公开(公告)号：US08010851B2

公开(公告)日：2011-08-30

申请号：US12058757

申请日：2008-03-31

申请人： Sami Akhtar ,  Kiyoshi Murata ,  Tomoyuki Sugaya

发明人： Sami Akhtar ,  Kiyoshi Murata ,  Tomoyuki Sugaya

IPC分类号： G11C29/00

CPC分类号： G01R31/31919

摘要： A testing module including a designation information storing section that stores designation information designating an order of decoding fundamental patterns, a fundamental pattern storing section that stores the fundamental patterns, a plurality of pattern generating sections that each generate a test pattern to be supplied to a device under test, a plurality of position information storing sections that each store, in association with a corresponding pattern generating section, position information designating a read position from which the designation information is read from the designation information storing section, and an information transmission path shared by the pattern generating sections that transmits a part of the designation information from the designation information storing section to the designation information temporary storing section in each pattern generating section. Each pattern generating section decodes the fundamental patterns in an order designated by the partial designation information stored on the designation information temporary storing section.

摘要翻译： 一种测试模块，包括指定信息存储部分，其存储指定解码基本模式的顺序的指定信息，存储基本模式的基本模式存储部分，多个模式生成部分，每个模式生成部分生成要提供给设备的测试模式 多个位置信息存储部分，其与对应的图案生成部分相关联地存储指定从指定信息存储部分读取指定信息的读取位置的位置信息和由指定信息存储部分共享的信息传播路径 图案生成部，其将指定信息的一部分从指定信息存储部发送到各图案生成部中的指定信息临时存储部。 每个图案生成部分以存储在指定信息临时存储部分上的部分指定信息指定的顺序对基本图案进行解码。

公开(公告)号：US07725793B2

公开(公告)日：2010-05-25

申请号：US11689506

申请日：2007-03-21

申请人： Tatsuya Yamada ,  Tomoyuki Sugaya

发明人： Tatsuya Yamada ,  Tomoyuki Sugaya

IPC分类号： G01R31/28 ,  G06F11/00

CPC分类号： G01R31/31919 ,  G01R31/31813

摘要： There is provided a test apparatus for testing a device under test. The test apparatus includes a main instruction storing section that stores thereon a main test instruction sequence, a sub instruction storing section that stores thereon a sub test instruction sequence which is executed when a subroutine call instruction included in the main test instruction sequence is executed, a pattern generating section that (i) sequentially reads and executes an instruction from the main test instruction sequence and outputs (I) a test pattern associated with the executed instruction and (II) timing set information designating a combination of timings for output of the test pattern, (ii) under a condition of executing the subroutine call instruction, sequentially reads and executes an instruction from the sub test instruction sequence designated by the executed subroutine call instruction and outputs (1) a test pattern associated with the executed instruction and (2) timing set information for a test pattern associated with the subroutine call instruction or an instruction which precedes the subroutine call instruction in the main test instruction sequence, and a test signal output section that generates a test signal in accordance with the test pattern, and supplies the test signal to the device under test at a timing designated by the timing set information.

摘要翻译： 提供了一种用于测试被测设备的测试装置。 测试装置包括：主指令存储部分，其上存储有主测试指令序列;子指令存储部分，其存储当执行包括在主测试指令序列中的子程序调用指令时执行的子测试指令序列; （i）顺序读取并执行来自主测试指令序列的指令，并且输出（I）与所执行的指令相关联的测试模式;以及（II）指定用于输出测试模式的定时的组合的定时设置信息 ，（ii）在执行子程序调用指令的条件下，顺序地从由执行的子程序调用指令指定的子测试指令序列读取并执行指令，并输出（1）与执行的指令相关联的测试模式，（2） 与子程序调用指令相关联的测试模式的定时设置信息或 在主测试指令序列中的子程序调用指令之前的指令以及根据测试模式产生测试信号的测试信号输出部分，并且在由定时设定的定时将测试信号提供给被测器件 信息。

公开(公告)号：US20090248347A1

公开(公告)日：2009-10-01

申请号：US12058754

申请日：2008-03-30

申请人： SAMI AKHTAR ,  Kiyoshi Murata ,  Tomoyuki Sugaya

发明人： SAMI AKHTAR ,  Kiyoshi Murata ,  Tomoyuki Sugaya

IPC分类号： G01R31/00

CPC分类号： G01R31/31919

摘要： To increase the overall efficiency of a test apparatus, provided is a test module that includes an instruction information storage section that stores instruction information indicating an order in which basic patterns are expanded; a basic pattern data storage section that stores basic pattern data; a plurality of pattern generating sections that each include a temporary instruction information storage section, which temporarily stores a portion of the instruction information, and that each generate a test pattern supplied to a device under test by expanding the basic pattern data in the order indicated by the instruction information stored in the corresponding temporary instruction information storage section; and a plurality of position information storage sections that independently store position information indicating reading positions of the instruction information stored in the instruction information storage section that is common to the plurality of pattern generating sections, in association with each pattern generating section.

摘要翻译： 为了提高测试装置的总体效率，提供了一种测试模块，其包括指示信息存储部分，其存储指示基本模式被扩展的顺序的指令信息; 基本图案数据存储部，其存储基本图案数据; 多个图案生成部，其各自包括临时存储指示信息的一部分的临时指令信息存储部，并且通过以下述顺序扩展基本图案数据，生成提供给被测设备的测试图案： 存储在相应的临时指令信息存储部分中的指令信息; 以及多个位置信息存储部分，其独立地存储指示存储在指示信息存储部分中的与多个图案生成部分共同的指令信息的读取位置的位置信息，与每个图案生成部分相关联。

公开(公告)号：US20080235550A1

公开(公告)日：2008-09-25

申请号：US11689506

申请日：2007-03-21

申请人： TATSUYA YAMADA ,  Tomoyuki Sugaya

发明人： TATSUYA YAMADA ,  Tomoyuki Sugaya

IPC分类号： G01R31/317

CPC分类号： G01R31/31919 ,  G01R31/31813

摘要： There is provided a test apparatus for testing a device under test. The test apparatus includes a main instruction storing section that stores thereon a main test instruction sequence, a sub instruction storing section that stores thereon a sub test instruction sequence which is executed when a subroutine call instruction included in the main test instruction sequence is executed, a pattern generating section that (i) sequentially reads and executes an instruction from the main test instruction sequence and outputs (I) a test pattern associated with the executed instruction and (II) timing set information designating a combination of timings for output of the test pattern, (ii) under a condition of executing the subroutine call instruction, sequentially reads and executes an instruction from the sub test instruction sequence designated by the executed subroutine call instruction and outputs (1) a test pattern associated with the executed instruction and (2) timing set information for a test pattern associated with the subroutine call instruction or an instruction which precedes the subroutine call instruction in the main test instruction sequence, and a test signal output section that generates a test signal in accordance with the test pattern, and supplies the test signal to the device under test at a timing designated by the timing set information.

摘要翻译： 提供了一种用于测试被测设备的测试装置。 测试装置包括：主指令存储部分，其上存储有主测试指令序列;子指令存储部分，其存储当执行包括在主测试指令序列中的子程序调用指令时执行的子测试指令序列; （i）顺序读取并执行来自主测试指令序列的指令，并且输出（I）与所执行的指令相关联的测试模式;以及（II）指定用于输出测试模式的定时的组合的定时设置信息 ，（ii）在执行子程序调用指令的条件下，顺序地从由执行的子程序调用指令指定的子测试指令序列读取并执行指令，并输出（1）与执行的指令相关联的测试模式，（2） 与子程序调用指令相关联的测试模式的定时设置信息或 在主测试指令序列中的子程序调用指令之前的指令以及根据测试模式产生测试信号的测试信号输出部分，并且在由定时设定的定时将测试信号提供给被测器件 信息。

公开(公告)号：US07235995B2

公开(公告)日：2007-06-26

申请号：US11180896

申请日：2005-07-13

申请人： Tomoyuki Sugaya ,  Hiroyasu Nakayama

发明人： Tomoyuki Sugaya ,  Hiroyasu Nakayama

IPC分类号： G01R31/26

CPC分类号： G01R31/31928 ,  G01R31/31919

摘要： A test apparatus that tests a device under test, including a main memory having an expectation pattern storing region storing an expectation pattern sequence to be sequentially compared with output patterns sequentially output from a terminal of the device; a test pattern outputting unit for sequentially inputting a plurality of test patterns into the device; a capture unit for sequentially acquiring the output patterns into an output pattern storing region on the main memory; a memory reading unit for reading an output pattern sequence consisting of the plurality of acquired output patterns and the expectation pattern sequence from the main memory when the acquisition process acquiring the output patterns into the output pattern storing region has been terminated; and an expectation comparing unit for comparing the read expectation pattern sequence and the output pattern sequence.

摘要翻译： 一种测试被测设备的测试设备，包括具有期望模式存储区域的主存储器，该期望模式存储区域存储期望模式序列以与从设备的终端依次输出的输出模式顺序地比较; 测试图案输出单元，用于将多个测试图案顺序地输入到所述设备中; 捕获单元，用于顺序地将输出图案获取到主存储器上的输出图案存储区域中; 存储器读取单元，用于当获取输出图案到输出图案存储区域的获取处理已经被终止时，读取由多个获取的输出模式组成的输出模式序列和来自主存储器的期望模式序列; 以及用于比较读取期望模式序列和输出模式序列的期望比较单元。

公开(公告)号：US20060052964A1

公开(公告)日：2006-03-09

申请号：US11180896

申请日：2005-07-13

申请人： Tomoyuki Sugaya ,  Hiroyasu Nakayama

发明人： Tomoyuki Sugaya ,  Hiroyasu Nakayama

IPC分类号： G01R27/28 ,  G01R31/00

CPC分类号： G01R31/31928 ,  G01R31/31919

摘要： A test apparatus that tests a device under test, includes: a main memory having an expectation pattern storing region storing an expectation pattern sequence to be sequentially compared with a plurality of output patterns sequentially output from a terminal of the device under test; a test pattern outputting unit operable to sequentially input a plurality of test patterns into the device under test and sequentially output the output patterns from the device under test; a capture unit operable to sequentially acquire the output patterns into an output pattern storing region on the main memory; a memory reading unit operable to read an output pattern sequence consisting of the plurality of acquired output patterns and the expectation pattern sequence from the main memory when the acquisition process acquiring the output patterns into the output pattern storing region has been terminated; and an expectation comparing unit operable to compare the read expectation pattern sequence and the output pattern sequence.

摘要翻译： 一种测试被测设备的测试装置，包括：主存储器，其具有期望模式存储区域，其存储期望模式序列，以与从被测设备的终端顺序输出的多个输出模式顺序比较; 测试图案输出单元，其可操作以将多个测试图案顺序地输入到被测设备中，并从被测设备顺序地输出输出图案; 捕获单元，其可操作以将所述输出图案顺序地获取到所述主存储器上的输出图案存储区域中; 存储器读取单元，用于当获取所述输出图案到所述输出图案存储区域的所述获取处理已被终止时，从所述主存储器中读取由所述多个获取的输出图案组成的输出图案序列和期望图案序列; 以及期望比较单元，用于比较读取期望模式序列和输出模式序列。

公开(公告)号：US08117004B2

公开(公告)日：2012-02-14

申请号：US12058754

申请日：2008-03-30

申请人： Sami Akhtar ,  Kiyoshi Murata ,  Tomoyuki Sugaya

发明人： Sami Akhtar ,  Kiyoshi Murata ,  Tomoyuki Sugaya

IPC分类号： G01R27/28 ,  G11C29/00

CPC分类号： G01R31/31919

摘要： To increase the overall efficiency of a test apparatus, provided is a test module that includes an instruction information storage section that stores instruction information indicating an order in which basic patterns are expanded; a basic pattern data storage section that stores basic pattern data; a plurality of pattern generating sections that each include a temporary instruction information storage section, which temporarily stores a portion of the instruction information, and that each generate a test pattern supplied to a device under test by expanding the basic pattern data in the order indicated by the instruction information stored in the corresponding temporary instruction information storage section; and a plurality of position information storage sections that independently store position information indicating reading positions of the instruction information stored in the instruction information storage section that is common to the plurality of pattern generating sections, in association with each pattern generating section.

摘要翻译： 为了提高测试装置的总体效率，提供了一种测试模块，其包括指示信息存储部分，其存储指示基本模式被扩展的顺序的指令信息; 基本图案数据存储部，其存储基本图案数据; 多个图案生成部，其各自包括临时存储指示信息的一部分的临时指令信息存储部，并且通过以下述顺序扩展基本图案数据，生成提供给被测设备的测试图案： 存储在相应的临时指令信息存储部分中的指令信息; 以及多个位置信息存储部分，其独立地存储指示存储在指令信息存储部分中的与多个图案生成部件相同的指令信息的读取位置的位置信息，与每个图案生成部分相关联。

公开(公告)号：US20090249135A1

公开(公告)日：2009-10-01

申请号：US12058756

申请日：2008-03-30

申请人： KIYOSHI MURATA ,  Tomoyuki Sugaya ,  Sami Akhtar

发明人： KIYOSHI MURATA ,  Tomoyuki Sugaya ,  Sami Akhtar

IPC分类号： G01R31/28

CPC分类号： G01R31/31907 ,  G01R31/31917

摘要： Provided is test apparatus with higher testing efficiency, including: plurality of pattern generating sections generating test pattern to supply to devices under test; group control section controlling group of pattern generating sections out of the pattern generating sections, and generating control signal upon receiving signal output from any pattern generating section controlled; range information storage section storing range information indicating range of pattern generating sections, out of the pattern generating sections, that serve to test one independent device under test; and comprehensive control section receiving the control signal from the group control section, identifying any pattern generating section that supplies the test pattern to the same device under test as that to which the pattern generating section having output the signal supplies the test pattern based on the range information, and in response to the control signal, controlling any other group control section that controls the identified pattern generating section.

摘要翻译： 提供了具有较高测试效率的测试装置，包括：多个模式产生部分产生测试模式以供给被测设备; 组控制部分，从图案生成部分中控制图案生成部分组，并且在从控制的任何图案生成部分输出的信号中产生控制信号; 范围信息存储部分，存储指示用于测试一个独立的被测设备的图案生成部分中的图案生成部分的范围的范围信息; 以及综合控制部分，从组控制部分接收控制信号，识别任何模式产生部分，该测试模式产生部分将测试模式提供给与被输出该信号的模式产生部分相同的被测试设备基于该范围提供测试模式 信息，并且响应于控制信号，控制控制识别的图案生成部分的任何其他组控制部分。

公开(公告)号：US20070207601A1

公开(公告)日：2007-09-06

申请号：US11629710

申请日：2005-06-16

申请人： Tadahiro Ohmi ,  Kiwamu Takehisa ,  Shirou Moriyama ,  Shunichi Sasaki ,  Masataka Hirose ,  Ishii Mamoru ,  Tomoyuki Sugaya ,  Masako Kataoka ,  Motohiro Umezu

发明人： Tadahiro Ohmi ,  Kiwamu Takehisa ,  Shirou Moriyama ,  Shunichi Sasaki ,  Masataka Hirose ,  Ishii Mamoru ,  Tomoyuki Sugaya ,  Masako Kataoka ,  Motohiro Umezu

IPC分类号： H01L21/425

CPC分类号： G03F7/7095 ,  G03F7/70716 ,  G03F7/70825

摘要： In a stage member for use in an exposure apparatus, a honeycomb structural body has walls that are extended in a direction perpendicular to a longitudinal direction of the stage member and that surround square shaped prismatic spaces, so as to accomplish a high resistance and a high resonant frequency with respect to torsional vibration. The honeycomb structural body of the stage member is preferably made of a ceramic material.

摘要翻译： 在曝光装置中使用的舞台构件中，蜂窝结构体具有沿与舞台构件的长度方向垂直的方向延伸并且围绕方形棱柱形空间的壁延伸的壁，以便实现高电阻和高 谐振频率相对于扭转振动。 台架构件的蜂窝结构体优选由陶瓷材料制成。

公开(公告)号：US07779313B2

公开(公告)日：2010-08-17

申请号：US12058756

申请日：2008-03-30

申请人： Kiyoshi Murata ,  Tomoyuki Sugaya ,  Sami Akhtar

发明人： Kiyoshi Murata ,  Tomoyuki Sugaya ,  Sami Akhtar

IPC分类号： G06F11/00 ,  G01R31/26

CPC分类号： G01R31/31907 ,  G01R31/31917

摘要： Provided is test apparatus with higher testing efficiency, including: plurality of pattern generating sections generating test pattern to supply to devices under test; group control section controlling group of pattern generating sections out of the pattern generating sections, and generating control signal upon receiving signal output from any pattern generating section controlled; range information storage section storing range information indicating range of pattern generating sections, out of the pattern generating sections, that serve to test one independent device under test; and comprehensive control section receiving the control signal from the group control section, identifying any pattern generating section that supplies the test pattern to the same device under test as that to which the pattern generating section having output the signal supplies the test pattern based on the range information, and in response to the control signal, controlling any other group control section that controls the identified pattern generating section.

摘要翻译： 提供了具有较高测试效率的测试装置，包括：多个模式产生部分产生测试模式以供给被测设备; 组控制部分，从图案生成部分中控制图案生成部分组，并且在从控制的任何图案生成部分输出的信号中产生控制信号; 范围信息存储部分，存储指示用于测试一个独立的被测设备的图案生成部分中的图案生成部分的范围的范围信息; 以及综合控制部分，从组控制部分接收控制信号，识别任何模式产生部分，该测试模式产生部分将测试模式提供给与测量模式产生部分相匹配的测试模式， 信息，并且响应于控制信号，控制控制识别的图案生成部分的任何其他组控制部分。