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1.发明申请公开(公告)号：US20080015111A1
公开(公告)日：2008-01-17
申请号：US11653170
申请日：2007-01-12
申请人： Sang Soo Oh , Ho Seop Kim , Kyu Jung Song , Do Jun Youm , Sun Mi Lim , Yong Hwan Jung , Sang Moo Lee , Ye Hyun Jung , Jae Eun Yoo
发明人： Sang Soo Oh , Ho Seop Kim , Kyu Jung Song , Do Jun Youm , Sun Mi Lim , Yong Hwan Jung , Sang Moo Lee , Ye Hyun Jung , Jae Eun Yoo
IPC分类号： H01L39/24
CPC分类号： H01L39/2445 , C23C14/087 , C23C14/22 , H01L39/2483
摘要： Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.
摘要翻译： 本文公开了一种通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的方法，其中高温超导材料通过蒸发高温超导材料以蒸气状态沉积在基底上，以及 同时，通过加热装入壳体中的聚束束材料，将聚束束材料形成为气体原子，并且所形成的气体原子通过壳体入口的喷嘴，然后在基板上喷雾和生长 聚束束的形式，从而在高温超导膜中形成钉扎中心。
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2.发明授权公开(公告)号：US07838061B2
公开(公告)日：2010-11-23
申请号：US11653170
申请日：2007-01-12
申请人： Sang Soo Oh , Ho Seop Kim , Kyu Jung Song , Do Jun Youm , Sun Mi Lim , Yong Hwan Jung , Sang Moo Lee , Ye Hyun Jung , Jae Eun Yoo
发明人： Sang Soo Oh , Ho Seop Kim , Kyu Jung Song , Do Jun Youm , Sun Mi Lim , Yong Hwan Jung , Sang Moo Lee , Ye Hyun Jung , Jae Eun Yoo
CPC分类号： H01L39/2445 , C23C14/087 , C23C14/22 , H01L39/2483
摘要： Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.
摘要翻译： 本文公开了一种通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的方法，其中高温超导材料通过蒸发高温超导材料以蒸气状态沉积在基底上，以及 同时，通过加热装入壳体中的聚束束材料，将聚束束材料形成为气体原子，并且所形成的气体原子通过壳体入口的喷嘴，然后在基板上喷雾和生长 聚束束的形式，从而在高温超导膜中形成钉扎中心。
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3.发明申请公开(公告)号：US20110111963A1
公开(公告)日：2011-05-12
申请号：US12906024
申请日：2010-10-15
申请人： Sang Soo Oh , Ho seop Kim , Kyu jung Song , Do jun Youm , Sun mi Lim , Yong hwan Jung , Sang moo Lee , Ye hyun Jung , Jae enn Yoo
发明人： Sang Soo Oh , Ho seop Kim , Kyu jung Song , Do jun Youm , Sun mi Lim , Yong hwan Jung , Sang moo Lee , Ye hyun Jung , Jae enn Yoo
CPC分类号： H01L39/2445 , C23C14/087 , C23C14/22 , H01L39/2483
摘要： Disclosed herein is a high temperature superconducting film and an apparatus for fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a material housing, and the formed gas atoms pass through a nozzle of an inlet of the material housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.
摘要翻译： 本文公开了一种高温超导膜和通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的装置，其中通过蒸发蒸发方法将高温超导材料沉积在基底上， 高温超导材料，并且同时通过加热装入材料壳体中的簇束材料将簇束材料形成为气体原子，并且形成的气体原子通过材料壳体的入口的喷嘴，然后 以簇束的形式在衬底上喷涂和生长，从而在高温超导膜中形成钉扎中心。
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公开(公告)号：US20100107979A1
公开(公告)日：2010-05-06
申请号：US12530315
申请日：2008-03-07
申请人： Do-Jun Youm , Ja-Eun Yoo , Byoung-Su Lee , Sang-Moo Lee , Ye-Hyun Jung , Jae-Young Lee
发明人： Do-Jun Youm , Ja-Eun Yoo , Byoung-Su Lee , Sang-Moo Lee , Ye-Hyun Jung , Jae-Young Lee
CPC分类号： H01L39/2432 , C23C14/562 , H01L39/2422
摘要： Provided is an apparatus for continuously fabricating superconducting tapes. An evaporation using drum in dual chamber (EDDC) method is suitable for mass production of high-temperature superconducting tapes. However, the EDDC method is limited to fabrication of high-temperature superconducting tapes having a limited length. In an attempt, high-temperature super-conducting tapes having a sufficiently large length can be fabricated using the EDDC method by releasing a long high-temperature superconducting tape from one reel and winding the long high-temperature superconducting tape around the other reel. In this case, it is important to stably move a high-temperature superconducting tape spirally wound around a drum from one reel to the other reel. Therefore, the provided apparatus uses endless tract belts separately disposed around a drum to stably and continuously move a high-temperature superconducting tape spirally wound around the drum along the centerline of the drum from one reel to the other reel.
摘要翻译： 提供了用于连续制造超导带的装置。 使用双室蒸发（EDDC）方法的蒸发适用于大规模生产高温超导带。 然而，EDDC方法限于制造具有有限长度的高温超导带。 试图通过使用EDDC方法，通过从一个卷轴上释放长的高温超导带并将长的高温超导带缠绕在另一卷轴上，可以制造具有足够长的高温超导带。 在这种情况下，重要的是将围绕鼓的螺旋卷绕的高温超导带从一个卷轴稳定地移动到另一个卷轴。 因此，所提供的装置使用分开设置在滚筒周围的环形带，以便将沿鼓的中心线螺旋卷绕在滚筒周围的高温超导带从一个卷轴稳定地连续移动到另一个卷轴。
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公开(公告)号：US08685166B2
公开(公告)日：2014-04-01
申请号：US12530315
申请日：2008-03-07
申请人： Do-Jun Youm , Ja-Eun Yoo , Byoung-Su Lee , Sang-Moo Lee , Ye-Hyun Jung , Jae-Young Lee
发明人： Do-Jun Youm , Ja-Eun Yoo , Byoung-Su Lee , Sang-Moo Lee , Ye-Hyun Jung , Jae-Young Lee
CPC分类号： H01L39/2432 , C23C14/562 , H01L39/2422
摘要： Provided is an apparatus for continuously fabricating superconducting tapes. An evaporation using drum in dual chamber (EDDC) method is suitable for mass production of high-temperature superconducting tapes. However, the EDDC method is limited to fabrication of high-temperature superconducting tapes having a limited length. In an attempt, high-temperature super-conducting tapes having a sufficiently large length can be fabricated using the EDDC method by releasing a long high-temperature superconducting tape from one reel and winding the long high-temperature superconducting tape around the other reel. In this case, it is important to stably move a high-temperature superconducting tape spirally wound around a drum from one reel to the other reel. Therefore, the provided apparatus uses endless tract belts separately disposed around a drum to stably and continuously move a high-temperature superconducting tape spirally wound around the drum along the centerline of the drum from one reel to the other reel.
摘要翻译： 提供了用于连续制造超导带的装置。 使用双室蒸发（EDDC）方法的蒸发适用于大规模生产高温超导带。 然而，EDDC方法限于制造具有有限长度的高温超导带。 试图通过使用EDDC方法，通过从一个卷轴上释放长的高温超导带并将长的高温超导带缠绕在另一卷轴上，可以制造具有足够长的高温超导带。 在这种情况下，重要的是将围绕鼓的螺旋卷绕的高温超导带从一个卷轴稳定地移动到另一个卷轴。 因此，所提供的装置使用分开设置在滚筒周围的环形带，以便将沿鼓的中心线螺旋卷绕在滚筒周围的高温超导带从一个卷轴稳定地连续移动到另一个卷轴。
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