公开(公告)号：USD676344S1

公开(公告)日：2013-02-19

申请号：US29433506

申请日：2012-10-01

申请人： Chih-Kun Shih ,  Wan-Cheng Luo ,  Xiao-Mao Xie ,  Wei Xu ,  Si-He Hu ,  Tao Hou

设计人： Chih-Kun Shih ,  Wan-Cheng Luo ,  Xiao-Mao Xie ,  Wei Xu ,  Si-He Hu ,  Tao Hou

公开(公告)号：US20090283252A1

公开(公告)日：2009-11-19

申请号：US12122616

申请日：2008-05-16

申请人： Tao Hou ,  Son T. Nguyen ,  Kenric Choi ,  Anh N. Nguyen

发明人： Tao Hou ,  Son T. Nguyen ,  Kenric Choi ,  Anh N. Nguyen

IPC分类号： G05D23/00 ,  F28F1/10 ,  H05B1/00 ,  H05B1/02

CPC分类号： F28F7/02

摘要： A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.

摘要翻译： 一种用于加热或冷却流体的方法和装置。 连接到多个分配喷嘴的入口导管，与设备外围的通道流体连通。 插入件和套筒协同地限定与流体流体连通的薄间隙，流体流过该间隙。 在薄间隙附近的热插入物通过出口管道流出或流出流体。

公开(公告)号：US09089007B2

公开(公告)日：2015-07-21

申请号：US13766885

申请日：2013-02-14

申请人： Yao-Hung Yang ,  Jeonghoon Oh ,  Frank F. Hooshdaran ,  Tom K. Cho ,  Tao Hou

发明人： Yao-Hung Yang ,  Jeonghoon Oh ,  Frank F. Hooshdaran ,  Tom K. Cho ,  Tao Hou

IPC分类号： H05B3/10 ,  H05B3/12 ,  H01L21/67 ,  H05B1/02 ,  F26B19/00

CPC分类号： H05B3/12 ,  H01L21/67103 ,  H01L21/67248 ,  H05B1/0233

摘要： Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber.

摘要翻译： 提供了方法和衬底处理系统，用于当衬底设置在衬底支撑组件的衬底支撑表面上时，用于控制衬底加热效率并在衬底的表面上产生期望的温度分布。 基板支撑组件具有最小的软件控制和硬件要求，并且包括由多个加热元件部分组成的加热元件。 加热元件连接到用于调节多个加热元件部分的温度输出的电源并且在处理室内的基板支撑组件的基板支撑表面上提供可调节的多加热区域和期望的温度分布。

公开(公告)号：US20130287529A1

公开(公告)日：2013-10-31

申请号：US13841738

申请日：2013-03-15

申请人： Yao-Hung YANG ,  Jeonghoon OH ,  Frank F. HOOSHDARAN ,  Tom K. CHO ,  Tao HOU ,  Yuanhung GUO

发明人： Yao-Hung YANG ,  Jeonghoon OH ,  Frank F. HOOSHDARAN ,  Tom K. CHO ,  Tao HOU ,  Yuanhung GUO

IPC分类号： H01L21/677 ,  H01L21/683

CPC分类号： H01L21/67739 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/683 ,  H01L21/68742

摘要： A substrate processing system with independent substrate placement capability to two or more substrate support assemblies is provided. Two different sets of fixed-length lift pins are disposed on two or more substrate support lift pin assemblies of two or more process chambers, where the length of each lift pin in one process chamber is different from the length of each lift pin in another process chamber. The substrate processing system includes simplified mechanical substrate support lift pin mechanisms and minimum accessory parts cooperating with a substrate transfer mechanism (e.g., a transfer robot) for efficient and independent loading, unloading, and transfer of one or more substrates between two or more processing regions in a twin chamber or between two or more process chambers. A method for positioning one or more substrates to be loaded, unloaded, or processed independently or simultaneously in two or more processing regions or process chambers is provided.

摘要翻译： 提供了一种对两个或更多个基板支撑组件具有独立的基板放置能力的基板处理系统。 两个不同组的固定长度提升销设置在两个或更多个处理室的两个或更多个基板支撑提升销组件上，其中一个处理室中的每个提升销的长度在另一个过程中与每个提升销的长度不同 房间。 基板处理系统包括简化的机械基板支撑提升销机构和与基板传送机构（例如，传送机器人）协作的最小附件部件，用于在两个或多个处理区域之间有效且独立地加载，卸载和传送一个或多个基板 在双室中或两个或更多个处理室之间。 提供了一种用于定位要在两个或更多个处理区域或处理室中单独或同时加载，卸载或处理的一个或多个基板的方法。

公开(公告)号：US20130284721A1

公开(公告)日：2013-10-31

申请号：US13766885

申请日：2013-02-14

申请人： Yao-Hung Yang ,  Jeonghoon Oh ,  Frank F. Hooshdaran ,  Tom K. Cho ,  Tao Hou

发明人： Yao-Hung Yang ,  Jeonghoon Oh ,  Frank F. Hooshdaran ,  Tom K. Cho ,  Tao Hou

IPC分类号： H05B3/12

CPC分类号： H05B3/12 ,  H01L21/67103 ,  H01L21/67248 ,  H05B1/0233

摘要： Methods and substrate processing systems are provided for controlling substrate heating efficiency and generating a desired temperature profile on the surface of a substrate when the substrate is disposed on a substrate support surface of a substrate support assembly. The substrate support assembly is provided with minimum software control and hardware requirement and includes a heating element comprised of multiple heating elements sections. The heating element is connected to a power source for adjusting the temperature outputs of the multiple heating element sections and providing adjustable multi-heating zones and desired temperature distribution over the substrate support surface of the substrate support assembly within a process chamber.

摘要翻译： 提供了方法和衬底处理系统，用于当衬底设置在衬底支撑组件的衬底支撑表面上时，用于控制衬底加热效率并在衬底的表面上产生期望的温度分布。 基板支撑组件具有最小的软件控制和硬件要求，并且包括由多个加热元件部分组成的加热元件。 加热元件连接到用于调节多个加热元件部分的温度输出的电源并且在处理室内的基板支撑组件的基板支撑表面上提供可调节的多加热区域和期望的温度分布。

公开(公告)号：US08309874B2

公开(公告)日：2012-11-13

申请号：US12122616

申请日：2008-05-16

申请人： Tao Hou ,  Son T. Nguyen ,  Kenric Choi ,  Anh N. Nguyen

发明人： Tao Hou ,  Son T. Nguyen ,  Kenric Choi ,  Anh N. Nguyen

IPC分类号： H05B1/00

CPC分类号： F28F7/02

摘要： A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit.

摘要翻译： 一种用于加热或冷却流体的方法和装置。 连接到多个分配喷嘴的入口导管，与设备外围的通道流体连通。 插入件和套筒协同地限定与流体流体连通的薄间隙，流体流过该间隙。 在薄间隙附近的热插入物通过出口管道流出或流出流体。

公开(公告)号：US09766022B2

公开(公告)日：2017-09-19

申请号：US13667314

申请日：2012-11-02

申请人： Tao Hou ,  Son T. Nguyen ,  Kenric T. Choi ,  Anh N. Nguyen

发明人： Tao Hou ,  Son T. Nguyen ,  Kenric T. Choi ,  Anh N. Nguyen

IPC分类号： H05B1/00 ,  F28F7/02

CPC分类号： F28F7/02

摘要： A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.

公开(公告)号：US20130058637A1

公开(公告)日：2013-03-07

申请号：US13667314

申请日：2012-11-02

申请人： Tao Hou ,  Son T. Nguyen ,  Kenric T. Choi ,  Anh N. Nguyen

发明人： Tao Hou ,  Son T. Nguyen ,  Kenric T. Choi ,  Anh N. Nguyen

IPC分类号： F24H3/04 ,  H05B1/02

CPC分类号： F28F7/02

摘要： A method and apparatus for heating or cooling a fluid is provided. In one embodiment, a heat exchanger is provided. The heat exchanger includes a first subassembly comprising an insert. The insert comprises a body having a blind passage formed axially in the body, a plurality of nozzles formed therein, and a first plurality of heat exchange elements disposed within the body. The heat exchanger also comprises a second subassembly comprising a sleeve and a second plurality of heat exchange elements disposed within the sleeve, wherein the insert is sealably engaged inside the sleeve and the insert and the sleeve cooperatively define a thin gap, and wherein each of the plurality of nozzles are disposed radially between the blind passage and the thin gap.

摘要翻译： 提供了用于加热或冷却流体的方法和装置。 在一个实施例中，提供了热交换器。 热交换器包括包括插入件的第一子组件。 插入件包括具有在主体中轴向形成的盲通道的主体，形成在其中的多个喷嘴，以及设置在主体内的第一多个热交换元件。 热交换器还包括第二子组件，其包括套筒和设置在套筒内的第二多个热交换元件，其中插入件可密封地接合在套筒内，并且插入件和套筒协同地限定薄间隙，并且其中 多个喷嘴径向设置在盲通道和薄间隙之间。

公开(公告)号：US20110205191A1

公开(公告)日：2011-08-25

申请号：US13120815

申请日：2009-09-08

申请人： Tao Hou ,  Honggang Wang ,  Jie Wang ,  Hang Yin

发明人： Tao Hou ,  Honggang Wang ,  Jie Wang ,  Hang Yin

IPC分类号： G06F3/033

CPC分类号： G06F3/046 ,  G06F3/03545 ,  G06F2203/04808

摘要： An electromagnetic sensing device having a multi-point touch function comprises electromagnetic pens (101) for inputting graphics and an electromagnetic sensing board for detecting trace information of the inputted graphics. Each of the electromagnetic pens (101) has a resonance circuit provided therein, and the electromagnetic sensing board has an electromagnetic wave transmitter (102), an electromagnetic wave receiver (105), a controller (109) and an electric wave frequency switching unit (103) provided therein. The electric wave frequency switching unit (103) of the electromagnetic sensing board receives an instruction from the controller (109) to control the electromagnetic wave transmitter (102) to transmit electromagnetic waves at different frequencies, and the electromagnetic pens (101) generate electromagnetic resonance waves at respective resonance frequencies. The electromagnetic wave receiver (105) receives the electromagnetic resonance waves at the respective resonance frequencies so that the trace information of the electromagnetic pens (101) having the respective resonance frequencies is detected. With this electromagnetic sensing device, it is possible to achieve a wireless and passive electromagnetic sensing device having the multi-point touch function.

摘要翻译： 具有多点触摸功能的电磁感测装置包括用于输入图形的电磁笔（101）和用于检测输入图形的跟踪信息的电磁感测板。 每个电磁笔（101）具有设置在其中的谐振电路，电磁感测板具有电磁波发射器（102），电磁波接收器（105），控制器（109）和电波频率切换单元 103）。 电磁感测板的电波频率切换单元（103）从控制器（109）接收控制电磁波发射器（102）发送不同频率的电磁波的指令，电磁笔（101）产生电磁谐振 波在各自的共振频率。 电磁波接收器（105）以相应的谐振频率接收电磁谐振波，从而检测具有相应谐振频率的电磁笔（101）的迹线信息。 利用该电磁感测装置，可以实现具有多点触摸功能的无线和被动电磁感测装置。