltage application unit to electrode on the waveguide in accordance with the output signal from the third photodetector.

    摘要翻译: 该激光扫描显微镜具有用于将第二光发射到分支通道波导中的一个的第二光源,以及用于基于第二光检测形成在主干道波导的端面上的光强度分布的第三光电检测器,以及用于 根据来自第三光电检测器的输出信号,控制从电压施加单元施加到波导上的电极的电压。

    Confocal laser scanning mode interference contrast microscope, and
method of measuring minute step height and apparatus with said
microscope
    4.
    发明授权
    Confocal laser scanning mode interference contrast microscope, and method of measuring minute step height and apparatus with said microscope 失效
    共焦激光扫描模式干涉对比显微镜,以及用该显微镜测量微步高和装置的方法

    公开(公告)号:US5581345A

    公开(公告)日:1996-12-03

    申请号:US364709

    申请日:1994-12-28

    IPC分类号: G01B11/06 G02B21/00 G01B11/00

    摘要: A confocal laser scanning mode interferene contrast microscope comprises a laser source, an illuminating optical system for condensing a light beam from the laser source and forming a light spot on an object to be examined, a condensing optical system for condensing the light beam from the object to be examined on a detecting surface, a detecting device for detecting the light beam condensed on the detecting surface, the detecting device having a substrate formed with a channel waveguide and two light detecting elements, the channel waveguide having a double mode channel waveguide having an entrance end surface on the detecting surface and a waveguide fork which forks the double mode channel waveguide into two channel waveguides, the two detecting elements detecting lights propagated through the two channel waveguides, a scanning device for moving the object to be examined and the light spot relative to each other, and a signal processing device for producing differential information of the object to be examined by the detection signals of the detecting elements.

    摘要翻译: 共焦激光扫描模式干涉对比显微镜包括激光源,用于聚集来自激光源的光束并在被检体上形成光斑的照明光学系统,用于会聚来自物体的光束的聚光光学系统 在检测面上检查的检测装置,检测在检测面上聚光的光束的检测装置,检测装置具有形成有通道波导的基板和两个光检测元件,该通道波导具有双模式通道波导,其具有 检测表面上的入射端面和将双模通道波导分叉成两个通道波导的波导叉,两个检测元件检测通过两个通道波导传播的光,用于移动被检体的扫描装置和光点 相对于彼此,以及用于产生差分信息的信号处理装置 f是由检测元件的检测信号检查的物体。