PROJECTION OPTICAL SYSTEM, ALIGNER, AND METHOD FOR FABRICATING DEVICE
    1.
    发明申请
    PROJECTION OPTICAL SYSTEM, ALIGNER, AND METHOD FOR FABRICATING DEVICE 审中-公开
    投影光学系统,对准器和制造装置的方法

    公开(公告)号:US20090161087A1

    公开(公告)日:2009-06-25

    申请号:US12199750

    申请日:2008-08-27

    申请人: Yasuhiro OHMURA

    发明人: Yasuhiro OHMURA

    IPC分类号: G03B27/54 G02B9/64

    摘要: A refractive projection optical system in which a large image side numerical aperture can be ensured by interposing liquid in the optical path to the image plane, and an image having good planarity can be formed while suppressing radial upsizing. The projection optical system comprising a first image forming system arranged in the optical path between a first plane (R) and a point optically conjugate to a point on the optical axis of the first plane, and a second image forming system arranged in the optical path between the conjugate point and a second plane. In the projection optical system, all optical elements having power are refractive optical elements. The optical path between the projection optical system and the second plane is fillable with liquid having a refractive index larger than 1.3.

    摘要翻译: 可以在抑制径向大尺寸的同时,形成能够通过将液体插入到图像平面的光路中来确保大的像侧数值孔径的折射投影光学系统,并且可以形成具有良好平面性的图像。 投影光学系统包括布置在第一平面(R)和与第一平面的光轴上的点光学共轭的点之间的光路中的第一图像形成系统,以及布置在光路中的第二图像形成系统 在共轭点和第二平面之间。 在投影光学系统中,具有光焦度的所有光学元件都是折射光学元件。 投影光学系统和第二平面之间的光路可以用折射率大于1.3的液体填充。

    Process for the production of a polyamide base resin composition
    2.
    发明授权
    Process for the production of a polyamide base resin composition 失效
    制备聚酰胺基树脂组合物的方法

    公开(公告)号:US4339555A

    公开(公告)日:1982-07-13

    申请号:US200579

    申请日:1980-10-24

    CPC分类号: C08L51/06 C08L77/00

    摘要: A polyamide based resin composition is prepared mixing a resin composition with a urea compound of the formula: R.sup.2 --NHCONH--R.sup.1 --NHCONH--R.sup.3 wherein R.sup.1 is an aromatic hydrocarbon group and R.sup.2 and R.sup.3 are both aliphatic groups of 8 to 32 carbon atoms, said resin composition being prepared by melt mixing 99 to 40 parts by weight of a polyamide resin and 1 to 60 parts by weight of a modified ethylene copolymer prepared by graft copolymerizing a copolymer of ethylene and an .alpha.-olefin of at least three carbon atoms with an .alpha.,.beta.-unsaturated carboxylic acid or derivative thereof.

    摘要翻译: 制备聚酰胺基树脂组合物,将树脂组合物与下式的脲化合物:R2-NHCONH-R1-NHCONH-R3(其中R1是芳族烃基,R2和R3均为8〜32个碳原子的脂肪族基团) 所述树脂组合物通过将99至40重量份的聚酰胺树脂和1至60重量份通过将至少3个碳原子的乙烯和α-烯烃的共聚物与至少3个碳原子的共聚物接枝共聚而制备的改性乙烯共聚物 α,β-不饱和羧酸或其衍生物。

    PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    3.
    发明申请
    PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
    投影光学系统,曝光装置和装置制造方法

    公开(公告)号:US20100123883A1

    公开(公告)日:2010-05-20

    申请号:US12562043

    申请日:2009-09-17

    申请人: Yasuhiro Ohmura

    发明人: Yasuhiro Ohmura

    摘要: An object is to provide a projection optical system, for example, capable of improving the throughput of scanning exposure in application to scanning exposure apparatus. A projection optical system for forming an image of a first surface and an image of a second surface on a third surface comprises a first imaging optical system, a second imaging optical system, a third imaging optical system, a fourth imaging optical system, a fifth imaging optical system, a sixth imaging optical system, a seventh imaging optical system, a first folding member disposed between the third imaging optical system and the seventh imaging optical system, and a second folding member disposed between the sixth imaging optical system and the seventh imaging optical system.

    摘要翻译: 目的在于提供一种例如能够提高应用于扫描曝光装置的扫描曝光量的投影光学系统。 用于在第三表面上形成第一表面的图像和第二表面的图像的投影光学系统包括第一成像光学系统,第二成像光学系统,第三成像光学系统,第四成像光学系统,第五成像光学系统 成像光学系统,第六成像光学系统,第七成像光学系统,设置在第三成像光学系统和第七成像光学系统之间的第一折叠构件以及设置在第六成像光学系统和第七成像光学系统之间的第二折叠构件 光学系统。

    CATADIOPTRIC SYSTEM, ABERRATION MEASURING APPARATUS, METHOD OF ADJUSTING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
    4.
    发明申请
    CATADIOPTRIC SYSTEM, ABERRATION MEASURING APPARATUS, METHOD OF ADJUSTING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
    光谱系统,测量装置,调整光学系统的方法,曝光装置和装置制造方法

    公开(公告)号:US20110143287A1

    公开(公告)日:2011-06-16

    申请号:US12880017

    申请日:2010-09-10

    申请人: Yasuhiro Ohmura

    发明人: Yasuhiro Ohmura

    摘要: According to one embodiment relates to an optical system radially downsized and corrected well for aberration and is applicable, for example, to an aberration measuring apparatus for measuring wavefront aberration of a liquid immersion projection optical system. A catadioptric system of a coaxial type is provided with a first optical system which forms a point optically conjugate with an intersecting point with the optical axis on a first plane intersecting with the optical axis, on a second plane, and a second optical system which guides light from the first optical system to a third plane. The first optical system has a first reflecting surface arranged at or near the first plane, a second reflecting surface having a form of an ellipsoid of revolution the two focuses of which are aligned along the optical axis in a state in which one focus is located at or near a first light transmissive portion, and a medium filling an optical path between the first reflecting surface and the second reflecting surface. The first light transmissive portion is formed in a central region of the first reflecting surface including the optical axis and a second light transmissive portion is formed in a central region of the second reflecting surface including the optical axis. The medium has the refractive index of not less than 1.3. The second optical system has a plurality of lenses.

    摘要翻译: 根据一个实施例涉及一种径向缩小并且良好地校正像差的光学系统,并且可以应用于例如用于测量液浸投影光学系统的波前像差的像差测量装置。 同轴型反射折射系统设置有第一光学系统,该第一光学系统在与第二平面相交的第一平面上的光轴上形成与光轴交叉点的光学共轭点,以及第二光学系统,其引导 从第一光学系统到第三平面的光。 第一光学系统具有布置在第一平面处或附近的第一反射表面,具有旋转椭圆形的第二反射表面,其中两个焦点的两个焦点在一个焦点位于 或靠近第一透光部分,以及填充第一反射表面和第二反射表面之间的光路的介质。 第一透光部分形成在包括光轴的第一反射表面的中心区域中,并且第二透光部分形成在包括光轴的第二反射表面的中心区域中。 介质的折射率不小于1.3。 第二光学系统具有多个透镜。

    Polyester resin composition
    5.
    发明授权
    Polyester resin composition 失效
    聚酯树脂组合物

    公开(公告)号:US4454302A

    公开(公告)日:1984-06-12

    申请号:US411273

    申请日:1982-08-25

    CPC分类号: C08G63/6826 C08L67/025

    摘要: A polyester resin composition comprising:(a) 100 parts by weight of a copolymerized polyester resin a with a halogen content of 3 to 15% by weight prepared by copolymerizing terephthalic acid or an ester-forming derivative thereof; an alkylene glycol having 2 to 10 carbon atoms or an ester-forming derivative thereof; and a halogen-containing aromatic diol represented by the general formula: ##STR1## wherein R represents an alkylene of 2 to 4 carbon atoms, X represents a halogen atom, 1 and m each represents an integer of 1 to 4 and p and q each represents an integer of 1 to 10, and(b) 0.1 to 10 parts by weight of an acrylic resin b with a halogen content of not less than 10% by weight prepared by polymerizing a benzyl acrylate or benzyl methacrylate represented by the general formula: ##STR2## wherein Y represents a halogen atom, n represents, an integer of 1 to 5 and Z represents hydrogen or methyl.

    摘要翻译: 一种聚酯树脂组合物,其包含:(a)100重量份通过共聚对苯二甲酸或其成酯衍生物制备的共聚聚酯树脂a,其卤素含量为3至15重量%; 具有2〜10个碳原子的亚烷基二醇或其成酯衍生物; 和由以下通式表示的含卤素的芳族二醇:其中R表示2至4个碳原子的亚烷基,X表示卤素原子,1和m各自表示1至4的整数,p表示 q表示1〜10的整数,(b)0.1〜10重量份的丙烯酸树脂b,其中卤素含量为10重量%以上,通过聚合丙烯酸苄基酯或甲基丙烯酸苄酯 通式:其中Y表示卤素原子,n表示1〜5的整数,Z表示氢或甲基。

    Polyester resin composition
    7.
    发明授权
    Polyester resin composition 失效
    聚酯树脂组合物

    公开(公告)号:US4525529A

    公开(公告)日:1985-06-25

    申请号:US413555

    申请日:1982-08-31

    IPC分类号: C08L67/02

    CPC分类号: C08L67/025

    摘要: Flame-retardant polyester resin compositions are disclosed which have improved mechanical properties, particularly improved impact properties. The compositions comprise a halogen-containing copolymeric polyester resin derived from terephthalic acid or its derivative, an alkylene glycol or its derivative and a halogen-containing aromatic diol, said copolymeric polyester resin being blended with a minor amount of a modified ethylene copolymer derived by graft polymerization of an .alpha.,.beta.-unsaturated carboxylic acid or its derivative on the backbone of ethylene/.alpha.-olefin copolymer, and/or a minor amount of an acrylic rubber.

    摘要翻译: 公开了具有改进的机械性能,特别是改进的冲击性能的阻燃聚酯树脂组合物。 该组合物包含衍生自对苯二甲酸或其衍生物的含卤共聚聚酯树脂,亚烷基二醇或其衍生物和含卤素的芳族二醇,所述共聚聚酯树脂与少量由接枝衍生的改性乙烯共聚物 α,β-不饱和羧酸或其衍生物在乙烯/α-烯烃共聚物的主链上聚合,和/或少量的丙烯酸橡胶。