-
公开(公告)号：US07318277B2
公开(公告)日：2008-01-15
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
-
公开(公告)号：US20050262691A1
公开(公告)日：2005-12-01
申请号：US11133469
申请日：2005-05-20
CPC分类号： B41J2/1623 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49128 , Y10T29/4913 , Y10T29/49147 , Y10T29/49151 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.
摘要翻译： 一种制造液体喷射头的方法包括以下步骤：在通道形成基板的一个平面上形成压电元件，其间插入有振动板，并且在形成连通部的区域中移除振动板，从而形成 穿孔; 在其上形成有压电元件的通道形成基板的一个平面上形成预定的金属层，以与金属层密封穿透的孔，并且在与压电元件相对应的区域中图案化金属层，从而形成引线 电极; 将其中形成有储存部的储存器形成板粘附到通道形成基板的一个平面; 从通道形成基板的另一面湿式蚀刻直到振动板和金属层露出，从而形成压力产生室和连通部分; 以及通过蚀刻去除所述金属层，以允许所述储存部分和所述连通部分彼此连通。
-
公开(公告)号：US08061813B2
公开(公告)日：2011-11-22
申请号：US11854359
申请日：2007-09-12
IPC分类号： B41J2/05
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
摘要翻译： 一种液体喷射头，其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道，至少包括通过分隔壁划分的压力产生室，每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室，并且在压力产生室中产生压力变化，从而引起液滴喷射。
-
公开(公告)号：US08342656B2
公开(公告)日：2013-01-01
申请号：US13299693
申请日：2011-11-18
CPC分类号： B41J2/14233 , B41J2/045 , B41J2202/11
摘要： A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.
-
公开(公告)号：US07571525B2
公开(公告)日：2009-08-11
申请号：US11392668
申请日：2006-03-30
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.
摘要翻译： 包括以下步骤：在通道形成基板的表面上形成压电元件，其间具有振动板，并且通过去除振动板中的区域形成穿透部分，该区域将用作连通部分; 形成引线电极并用互连层密封穿透部分; 将储层形成板连接到通道形成基板的表面; 通过湿法蚀刻形成液体通道; 在液体通道的内表面上形成保护膜; 在互连层上分离和去除保护膜; 并且通过除去互连层的对应部分而使储存部和连通部彼此连通，并且根据制造方法，在形成液体通道的同时，形成连通部， 振动板的开口的边缘位于靠近穿透部分的开口的边缘的外侧，并且以至少穿透部分的开口的边缘仅由振动的任何一个构成 板和互连层。
-
公开(公告)号：US20060250456A1
公开(公告)日：2006-11-09
申请号：US11392668
申请日：2006-03-30
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.
-
公开(公告)号：US07402256B2
公开(公告)日：2008-07-22
申请号：US11234266
申请日：2005-09-26
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
CPC分类号： B41J2/1631 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/49401
摘要： A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
摘要翻译： 一种液体喷射头的制造方法，其特征在于，在通路形成基板的一个面上形成振动板和压电元件，在作为连通部的区域中除去振动板，形成露出部 ; 在曝光部分内的通道形成基板上形成布线层，形成引线电极; 将储存器形成板结合到通道形成基板的一个表面; 在其另一个表面湿法蚀刻通道形成基板以形成压力产生室和连通部分; 在压力发生室和连通部的内表面上形成耐液体保护膜; 去除暴露部分内的保护膜; 在连通部侧进行湿式蚀刻，除去配线层，从而建立储存部与通气部之间的连通。
-
公开(公告)号：US20060064873A1
公开(公告)日：2006-03-30
申请号：US11234266
申请日：2005-09-26
申请人： Akira Matsuzawa , Mutsuhiko Ota
发明人： Akira Matsuzawa , Mutsuhiko Ota
IPC分类号： B21D53/76
CPC分类号： B41J2/1631 , B41J2/161 , B41J2/1629 , B41J2002/14241 , B41J2002/14491 , Y10T29/49401
摘要： A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.
摘要翻译： 一种液体喷射头的制造方法，其特征在于，在通路形成基板的一个面上形成振动板和压电元件，在作为连通部的区域中除去振动板，形成露出部 ; 在曝光部分内的通道形成基板上形成布线层，形成引线电极; 将储存器形成板结合到通道形成基板的一个表面; 在其另一个表面湿法蚀刻通道形成基板以形成压力产生室和连通部分; 在压力发生室和连通部的内表面上形成耐液体保护膜; 去除暴露部分内的保护膜; 在连通部侧进行湿式蚀刻，除去配线层，从而建立储存部与通气部之间的连通。
-
9.发明授权Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效喷墨记录头，其制造方法和喷墨记录装置公开(公告)号：US07135121B2
公开(公告)日：2006-11-14
申请号：US10754712
申请日：2004-01-12
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.
摘要翻译： 一种用于提高压电元件和压力发生室之间的相对位置精度的喷墨记录头的制造方法，以改善喷墨特性和稳定性。 该制造方法包括以下步骤：在通道形成基板上形成通道形成层，并且对通道形成层的空间部分的区域赋予蚀刻选择性; 在通道形成层上形成振动板和压电元件; 在所述通道形成基板上进行各向异性蚀刻，至少形成到所述空间部分的区域，蚀刻所述通道形成层以形成所述空间部分，以及形成与所述空间部分相对的压力产生室; 并将喷嘴板接合到通道形成基板。
-
10.发明授权Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效喷墨记录头，其制造方法和喷墨记录装置公开(公告)号：US06712456B2
公开(公告)日：2004-03-30
申请号：US09756292
申请日：2001-01-09
IPC分类号： B41J2045
CPC分类号： B41J2/1631 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1639 , B41J2/1646 , B41J2002/14419 , Y10T29/49401
摘要： Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein. The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 close to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.
摘要翻译： 公开了一种提高压电元件和压力发生室之间的相对位置精度的喷墨记录头，以改善喷墨特性和稳定性，能够以高密度排列压力发生室，并减少压力产生室之间的串扰。 此外，公开了其制造方法以及其中内置喷墨记录头的喷墨记录装置。喷墨记录头包括：具有形成在其中的压力发生室11的通道形成基板10， 其与喷嘴孔连通; 以及压电元件300，其通过构成压力发生室11的一部分的振动板，在与压力发生室11对应的区域中由薄膜和平版印刷法形成。喷墨记录头的特征在于， 与压力发生室11连通并且具有由振动板构成的至少一个表面的空间部分41设置在通道形成基板10和振动板之间的区域中，该区域与压力产生室11相对，并且在 靠近空间部41的压力发生室11的最小宽度被设定为等于空间部41的宽度以下，从而提高了压力发生室11与压电元件300之间的相对位置精度。
-
-
-
-
-
-
-
-
-
搜索结果
94 条记录 (耗时 0.022 秒)
