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1.发明授权Control device for a parallel slider device, control method and measuring device using same 有权并联滑块装置的控制装置，使用该装置的控制方法和测量装置公开(公告)号：US08819952B2
公开(公告)日：2014-09-02
申请号：US13261431
申请日：2010-03-10
CPC分类号： G01B11/306 , G01B5/0009 , G01B7/345 , G05B19/19 , G05B2219/41007 , G05B2219/41264 , G05B2219/42336 , H01L21/67288
摘要： In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.
摘要翻译： 在平行的滑块装置中，允许两个滑块以平滑的方式移动而不会彼此干涉。 对于前线性伺服电动机的前伺服控制器和后线性伺服电动机的后伺服控制器给出相同的位置命令，并且前伺服控制器和后伺服控制器具有相互不同的控制增益。
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2.发明申请Control Device for a Parallel Slider Device, Control Method Therefor and Measuring Device Using Same 有权一种平行滑块装置的控制装置及其控制方法及使用其的测量装置公开(公告)号：US20130008042A1
公开(公告)日：2013-01-10
申请号：US13261431
申请日：2010-03-10
CPC分类号： G01B11/306 , G01B5/0009 , G01B7/345 , G05B19/19 , G05B2219/41007 , G05B2219/41264 , G05B2219/42336 , H01L21/67288
摘要： In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.
摘要翻译： 在平行的滑块装置中，允许两个滑块以平滑的方式移动而不会彼此干涉。 对于前线性伺服电动机的前伺服控制器和后线性伺服电动机的后伺服控制器给出相同的位置命令，并且前伺服控制器和后伺服控制器具有相互不同的控制增益。
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3.发明授权Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same 有权具有气动直线导轨的平行滑块装置及其控制方法及使用其的测量装置公开(公告)号：US08984971B2
公开(公告)日：2015-03-24
申请号：US13261422
申请日：2010-03-10
CPC分类号： F16C29/025 , F16C32/0614 , G01B21/08
摘要： In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.
摘要翻译： 在具有气动线性引导件的平行滑动装置中，防止机械联接器的刚度和空气轴承刚度彼此干扰，使得可以以高度可重复的方式将两个滑块之间的平行度保持在高精度。 通过改变气隙尺寸和供气压力，第一气动线性引导件和第二气动线性引导件之间的滑块支撑刚度（空气轴承刚度）的差异，使得线性中的任何误差由于 直线导轨侧面的气隙以稳定的方式具有较低的滑块支撑刚度。
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4.发明申请PARALLEL SLIDER DEVICE WITH A PNEUMATIC LINEAR GUIDE, CONTROL METHOD THEREFOR AND MEASURING DEVICE USING SAME 有权具有气动线性导轨的平行滑动装置及其使用的控制方法及其测量装置公开(公告)号：US20120318078A1
公开(公告)日：2012-12-20
申请号：US13261422
申请日：2010-03-10
CPC分类号： F16C29/025 , F16C32/0614 , G01B21/08
摘要： In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.
摘要翻译： 在具有气动线性引导件的平行滑动装置中，防止机械联接器的刚度和空气轴承刚度彼此干扰，使得可以以高度可重复的方式将两个滑块之间的平行度保持在高精度。 通过改变气隙尺寸和供气压力，第一气动线性引导件和第二气动线性引导件之间的滑块支撑刚度（空气轴承刚度）的差异，使得线性中的任何误差由于 直线导轨侧面的气隙以稳定的方式具有较低的滑块支撑刚度。
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公开(公告)号：USD658685S1
公开(公告)日：2012-05-01
申请号：US29366648
申请日：2010-07-28
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