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公开(公告)号：US20120323855A1
公开(公告)日：2012-12-20
申请号：US13576537
申请日：2011-02-08
IPC分类号： G06F17/30
CPC分类号： G05B19/41875 , G05B2219/32221 , G05B2219/45031 , H01L21/67109 , H01L21/67276 , H01L21/67769 , Y02P90/22
摘要： There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.
摘要翻译： 提供了一种通信单元，被配置为从基板处理装置接收表示基板处理的进行状态或基板处理装置的状态的监视数据; 数据库部，被配置为与生产信息数据相关联地可读地存储由通信单元接收的监视数据; 被配置为从数据库部分读取监视数据和生产信息数据的文件存档部件，然后基于监视数据创建典型值数据，并且准备包括监视数据，生产信息数据和典型值数据的文件 ，并可以存储此文件; 以及数据搜索部，被配置为在显示单元上接收预定搜索条件的输入以搜索文件，并且显示存储在文件中并与搜索条件匹配的数据。
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公开(公告)号：US07930049B2
公开(公告)日：2011-04-19
申请号：US12224782
申请日：2007-03-12
申请人： Yasuhiro Joho
发明人： Yasuhiro Joho
CPC分类号： G05B19/4183 , G05B2219/31396 , G05B2219/31457 , G05B2219/45031 , G05B2223/06 , Y02P90/10
摘要： A centralized control apparatus includes a data collecting part that gathers data at a predetermined interval from a substrate processing apparatus for each component in the substrate processing apparatus; a data processing part that determines a status of each component based on the gathered data and regulation control information including attribute information about each component, maintenance information and previously established status-determined information about each component, at a predetermined timing established for each component, and performs thinning-out-processing to the gathered data on a determination result and prepares processed data by processing data obtained by the thinning-out-processing; and a data transmitting part that sends the regulation control information including the determination result and the processed data to a terminal unit.
摘要翻译： 集中控制装置包括：数据收集部，其从基板处理装置以规定的间隔收集基板处理装置的各部件的数据; 数据处理部，其基于所收集的数据和调节控制信息，所述数据和调节控制信息包括关于每个组件的关于每个组件的关于每个组件的属性信息，维护信息和关于每个组件的先前建立的状态确定的信息;以及 对确定结果对所收集的数据执行稀疏处理，并通过处理通过稀疏处理获得的数据来准备处理数据; 以及数据发送部，其向终端单元发送包括确定结果和处理的数据的调节控制信息。
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公开(公告)号：US20100223277A1
公开(公告)日：2010-09-02
申请号：US12225390
申请日：2007-06-18
IPC分类号： G06F17/30
CPC分类号： G05B19/4184 , G05B23/0235 , G05B2219/32196 , G05B2219/45031 , H01L21/67276 , Y02P90/14 , Y02P90/18 , Y02P90/22
摘要： There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatus 1 under operation are shared and collected online by a main controller 5, a data collection auxiliary computer 2 and a data collecting computer 3 through a network 6, and the operation state is collectively inspected by an inspecting computer 4.
摘要翻译： 提供了一种可以自动检查半导体制造装置的各种部件的操作而不增加半导体制造装置中的主控制器的负载的基板处理系统。 在本发明的基板处理系统中，正在运行的半导体制造装置1的检查数据由主控制器5，数据采集辅助计算机2和数据采集计算机3通过网络6在线共享和收集，并且 操作状态由检查计算机4统一检查。
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公开(公告)号：US08266095B2
公开(公告)日：2012-09-11
申请号：US12225390
申请日：2007-06-18
CPC分类号： G05B19/4184 , G05B23/0235 , G05B2219/32196 , G05B2219/45031 , H01L21/67276 , Y02P90/14 , Y02P90/18 , Y02P90/22
摘要： There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatus 1 under operation are shared and collected online by a main controller 5, a data collection auxiliary computer 2 and a data collecting computer 3 through a network 6, and the operation state is collectively inspected by an inspecting computer 4.
摘要翻译： 提供了一种可以自动检查半导体制造装置的各种部件的操作而不增加半导体制造装置中的主控制器的负载的基板处理系统。 在本发明的基板处理系统中，正在运行的半导体制造装置1的检查数据由主控制器5，数据采集辅助计算机2和数据采集计算机3通过网络6在线共享和收集，并且 操作状态由检查计算机4统一检查。
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公开(公告)号：US20090118855A1
公开(公告)日：2009-05-07
申请号：US12224782
申请日：2007-03-12
申请人： Yasuhiro Joho
发明人： Yasuhiro Joho
CPC分类号： G05B19/4183 , G05B2219/31396 , G05B2219/31457 , G05B2219/45031 , G05B2223/06 , Y02P90/10
摘要： A substrate processing apparatus is reduced in communication cost and alleviated of the restriction on control site when the maintenance worker staying distant monitors in real-time a status change thereof.The centralized control apparatus gathers data at a predetermined interval from the substrate processing apparatus, on a component-by-component basis which components constitute the substrate processing apparatus, determines a status of each of the components depending upon the collection data gathered and regulation control information including attribute information about each of the components, maintenance information and previously established status-determined information about each of the component, in predetermined timing established on a component-by-component basis, prepares processed data by processing data which the collection data is thinned out depending upon the determination result, and sends the control information including the determination result and the processed data to the terminal unit.
摘要翻译： 基板处理装置降低了通信成本，并且在维护人员将遥控器实时地保持其状态变化的同时，减轻了对控制部位的限制。 集中控制装置从基板处理装置以规定的间隔从成分构成基板处理装置的基础上收集数据，根据所收集的收集数据和调节控制信息来决定各部件的状态 包括关于每个组件的关于每个组件的属性信息，维护信息和关于每个组件的先前建立的状态确定的信息，按照逐个组件建立的预定定时，通过处理收集数据被稀疏的数据来准备处理的数据 取决于确定结果，并将包括确定结果和处理数据的控制信息发送到终端单元。
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公开(公告)号：US09104196B2
公开(公告)日：2015-08-11
申请号：US13576537
申请日：2011-02-08
IPC分类号： G06F7/00 , G05B19/418 , H01L21/67 , H01L21/677
CPC分类号： G05B19/41875 , G05B2219/32221 , G05B2219/45031 , H01L21/67109 , H01L21/67276 , H01L21/67769 , Y02P90/22
摘要： There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.
摘要翻译： 提供了一种通信单元，被配置为从基板处理装置接收表示基板处理的进行状态或基板处理装置的状态的监视数据; 数据库部，被配置为与生产信息数据相关联地可读地存储由通信单元接收的监视数据; 被配置为从数据库部分读取监视数据和生产信息数据的文件存档部件，然后基于监视数据创建典型值数据，并且准备包括监视数据，生产信息数据和典型值数据的文件 ，并可以存储此文件; 以及数据搜索部，被配置为在显示单元上接收预定搜索条件的输入以搜索文件，并且显示存储在文件中并与搜索条件匹配的数据。
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