Relative position change amount detecting apparatus having
bi-directional probe with compensated movement
    2.
    发明授权
    Relative position change amount detecting apparatus having bi-directional probe with compensated movement 失效
    具有补偿运动的双向探针的相对位置变化量检测装置

    公开(公告)号:US5432346A

    公开(公告)日:1995-07-11

    申请号:US996889

    申请日:1992-12-24

    摘要: Information detecting apparatus comprises a probe arranged to face an information medium so as to relatively move to the information medium with thereby detect information thereon, a first vibrating device for vibrating the probe relative to the information medium in a first direction parallel with the information medium, and a first movement detecting device for detecting a state of relative displacement of the probe for the information medium in the first direction on the basis of information obtained by the probe which is caused to vibrate by the first vibrating device. A second vibrating device vibrates the probe relative to the information medium in a second direction which is parallel with the surface of the information medium and crosses the first direction, and a second movement detecting device detects a state of relative displacement of the probe with the information medium in the second direction on the basis of information obtain by the probe which is caused to vibrate by the second vibrating device.

    摘要翻译: 信息检测装置包括被配置为面向信息介质以便相对移动到信息介质从而检测信息的探针,用于在与信息介质平行的第一方向上相对于信息介质振动探针的第一振动装置, 以及第一运动检测装置,用于根据由第一振动装置振动的探头获得的信息,检测信息介质的探针在第一方向上的相对位移的状态。 第二振动装置在与信息介质的表面平行且与第一方向平行的第二方向上相对于信息介质振动探针,并且第二移动检测装置检测探头与信息的相对位移状态 基于通过由第二振动装置振动的探头获得的信息,在第二方向上介质。

    Edge detector
    4.
    发明授权
    Edge detector 失效
    边缘检测器

    公开(公告)号:US5304924A

    公开(公告)日:1994-04-19

    申请号:US979472

    申请日:1992-11-20

    摘要: An edge detector is disclosed, which detector is improved by providing a probe moving relatively with a tested pattern, a device for detecting a working force or a tunnel current generated between the probe and the tested pattern, and a device for detecting an edge of the tested pattern according to the detected working force or tunnel current. An edge of the tested pattern is detected at high resolution by detecting the tunnel current flowing between a conductive tested pattern and a probe kept closely opposite thereto, or by detecting an atomic force or a magnetic force working between an insulated or a magnetic tested pattern and a lever.

    摘要翻译: 公开了一种边缘检测器,该检测器通过提供相对于测试图案移动的探针来改进,用于检测在探针和测试图案之间产生的工作力或隧道电流的装置,以及用于检测 根据检测到的工作力或隧道电流测试图案。 通过检测在导电测试图案与保持紧密相对的探针之间流动的隧道电流,或通过检测在绝缘或磁性测试图案之间工作的原子力或磁力,以及 一个杠杆。

    Maintaining interatomic distance between an STM probe and a recording
layer
    9.
    发明授权
    Maintaining interatomic distance between an STM probe and a recording layer 失效
    保持STM探头和记录层之间的原子间距离

    公开(公告)号:US5812516A

    公开(公告)日:1998-09-22

    申请号:US475465

    申请日:1995-06-07

    摘要: An information recording system includes a recording medium, and a probe electrode provided at a location opposed to the recording surface of the recording medium. The probe electrode is capable of recording on the recording medium by application of a voltage between the probe electrode and the recording medium. An elastic member supports the probe electrode for motion relative to a base member arranged perpendicular to the recording surface. The distance between the recording surface and the probe electrode is adjustable by a mechanism provided for that purpose. The displacement of the probe electrode caused by an interatomic force acting between the recording medium and the probe electrode is detected, and a displacement signal based on the detected displacement is output. A control circuit feeds back the displacement signal so that the probe electrode can move back to its original position.

    摘要翻译: 信息记录系统包括记录介质和设置在与记录介质的记录表面相对的位置处的探针电极。 探针电极能够通过在探针电极和记录介质之间施加电压而在记录介质上进行记录。 弹性构件支撑探针电极,用于相对于垂直于记录表面布置的基底构件的运动。 记录表面和探针电极之间的距离可通过为此目的提供的机构来调节。 检测由作用在记录介质和探针电极之间的原子间力引起的探针电极的位移,并且输出基于检测到的位移的位移信号。 控制电路反馈位移信号,使得探针电极可以移回到其原始位置。