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    Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same
    1.
    发明授权
    Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same 有权
    具有气动直线导轨的平行滑块装置及其控制方法及使用其的测量装置

    公开(公告)号：US08984971B2

    公开(公告)日：2015-03-24

    申请号：US13261422

    申请日：2010-03-10

    申请人： Kaoru Naoi ,  Yoichi Ishizaki ,  Tatsuhito Inouchi ,  Koichi Sekiguchi

    发明人： Kaoru Naoi ,  Yoichi Ishizaki ,  Tatsuhito Inouchi ,  Koichi Sekiguchi

    IPC分类号： G01B21/08 ,  F16C29/02

    CPC分类号： F16C29/025 ,  F16C32/0614 ,  G01B21/08

    摘要： In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.

    摘要翻译： 在具有气动线性引导件的平行滑动装置中，防止机械联接器的刚度和空气轴承刚度彼此干扰，使得可以以高度可重复的方式将两个滑块之间的平行度保持在高精度。 通过改变气隙尺寸和供气压力，第一气动线性引导件和第二气动线性引导件之间的滑块支撑刚度（空气轴承刚度）的差异，使得线性中的任何误差由于 直线导轨侧面的气隙以稳定的方式具有较低的滑块支撑刚度。

    PARALLEL SLIDER DEVICE WITH A PNEUMATIC LINEAR GUIDE, CONTROL METHOD THEREFOR AND MEASURING DEVICE USING SAME
    3.
    发明申请
    PARALLEL SLIDER DEVICE WITH A PNEUMATIC LINEAR GUIDE, CONTROL METHOD THEREFOR AND MEASURING DEVICE USING SAME 有权
    具有气动线性导轨的平行滑动装置及其使用的控制方法及其测量装置

    公开(公告)号：US20120318078A1

    公开(公告)日：2012-12-20

    申请号：US13261422

    申请日：2010-03-10

    申请人： Kaoru Naoi ,  Yoichi Ishizaki ,  Tatsuhito Inouchi ,  Koichi Sekiguchi

    发明人： Kaoru Naoi ,  Yoichi Ishizaki ,  Tatsuhito Inouchi ,  Koichi Sekiguchi

    IPC分类号： F16C32/06 ,  G01B21/08

    CPC分类号： F16C29/025 ,  F16C32/0614 ,  G01B21/08

    摘要： In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.

    摘要翻译： 在具有气动线性引导件的平行滑动装置中，防止机械联接器的刚度和空气轴承刚度彼此干扰，使得可以以高度可重复的方式将两个滑块之间的平行度保持在高精度。 通过改变气隙尺寸和供气压力，第一气动线性引导件和第二气动线性引导件之间的滑块支撑刚度（空气轴承刚度）的差异，使得线性中的任何误差由于 直线导轨侧面的气隙以稳定的方式具有较低的滑块支撑刚度。