公开(公告)号：US20110291009A1

公开(公告)日：2011-12-01

申请号：US13148205

申请日：2010-01-20

申请人： Tohru Ando ,  Masahiro Sasajima

发明人： Tohru Ando ,  Masahiro Sasajima

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01L22/10 ,  G01R31/307 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2817

摘要： Disclosed is a device capable of probing with minimal effect from electron beams. Rough probing is made possible using a lower magnification than the magnification usually viewed. When target contact of semiconductor is detected, measurement position is set in the center of picture usually to move probe without moving stage. With the miniaturization, contact can be confirmed only at high magnification, although probe can be confirmed at low magnification on the contrary but it is necessary to display it in real time. Static image obtained at high magnification once is combined with image obtained at low magnification in real time from target contact required for probing and characteristic of probe to be displayed, so that probing at low magnification can be realized to reduce the effects of electron beams and obtain accurate electrical characteristics.

摘要翻译： 公开了一种能够以电子束影响最小的装置。 使用比通常观看的放大率更低的放大倍数可以进行粗略探测。 当检测到半导体的目标接触时，通常将测量位置设置在图像中心，无需移动平台移动探头。 随着小型化，只能在高放大倍率下确认接触，尽管可以在低放大倍率下确认探针，但需要实时显示。 以高放大倍数一次获得的静态图像与实验中从目标探针所需的接触和探针的特性实时地获得的图像组合，从而可以实现低倍率下的探测，以减少电子束的影响并获得 准确的电气特性。

公开(公告)号：US08067752B2

公开(公告)日：2011-11-29

申请号：US12764992

申请日：2010-04-22

申请人： Tohru Ando ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

发明人： Tohru Ando ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

IPC分类号： H01J49/00 ,  G06K9/00 ,  G06K9/62

CPC分类号： G01N23/225 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.

摘要翻译： 一种半导体测试方法，其能够快速计算其中用鼠标绘制看似水平或垂直线的半导体单元，并且执行与较近轴线对准的光栅旋转。 之后，水平移动台，对应该设置图像的位置上的图像执行图案匹配，并且调整角度。 舞台沿着X轴和Y轴均匀移动，实现了像直线一样的目的地移动。 与舞台的平滑移动同步，通过标尺将单元围成矩形框，并且以数值显示单元数。

公开(公告)号：US20100200749A1

公开(公告)日：2010-08-12

申请号：US12764992

申请日：2010-04-22

申请人： Tohru ANDO ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

发明人： Tohru ANDO ,  Yasuhiko Nara ,  Tsutomu Saito ,  Shinichi Kato ,  Takeshi Sunaoshi

IPC分类号： H01J37/26 ,  G01N23/22 ,  G06K9/00

CPC分类号： G01N23/225 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.

摘要翻译： 一种半导体测试方法，其能够快速计算其中用鼠标绘制看似水平或垂直线的半导体单元，并且执行与较近轴线对准的光栅旋转。 之后，水平移动台，对应该设置图像的位置上的图像执行图案匹配，并且调整角度。 舞台沿着X轴和Y轴均匀移动，实现了像直线一样的目的地移动。 与舞台的平滑移动同步，通过标尺将单元围成矩形框，并且以数值显示单元数。

公开(公告)号：US07700916B2

公开(公告)日：2010-04-20

申请号：US11583983

申请日：2006-10-20

申请人： Tohru Ando ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

发明人： Tohru Ando ,  Tsutomu Saito ,  Yasuhiko Nara ,  Mikio Takagi ,  Koichi Takauchi

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： G06T7/001 ,  G06T2200/24 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817 ,  Y10S715/964

摘要： A navigation system for easily determining defective positions is provided. In the case of CAD navigation to defective positions, logical information for indicating defective positions is created in a CAD format, instead of CAD data of physical information indicating circuit design. Specifically, by attaching marks such as rectangles, characters, or lines, to an electron microscope image with software, quick navigation is performed with required minimum information. By using created CAD data, re-navigation with the same equipment and CAD navigation to heterogeneous equipment are performed.

摘要翻译： 提供了用于容易地确定缺陷位置的导航系统。 在CAD导航到缺陷位置的情况下，代替用于指示电路设计的物理信息的CAD数据，以CAD格式创建用于指示缺陷位置的逻辑信息。 具体地，通过用软件将诸如矩形，字符或线的标记附加到电子显微镜图像上，使用所需的最小信息进行快速导航。 通过使用创建的CAD数据，执行使用相同设备和CAD导航到异构设备的重新导航。

公开(公告)号：US08442300B2

公开(公告)日：2013-05-14

申请号：US11703661

申请日：2007-02-08

申请人： Ruriko Tsuneta ,  Tohru Ando ,  Junzo Azuma

发明人： Ruriko Tsuneta ,  Tohru Ando ,  Junzo Azuma

IPC分类号： G06K9/00

CPC分类号： G06T7/0004

摘要： A specified position in an array structure in which a reference pattern is displayed repetitively through reference pattern counting is identified. In an array structure image, the pattern detection estimating area generated from a starting point, the address of the starting point, and a unit vector are compared with a pattern detected position found in pattern matching with the reference pattern image, to execute pattern counting while determining correct detection, oversights, wrong detection, etc. Array structure images are photographed sequentially while moving the visual field with the use of an image shifting deflector to continue the pattern counting started at the starting point to identify the ending point specified with an address. If the ending point is not reached only with use of the image shifting deflector, the visual field moving range of the image shifting deflector is moved with use of a specimen stage.

摘要翻译： 识别通过参考图案计数重复显示参考图案的阵列结构中的指定位置。 在阵列结构图像中，将从开始点产生的图案检测估计区域，起始地址和单位矢量与与参考图案图像的图案匹配中找到的图案检测位置进行比较，以执行图案计数 确定正确的检测，疏忽，错误检测等。使用图像偏移偏转器移动视野时顺序拍摄数组结构图像，以继续在起始点开始的图案计数，以识别用地址指定的结束点。 如果仅使用图像偏转偏转器才能达到结束点，则使用标本台移动图像偏移偏转器的视野移动范围。

公开(公告)号：US08178840B2

公开(公告)日：2012-05-15

申请号：US12691331

申请日：2010-01-21

申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/225 ,  H01J37/28

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，使多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US07989766B2

公开(公告)日：2011-08-02

申请号：US12416914

申请日：2009-04-01

申请人： Yasuhiko Nara ,  Tohru Ando ,  Masahiro Sasajima ,  Tsutomu Saito ,  Tomoharu Obuki ,  Isamu Sekihara

发明人： Yasuhiko Nara ,  Tohru Ando ,  Masahiro Sasajima ,  Tsutomu Saito ,  Tomoharu Obuki ,  Isamu Sekihara

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2803

摘要： A sample inspection apparatus in which a fault in a semiconductor sample can be measured and analyzed efficiently. A plurality of probes are brought into contact with the sample. The sample is irradiated with an electron beam while a current flowing through the probes is measured. Signals from at least two probes are supplied to an image processing unit so as to form an absorbed electron current image. A difference between images obtained in accordance with a temperature change of the sample is obtained. A faulty point is identified from the difference between the images.

摘要翻译： 可以有效地测量和分析半导体样品中的故障的样本检查装置。 使多个探针与样品接触。 用电子束照射样品，同时测量流过探针的电流。 来自至少两个探针的信号被提供给图像处理单元，以形成吸收的电子流图像。 获得根据样品的温度变化获得的图像之间的差异。 根据图像之间的差异来识别错误点。

公开(公告)号：US20090250610A1

公开(公告)日：2009-10-08

申请号：US12416914

申请日：2009-04-01

申请人： Yasuhiko NARA ,  Tohru ANDO ,  Masahiro SASAJIMA ,  Tsutomu SAITO ,  Tomoharu OBUKI ,  Isamu SEKIHARA

发明人： Yasuhiko NARA ,  Tohru ANDO ,  Masahiro SASAJIMA ,  Tsutomu SAITO ,  Tomoharu OBUKI ,  Isamu SEKIHARA

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2803

摘要： A sample inspection apparatus in which a fault in a semiconductor sample can be measured and analyzed efficiently. A plurality of probes are brought into contact with the sample. The sample is irradiated with an electron beam while a current flowing through the probes is measured. Signals from at least two probes are supplied to an image processing unit so as to form an absorbed electron current image. A difference between images obtained in accordance with a temperature change of the sample is obtained. A faulty point is identified from the difference between the images.

摘要翻译： 可以有效地测量和分析半导体样品中的故障的样本检查装置。 使多个探针与样品接触。 用电子束照射样品，同时测量流过探针的电流。 来自至少两个探针的信号被提供给图像处理单元，以形成吸收的电子流图像。 获得根据样品的温度变化获得的图像之间的差异。 根据图像之间的差异来识别错误点。

公开(公告)号：US20080203297A1

公开(公告)日：2008-08-28

申请号：US12038079

申请日：2008-02-27

申请人： Tomoharu OBUKI ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu OBUKI ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/00

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，使多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US5460977A

公开(公告)日：1995-10-24

申请号：US211295

申请日：1994-03-30

申请人： Tohru Ando ,  Shigeru Ikeda ,  Yasushi Okumura

发明人： Tohru Ando ,  Shigeru Ikeda ,  Yasushi Okumura

IPC分类号： C07K14/435 ,  A61K38/00 ,  C07K5/00 ,  C07K7/00 ,  C07K17/00

CPC分类号： C07K14/43531 ,  Y10S436/811

摘要： According to the present invention, a peptide which causes the blast formation of lymphocytes sensitized by mites is provided, and mite allergy is diagnosed by using the peptide. The present invention relates to a peptide, that is, pentadecapeptide and triacontapeptide, which causes the blast formation of lymphocytes sensitized by mites and to a diagnostic agent for mite allergy while uses the peptide.

摘要翻译： PCT No.PCT / JP93 / 01127 Sec。 371日期1994年3月30日 102（e）1994年3月30日PCT 1993年8月10日PCT公布。 第WO94 / 04572号公报 日期为1994年3月3日。根据本发明，提供了使由螨感染的淋巴细胞的胚胎形成的肽，并且通过使用肽来诊断螨过敏。 本发明涉及一种肽，即十五肽和三十肽，其在使用该肽时引起由螨感染的淋巴细胞的爆发形成和螨变态反应的诊断剂。