公开(公告)号：US5150035A

公开(公告)日：1992-09-22

申请号：US515872

申请日：1990-04-27

申请人： Hiroyasu Nose ,  Toshimitsu Kawase ,  Tohsihiko Miyazaki ,  Takahiro Oguchi ,  Akihiko Yamano

发明人： Hiroyasu Nose ,  Toshimitsu Kawase ,  Tohsihiko Miyazaki ,  Takahiro Oguchi ,  Akihiko Yamano

IPC分类号： G01D5/245 ,  G01B7/00 ,  G01B7/28 ,  G01D5/14 ,  G01N27/00 ,  G01Q10/00

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01B7/28 ,  G01Q60/16 ,  Y10S977/851 ,  Y10S977/872

摘要： An encoder has a reference scale having periodic structure of atoms or molecules in a predetermined direction, a probe disposed in opposed relationship with the reference scale, the probe being used to detect the structural variation information of the periodic structure of the reference scale, and relative displacement amount detecting means for detecting the amount of relative displacement of the reference scale and the probe along a predetermined direction from the structural variation information obtained by the probe.