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公开(公告)号：US08406501B2
公开(公告)日：2013-03-26
申请号：US12457842
申请日：2009-06-23
CPC分类号： G06T7/0004 , F28D1/05366 , F28F2200/00 , G01N21/8851 , G06T2207/30136
摘要： A method and system for appearance inspection of a core of a heat exchanger provided with fins and tubes, performing averaging and dynamic binarization on the imaging data to extract an image of only a tube, then calculating, with respect to the extracted tube image, a center axis across a long direction of the tube comprised of the center coordinates of the tube width direction, comparing the discovered center axis with a reference value to find the maximum displacement across the long direction of the tube, and judging the tube is a defect when the maximum displacement is greater than a predetermined threshold.
摘要翻译： 对具有翅片和管的热交换器的芯的外观检查的方法和系统，对成像数据进行平均化和动态二值化以提取仅管的图像，然后相对于提取的管图像计算 中心轴跨越管宽度方向的中心坐标组成的管的长方向，将发现的中心轴与参考值进行比较，以找出跨管的长方向的最大位移，并且判断管是缺陷， 最大位移大于预定阈值。
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2.发明申请METHOD FOR MANUFACTURING REFLECTIVE MASK AND APPARATUS FOR MANUFACTURING REFLECTIVE MASK 有权用于制造反射掩模的方法和制造反射掩模的装置公开(公告)号：US20120129083A1
公开(公告)日：2012-05-24
申请号：US13300722
申请日：2011-11-21
摘要： According to one embodiment, a method is disclosed for manufacturing a reflective mask. The method can include forming a reflection layer on a major surface of a substrate. The method can include forming an absorption layer on the reflection layer. The method can include forming a pattern region in the absorption layer. In addition, the method can include forming a light blocking region surrounding the pattern region in the absorption layer and the reflection layer. The forming the light blocking region includes etching-processing the reflection layer using a gas containing chlorine and oxygen.
摘要翻译： 根据一个实施例，公开了一种用于制造反射掩模的方法。 该方法可以包括在基底的主表面上形成反射层。 该方法可以包括在反射层上形成吸收层。 该方法可以包括在吸收层中形成图案区域。 此外，该方法可以包括在吸收层和反射层中形成围绕图案区域的遮光区域。 形成遮光区域包括使用含有氯和氧的气体对反射层进行蚀刻处理。
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公开(公告)号：US20100027872A1
公开(公告)日：2010-02-04
申请号：US12457842
申请日：2009-06-23
IPC分类号： G06K9/00
CPC分类号： G06T7/0004 , F28D1/05366 , F28F2200/00 , G01N21/8851 , G06T2207/30136
摘要： A method and system for appearance inspection of a core of a heat exchanger provided with fins and tubes, performing averaging and dynamic binarization on the imaging data to extract an image of only a tube, then calculating, with respect to the extracted tube image, a center axis across a long direction of the tube comprised of the center coordinates of the tube width direction, comparing the discovered center axis with a reference value to find the maximum displacement across the long direction of the tube, and judging the tube is a defect when the maximum displacement is greater than a predetermined threshold.
摘要翻译： 对具有翅片和管的热交换器的芯的外观检查的方法和系统，对成像数据进行平均化和动态二值化以提取仅管的图像，然后相对于提取的管图像计算 中心轴跨越管宽度方向的中心坐标组成的管的长方向，将发现的中心轴与参考值进行比较，以找出跨管的长方向的最大位移，并且判断管是缺陷， 最大位移大于预定阈值。
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4.发明授权Method for manufacturing reflective mask and apparatus for manufacturing reflective mask 有权制造反光罩的方法和用于制造反光罩的装置公开(公告)号：US08702901B2
公开(公告)日：2014-04-22
申请号：US13300722
申请日：2011-11-21
摘要： According to one embodiment, a method is disclosed for manufacturing a reflective mask. The method can include forming a reflection layer on a major surface of a substrate. The method can include forming an absorption layer on the reflection layer. The method can include forming a pattern region in the absorption layer. In addition, the method can include forming a light blocking region surrounding the pattern region in the absorption layer and the reflection layer. The forming the light blocking region includes etching-processing the reflection layer using a gas containing chlorine and oxygen.
摘要翻译： 根据一个实施例，公开了一种用于制造反射掩模的方法。 该方法可以包括在基底的主表面上形成反射层。 该方法可以包括在反射层上形成吸收层。 该方法可以包括在吸收层中形成图案区域。 此外，该方法可以包括在吸收层和反射层中形成围绕图案区域的遮光区域。 形成遮光区域包括使用含有氯和氧的气体对反射层进行蚀刻处理。
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公开(公告)号：US20100027871A1
公开(公告)日：2010-02-04
申请号：US12457832
申请日：2009-06-23
CPC分类号： G06T7/0006 , G06T2207/10004 , G06T2207/20021 , G06T2207/30164
摘要： An appearance inspection method and system of a core of a heat exchanger provided with fins and tubes including identifying a region in which an image of a single tube is captured, performing averaging and dynamic binarization of the image data in this region to extract only the image of the tube, dividing this region into a plurality of blocks, finding the smallest rectangle surrounding a tube at each divided block to find a width dimension of the tube, comparing the tube width dimension at each block found with a predetermined threshold value, and judging a part as good when all of the tube width dimensions at the blocks are the predetermined threshold value or less.
摘要翻译： 具有翅片和管的芯片的外观检查方法和系统，包括识别捕获单个管的图像的区域，执行在该区域中的图像数据的平均化和动态二值化以仅提取图像 将该区域划分成多个块，在每个分割块处找到围绕管的最小矩形，以找到管的宽度尺寸，将每个块处的管宽度尺寸与预定阈值进行比较，并且判断 当块的所有管宽度尺寸都是预定阈值或更小时，该部分一样好。
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公开(公告)号：US5846886A
公开(公告)日：1998-12-08
申请号：US808854
申请日：1997-02-28
申请人： Kei Hattori , Akira Kobayashi , Mikio Nonaka , Makoto Muto , Masaru Kasai , Toshiyasu Onoda , Tomoaki Yoshimori
发明人： Kei Hattori , Akira Kobayashi , Mikio Nonaka , Makoto Muto , Masaru Kasai , Toshiyasu Onoda , Tomoaki Yoshimori
IPC分类号： H01L21/28 , C23F4/00 , H01L21/302 , H01L21/3065 , H01L21/3213 , H01L21/768
CPC分类号： H01L21/76838 , C23F4/00 , H01L21/32135
摘要： A metal film etching method etches selectively a metal film formed on a layer insulating film provided with viaholes so as to cover the surface of the layer insulating film and fill up the viaholes so that the metal film excluding portions there of filling up the viaholes are removed completely without forming a pit in the portions of the metal film filling up the viaholes. The metal film etching method uses a mixed reactive gas of a gas containing fluorine atoms, a gas containing chlorine atoms and oxygen gas.
摘要翻译： 金属膜蚀刻方法选择性地蚀刻形成在具有通孔的层绝缘膜上的金属膜，以覆盖层绝缘膜的表面并填充通孔，从而除去填充通孔的部分之外的金属膜被去除 完全没有在填充通孔的金属膜的部分中形成凹坑。 金属膜蚀刻方法使用含有氟原子的气体，含有氯原子的气体和氧气的混合反应气体。
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公开(公告)号：US08141619B2
公开(公告)日：2012-03-27
申请号：US12461249
申请日：2009-08-05
IPC分类号： B60H1/00
CPC分类号： F28D1/05366 , G01N21/8851 , G01N21/956 , G06T7/0006 , G06T2207/30136
摘要： A fin inspection method comprising a step of having an imaging device capture an image of the core and inputting into an image processing device the image data for storage, a step of setting a first region in the image data in which an image of the entire core is captured and setting a second region in which an image of at least a portion of all of the tubes is captured so as to identify position information of the tubes, a step of setting a third region for fin detection between adjacent tubes based on the identified position information of the tubes, a step of performing binarization and noise removal in the third region to obtain an image of the fins and identifying from the image of the fins the edge position information of the fins along a long direction of the tubes, and a step of performing statistical processing of the pitch intervals based on the edge position information of the fins and judging fin defects.
摘要翻译： 一种翅片检查方法，包括以下步骤：使成像装置捕获核心的图像并将图像数据输入到图像处理装置中以存储;步骤，在图像数据中设置整个核心的图像的第一区域 被捕获并且设置第二区域，其中捕获所有管的至少一部分的图像，以便识别管的位置信息;基于所识别的在相邻管之间设置用于翅片检测的第三区域的步骤 管的位置信息，在第三区域中执行二值化和噪声去除的步骤，以获得翅片的图像，并且从翅片的图像沿着管的长度方向识别翅片的边缘位置信息，以及 基于鳍片的边缘位置信息进行间距间隔的统计处理并判断鳍片缺陷的步骤。
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公开(公告)号：US20100044004A1
公开(公告)日：2010-02-25
申请号：US12461249
申请日：2009-08-05
IPC分类号： F28F27/00
CPC分类号： F28D1/05366 , G01N21/8851 , G01N21/956 , G06T7/0006 , G06T2207/30136
摘要： A fin inspection method comprising a step of having an imaging device capture an image of the core and inputting into an image processing device the image data for storage, a step of setting a first region in the image data in which an image of the entire core is captured and setting a second region in which an image of at least a portion of all of the tubes is captured so as to identify position information of the tubes, a step of setting a third region for fin detection between adjacent tubes based on the identified position information of the tubes, a step of performing binarization and noise removal in the third region to obtain an image of the fins and identifying from the image of the fins the edge position information of the fins along a long direction of the tubes, and a step of performing statistical processing of the pitch intervals based on the edge position information of the fins and judging fin defects.
摘要翻译： 一种翅片检查方法，包括以下步骤：使成像装置捕获核心的图像并将图像数据输入到图像处理装置中以存储;步骤，在图像数据中设置整个核心的图像的第一区域 被捕获并且设置第二区域，其中捕获所有管的至少一部分的图像，以便识别管的位置信息;基于所识别的在相邻管之间设置用于翅片检测的第三区域的步骤 管的位置信息，在第三区域中执行二值化和噪声去除的步骤，以获得翅片的图像，并且从翅片的图像沿着管的长度方向识别翅片的边缘位置信息，以及 基于鳍片的边缘位置信息进行间距间隔的统计处理并判断鳍片缺陷的步骤。
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