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    Plasma CVD method
    1.
    发明授权
    Plasma CVD method 失效
    等离子体CVD法

    公开(公告)号：US5340621A

    公开(公告)日：1994-08-23

    申请号：US35672

    申请日：1993-03-23

    申请人： Minoru Matsumoto ,  Etsuo Ogino ,  Toshio Tsuno

    发明人： Minoru Matsumoto ,  Etsuo Ogino ,  Toshio Tsuno

    IPC分类号： H01L21/205 ,  C23C16/513 ,  H01J37/32 ,  H05H1/50 ,  B05D3/06

    CPC分类号： H01J37/32055 ,  C23C16/513 ,  H01J37/32027 ,  H01J37/3244 ,  H01J37/3266 ,  H05H1/50 ,  H01J2237/3321

    摘要： A plasma CVD method and the device for generating an arc discharging plasma, together with introducing both a material gas and a reactive gas into a vacuum chamber; coating a substrate with a thin film which contains a material gas component and a reactive gas component, said plasma CVD method comprising the steps of: introducing said material gas into a position between the arc discharging plasma and the substrate; and introducing said reactive gas into a space opposite, relative to the arc discharging plasma, to a side whereinto the material gas is introduced.

    摘要翻译： 一种等离子体CVD方法和用于产生电弧放电等离子体的装置，同时将材料气体和反应性气体引入真空室; 用含有材料气体成分和反应性气体成分的薄膜涂覆基板，所述等离子体CVD方法包括以下步骤：将所述原料气体引入电弧放电等离子体和基板之间的位置; 并将所述反应性气体引入到相对于电弧放电等离子体相对的空间中，导入材料气体的一侧。

    Radio wave absorbing panel
    2.
    发明授权
    Radio wave absorbing panel 失效
    无线电波吸收板

    公开(公告)号：US06504501B2

    公开(公告)日：2003-01-07

    申请号：US09745750

    申请日：2000-12-21

    申请人： Toshio Tsuno ,  Masao Misonou ,  Harunobu Yoshida ,  Motoyasu Togashi ,  Kenichi Hyoudou

    发明人： Toshio Tsuno ,  Masao Misonou ,  Harunobu Yoshida ,  Motoyasu Togashi ,  Kenichi Hyoudou

    IPC分类号： H01Q1700

    CPC分类号： H05K9/0005 ,  H01Q17/008 ,  H05K9/00

    摘要： A radio wave absorbing panel is made up of a first insulating substrate and a second insulating substrate disposed in parallel a predetermined distance apart and a middle insulating substrate disposed between and parallel with the first and second substrates. The first and second substrates each have a conducting film coated over the entire surface of one side. On one side of the middle insulating substrate are coated multiple conducting films disposed in the form of stripes or a matrix. The width of each of the conducting films disposed in the form of stripes or a matrix is equal to or between 0.1 cm to 50 cm. By this means a thin radio wave absorbing panel having excellent radio wave absorption and transparency to light can be obtained.

    摘要翻译： 无线电波吸收板由第一绝缘基板和隔开预定距离设置的第二绝缘基板和设置在第一基板和第二基板之间并平行的中间绝缘基板构成。 第一和第二基板各自具有涂覆在一侧的整个表面上的导电膜。 在中间绝缘基板的一侧涂覆以条纹或矩阵形式设置的多个导电膜。 以条纹或矩阵形式设置的每个导电膜的宽度等于或在0.1cm至50cm之间。 通过这种方式，可以获得具有优异的无线电波吸收和对光的透明度的薄无线电波吸收板。

    Radio wave absorbing panel
    3.
    发明授权
    Radio wave absorbing panel 失效
    无线电波吸收板

    公开(公告)号：US06195034B1

    公开(公告)日：2001-02-27

    申请号：US09171210

    申请日：1999-06-04

    申请人： Toshio Tsuno ,  Masao Misonou ,  Harunobu Yoshida ,  Motoyasu Togashi ,  Kenichi Hyodo

    发明人： Toshio Tsuno ,  Masao Misonou ,  Harunobu Yoshida ,  Motoyasu Togashi ,  Kenichi Hyodo

    IPC分类号： H01Q1700

    CPC分类号： H05K9/0005 ,  H01Q17/008 ,  H05K9/00

    摘要： A radio wave absorbing panel is made up of a first insulating substrate and a second insulating substrate disposed in parallel a predetermined distance apart and a middle insulating substrate disposed between and parallel with the first and second substrates. The first and second substrates each have a conducting film coated over the entire surface of one side. On one side of the middle insulating substrate are coated multiple conducting films disposed in the form of stripes or a matrix. By this means a thin radio wave absorbing panel having excellent radio wave absorption and transparency to light can be obtained.

    摘要翻译： 无线电波吸收板由第一绝缘基板和隔开预定距离设置的第二绝缘基板和设置在第一基板和第二基板之间并平行的中间绝缘基板构成。 第一和第二基板各自具有涂覆在一面的整个表面上的导电膜。 在中间绝缘基板的一侧涂覆以条纹或矩阵形式设置的多个导电膜。 通过这种方式，可以获得具有优异的无线电波吸收和对光的透明度的薄无线电波吸收板。