公开(公告)号：US20130003050A1

公开(公告)日：2013-01-03

申请号：US13530774

申请日：2012-06-22

申请人： NanChang Zhu ,  Derrick Shaughnessy ,  Houssam Chouaib ,  Yaolei Zheng ,  Lu Yu ,  Jianli Cui ,  Jin An ,  Jianou Shi

发明人： NanChang Zhu ,  Derrick Shaughnessy ,  Houssam Chouaib ,  Yaolei Zheng ,  Lu Yu ,  Jianli Cui ,  Jin An ,  Jianou Shi

IPC分类号： G01B11/06 ,  G01N21/88 ,  G01N21/47

CPC分类号： G01B11/0633 ,  G01N21/1717 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/1719 ,  G01N2021/8427

摘要： The disclosure is directed to nondestructive systems and methods for simultaneously measuring active carrier concentration and thickness of one or more doped semiconductor layers. Reflectance signals may be defined as functions of active carrier concentration and thickness varying over different wavelengths and over different incidence angles of analyzing illumination reflected off the surface of an analyzed sample. Systems and methods are provided for collecting a plurality of reflectance signals having either different wavelengths or different incidence angle ranges to extract active carrier density and thickness of one or more doped semiconductor layers.

摘要翻译： 本公开涉及用于同时测量一个或多个掺杂半导体层的有源载流子浓度和厚度的非破坏性系统和方法。 反射信号可以被定义为在不同波长上变化的有效载流子浓度和厚度的函数以及从分析样品的表面反射的分析照射的不同入射角的函数。 提供了系统和方法来收集具有不同波长或不同入射角范围的多个反射信号，以提取一个或多个掺杂半导体层的有效载流子密度和厚度。

公开(公告)号：US08804106B2

公开(公告)日：2014-08-12

申请号：US13530774

申请日：2012-06-22

申请人： NanChang Zhu ,  Derrick Shaughnessy ,  Houssam Chouaib ,  Yaolei Zheng ,  Lu Yu ,  Jianli Cui ,  Jin An ,  Jianou Shi

发明人： NanChang Zhu ,  Derrick Shaughnessy ,  Houssam Chouaib ,  Yaolei Zheng ,  Lu Yu ,  Jianli Cui ,  Jin An ,  Jianou Shi

IPC分类号： G01N21/00 ,  G01B11/28

CPC分类号： G01B11/0633 ,  G01N21/1717 ,  G01N21/55 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/1719 ,  G01N2021/8427

摘要： The disclosure is directed to nondestructive systems and methods for simultaneously measuring active carrier concentration and thickness of one or more doped semiconductor layers. Reflectance signals may be defined as functions of active carrier concentration and thickness varying over different wavelengths and over different incidence angles of analyzing illumination reflected off the surface of an analyzed sample. Systems and methods are provided for collecting a plurality of reflectance signals having either different wavelengths or different incidence angle ranges to extract active carrier density and thickness of one or more doped semiconductor layers.

摘要翻译： 本公开涉及用于同时测量一个或多个掺杂半导体层的有源载流子浓度和厚度的非破坏性系统和方法。 反射信号可以被定义为在不同波长上变化的有效载流子浓度和厚度的函数以及从分析样品的表面反射的分析照射的不同入射角的函数。 提供了系统和方法来收集具有不同波长或不同入射角范围的多个反射信号，以提取一个或多个掺杂半导体层的有效载流子密度和厚度。