Fluid ejection devices and methods of fabrication
    4.
    发明授权
    Fluid ejection devices and methods of fabrication 有权
    流体喷射装置和制造方法

    公开(公告)号:US07909428B2

    公开(公告)日:2011-03-22

    申请号:US11495241

    申请日:2006-07-28

    IPC分类号: B41J2/015 B41J2/14

    摘要: A fluid ejection device includes a fluidic layer assembly mounted to a substrate, the fluidic layer assembly having a raised portion formed on a side that faces away from the substrate. A first nozzle is formed through a portion of the fluidic layer assembly other than the raised portion, and a second, larger nozzle is formed through the raised portion. A method of fabricating a fluid ejection device includes applying a first layer of a photoresist material to a substrate and a second layer of a photoresist material to the first layer. A sequence of exposures defines a first region of soluble material in the first layer that becomes the first nozzle and second and third regions of soluble material in the first and second layers, respectively, that jointly become the second nozzle. A region of insoluble material in the second layer becomes the raised portion.

    摘要翻译: 流体喷射装置包括安装到基底的流体层组件,流体层组件具有形成在远离基底的一侧上的凸起部分。 第一喷嘴通过除了凸起部分之外的流体层组件的一部分形成,并且通过凸起部分形成第二较大的喷嘴。 制造流体喷射装置的方法包括将光致抗蚀剂材料的第一层施加到基底,将第二层光致抗蚀剂材料施加到第一层。 曝光序列限定第一层中的可溶性材料的第一区域,其分别成为共同成为第二喷嘴的第一和第二层中的第一喷嘴和可溶性材料的第二和第三区域。 第二层中不溶物的区域变成凸起部分。

    Method for making fluid emitter orifice
    7.
    发明授权
    Method for making fluid emitter orifice 有权
    制造流体发射器孔的方法

    公开(公告)号:US07585616B2

    公开(公告)日:2009-09-08

    申请号:US11047454

    申请日:2005-01-31

    IPC分类号: B41J2/16

    摘要: A method of forming a tapered bore an orifice layer of a photo-resist comprises forming a lens in a surface of a first unexposed portion of the layer and exposing the first unexposed portion through a bore-hole mask to define an exposed portion and a second unexposed portion, wherein the second unexposed portion has a tapered shape. The layer is baked to cross-link the exposed portion and developed to remove the second unexposed portion to form a tapered bore hole. The tapered bore hole has a shape corresponding to the tapered shape.

    摘要翻译: 形成光刻胶的孔层的锥形孔的方法包括在该层的第一未曝光部分的表面中形成透镜,并通过钻孔掩模暴露第一未曝光部分以限定曝光部分和第二曝光部分 未曝光部分,其中第二未曝光部分具有锥形形状。 烘烤该层以交联暴露部分并显影以除去第二未曝光部分以形成锥形钻孔。 锥形孔具有对应于锥形形状的形状。