公开(公告)号：US07663104B2

公开(公告)日：2010-02-16

申请号：US12038079

申请日：2008-02-27

申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/00 ,  G21K7/00 ,  G01R31/302 ,  G01R31/305

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US20100116986A1

公开(公告)日：2010-05-13

申请号：US12691331

申请日：2010-01-21

申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/225

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，使多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US08178840B2

公开(公告)日：2012-05-15

申请号：US12691331

申请日：2010-01-21

申请人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

发明人： Tomoharu Obuki ,  Hiroshi Toyama ,  Yasuhiro Mitsui ,  Munetoshi Fukui ,  Yasuhiko Nara ,  Tohru Ando ,  Katsuo Ooki ,  Tsutomu Saito ,  Masaaki Komori

IPC分类号： G01N23/225 ,  H01J37/28

CPC分类号： G01N23/225 ,  H01J2237/2449 ,  H01J2237/24564 ,  H01J2237/2817

摘要： An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency.In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

摘要翻译： 本发明的目的是获得清晰的吸收电流图像，而不涉及放大器在输入之间的增益差异，从吸收的电流通过使用多个探针检测并提高测量效率。 在本发明中，使多个探针与试样接触。 在用电子束照射样品的同时，测量在探针中流动的电流。 至少两个探头的信号被输入到差分放大器。 差分放大器的输出被放大。 基于电子束的放大输出和扫描信息，产生吸收的当前图像。 根据本发明，可以获得清晰的吸收电流图像而不涉及放大器在输入之间的增益差。 因此，可以提高半导体器件的故障分析中的测量效率。

公开(公告)号：US07989766B2

公开(公告)日：2011-08-02

申请号：US12416914

申请日：2009-04-01

申请人： Yasuhiko Nara ,  Tohru Ando ,  Masahiro Sasajima ,  Tsutomu Saito ,  Tomoharu Obuki ,  Isamu Sekihara

发明人： Yasuhiko Nara ,  Tohru Ando ,  Masahiro Sasajima ,  Tsutomu Saito ,  Tomoharu Obuki ,  Isamu Sekihara

IPC分类号： H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/24495 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2803

摘要： A sample inspection apparatus in which a fault in a semiconductor sample can be measured and analyzed efficiently. A plurality of probes are brought into contact with the sample. The sample is irradiated with an electron beam while a current flowing through the probes is measured. Signals from at least two probes are supplied to an image processing unit so as to form an absorbed electron current image. A difference between images obtained in accordance with a temperature change of the sample is obtained. A faulty point is identified from the difference between the images.

摘要翻译： 可以有效地测量和分析半导体样品中的故障的样本检查装置。 使多个探针与样品接触。 用电子束照射样品，同时测量流过探针的电流。 来自至少两个探针的信号被提供给图像处理单元，以形成吸收的电子流图像。 获得根据样品的温度变化获得的图像之间的差异。 根据图像之间的差异来识别错误点。

公开(公告)号：US08816712B2

公开(公告)日：2014-08-26

申请号：US13058158

申请日：2009-07-29

申请人： Mitsuhiro Nakamura ,  Hiroshi Toyama ,  Yasuhiko Nara ,  Katsuo Oki ,  Tomoharu Obuki ,  Masahiro Sasajima

发明人： Mitsuhiro Nakamura ,  Hiroshi Toyama ,  Yasuhiko Nara ,  Katsuo Oki ,  Tomoharu Obuki ,  Masahiro Sasajima

IPC分类号： G01R31/00 ,  H01J37/20 ,  G01R31/307 ,  H01J37/28 ,  G01R31/28

CPC分类号： G01R31/307 ,  G01R31/2853 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2008 ,  H01J2237/24564

摘要： An object of the invention is to provide an inspection device which has a function of preventing electric discharge so that an absorbed current is detected more efficiently.In the invention, absorbed current detectors are mounted in a vacuum specimen chamber and capacitance of a signal wire from each probe to corresponding one of the absorbed current detectors is reduced to the order of pF so that even an absorbed current signal with a high frequency of tens of kHz or higher can be detected. Moreover, signal selectors are operated by a signal selection controller so that signal lines of a semiconductor parameters analyzer are electrically connected to the probes brought into contact with a sample. Accordingly, electrical characteristics of the sample can be measured without limitation of signal paths connected to the probes to transmission of an absorbed current. In addition, a resistance for slow leakage of electric charge is provided in each probe stage or a sample stage.

摘要翻译： 本发明的目的是提供一种检测装置，其具有防止放电的功能，从而更有效地检测吸收的电流。 在本发明中，将吸收电流检测器安装在真空试样室中，并将来自每个探针的信号线的电容与吸收的电流检测器中的相应一个电容器的电容降低到pF的顺序，使得甚至具有高频率的吸收电流信号 可以检测几十kHz或更高。 此外，信号选择器由信号选择控制器操作，使得半导体参数分析仪的信号线电连接到与样品接触的探针。 因此，可以测量样品的电特性，而不限制连接到探针的信号路径以传输吸收的电流。 此外，在每个探针级或样品台中提供电荷缓慢泄漏的电阻。

公开(公告)号：US20130119999A1

公开(公告)日：2013-05-16

申请号：US13806561

申请日：2011-07-20

申请人： Tomoharu Obuki ,  Mitsuhiro Nakamura ,  Yasuhiko Nara ,  Tohru Ando

发明人： Tomoharu Obuki ,  Mitsuhiro Nakamura ,  Yasuhiko Nara ,  Tohru Ando

IPC分类号： G01R31/265

CPC分类号： G01R31/2653 ,  G01R31/2853 ,  G01R31/307 ,  H01L22/12 ,  H01L22/14 ,  H01L2924/0002 ,  H01L2924/00

摘要： Proposed is a technique of emphasizing a change in absorbed current obtained from a faulty part in a wiring section as a testing target more than in other parts of the wiring section. A specimen testing device is configured to output an image of absorbed current output from two probes during scanning of an electron beam so as to be operatively associated with the scanning of the electron beam and includes the following mechanism. When a faulty part of a wiring section on the specimen side with which two probes are in contact is irradiated with an electron beam, the resistance value at the faulty part changes more than that of irradiation of a normal wiring section with the electron beam. Such a change in resistance value is detected as a change in ratio between a resistance value of the wiring section specified by the two probes and a known resistance value. With this method, an absorbed current image corresponding to the faulty part can be made easily distinguishable from an absorbed current image of other parts of the wiring section.

摘要翻译： 提出的是一种技术，其强调从布线部分中的故障部分获得的吸收电流的变化作为测试目标，而不是布线部分的其它部分。 样本测试装置被配置为在扫描电子束期间输出从两个探针输出的吸收电流的图像，以便与电子束的扫描可操作地相关联，并且包括以下机制。 当两个探针接触的试样侧的布线部分的故障部分被电子束照射时，故障部分的电阻值比通过电子束照射的正常布线部分的电阻值发生变化。 这种电阻值的变化被检测为由两个探针指定的布线部分的电阻值与已知的电阻值之间的比率变化。 利用该方法，可以使与故障部分对应的吸收的当前图像容易地与布线部分的其它部分的吸收的当前图像区分开。

公开(公告)号：US20110140729A1

公开(公告)日：2011-06-16

申请号：US13058158

申请日：2009-07-29

申请人： Mitsuhiro Nakamura ,  Hiroshi Toyama ,  Yasuhiko Nara ,  Katsuo Oki ,  Tomoharu Obuki ,  Masahiro Sasajima

发明人： Mitsuhiro Nakamura ,  Hiroshi Toyama ,  Yasuhiko Nara ,  Katsuo Oki ,  Tomoharu Obuki ,  Masahiro Sasajima

IPC分类号： G01R31/26 ,  G21K5/08

CPC分类号： G01R31/307 ,  G01R31/2853 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2008 ,  H01J2237/24564

摘要： An object of the invention is to provide an inspection device which has a function of preventing electric discharge so that an absorbed current is detected more efficiently.In the invention, absorbed current detectors are mounted in a vacuum specimen chamber and capacitance of a signal wire from each probe to corresponding one of the absorbed current detectors is reduced to the order of pF so that even an absorbed current signal with a high frequency of tens of kHz or higher can be detected. Moreover, signal selectors are operated by a signal selection controller so that signal lines of a semiconductor parameters analyzer are electrically connected to the probes brought into contact with a sample. Accordingly, electrical characteristics of the sample can be measured without limitation of signal paths connected to the probes to transmission of an absorbed current. In addition, a resistance for slow leakage of electric charge is provided in each probe stage or a sample stage.

摘要翻译： 本发明的目的是提供一种检测装置，其具有防止放电的功能，从而更有效地检测吸收的电流。 在本发明中，将吸收电流检测器安装在真空试样室中，并将来自每个探针的信号线的电容与吸收的电流检测器中的相应一个电容器的电容降低到pF的顺序，使得甚至具有高频率的吸收电流信号 可以检测几十kHz或更高。 此外，信号选择器由信号选择控制器操作，使得半导体参数分析仪的信号线电连接到与样品接触的探针。 因此，可以测量样品的电特性，而不限制连接到探针的信号路径以传输吸收的电流。 此外，在每个探针级或样品台中提供电荷缓慢泄漏的电阻。