公开(公告)号：US20080015111A1

公开(公告)日：2008-01-17

申请号：US11653170

申请日：2007-01-12

申请人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

发明人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

IPC分类号： H01L39/24

CPC分类号： H01L39/2445 ,  C23C14/087 ,  C23C14/22 ,  H01L39/2483

摘要： Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.

摘要翻译： 本文公开了一种通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的方法，其中高温超导材料通过蒸发高温超导材料以蒸气状态沉积在基底上，以及 同时，通过加热装入壳体中的聚束束材料，将聚束束材料形成为气体原子，并且所形成的气体原子通过壳体入口的喷嘴，然后在基板上喷雾和生长 聚束束的形式，从而在高温超导膜中形成钉扎中心。

公开(公告)号：US08685166B2

公开(公告)日：2014-04-01

申请号：US12530315

申请日：2008-03-07

申请人： Do-Jun Youm ,  Ja-Eun Yoo ,  Byoung-Su Lee ,  Sang-Moo Lee ,  Ye-Hyun Jung ,  Jae-Young Lee

发明人： Do-Jun Youm ,  Ja-Eun Yoo ,  Byoung-Su Lee ,  Sang-Moo Lee ,  Ye-Hyun Jung ,  Jae-Young Lee

IPC分类号： B05C11/00 ,  B05C13/00 ,  B05C15/00 ,  C23C16/00

CPC分类号： H01L39/2432 ,  C23C14/562 ,  H01L39/2422

摘要： Provided is an apparatus for continuously fabricating superconducting tapes. An evaporation using drum in dual chamber (EDDC) method is suitable for mass production of high-temperature superconducting tapes. However, the EDDC method is limited to fabrication of high-temperature superconducting tapes having a limited length. In an attempt, high-temperature super-conducting tapes having a sufficiently large length can be fabricated using the EDDC method by releasing a long high-temperature superconducting tape from one reel and winding the long high-temperature superconducting tape around the other reel. In this case, it is important to stably move a high-temperature superconducting tape spirally wound around a drum from one reel to the other reel. Therefore, the provided apparatus uses endless tract belts separately disposed around a drum to stably and continuously move a high-temperature superconducting tape spirally wound around the drum along the centerline of the drum from one reel to the other reel.

摘要翻译： 提供了用于连续制造超导带的装置。 使用双室蒸发（EDDC）方法的蒸发适用于大规模生产高温超导带。 然而，EDDC方法限于制造具有有限长度的高温超导带。 试图通过使用EDDC方法，通过从一个卷轴上释放长的高温超导带并将长的高温超导带缠绕在另一卷轴上，可以制造具有足够长的高温超导带。 在这种情况下，重要的是将围绕鼓的螺旋卷绕的高温超导带从一个卷轴稳定地移动到另一个卷轴。 因此，所提供的装置使用分开设置在滚筒周围的环形带，以便将沿鼓的中心线螺旋卷绕在滚筒周围的高温超导带从一个卷轴稳定地连续移动到另一个卷轴。

公开(公告)号：US07175735B2

公开(公告)日：2007-02-13

申请号：US10944608

申请日：2004-09-17

申请人： Chan Park ,  Do-Jun Youm ,  Ho-Sup Kim ,  Kook-Chae Chung ,  Byung-Su Lee ,  Sun-Me Lim ,  Hyoung-Joon Kim

发明人： Chan Park ,  Do-Jun Youm ,  Ho-Sup Kim ,  Kook-Chae Chung ,  Byung-Su Lee ,  Sun-Me Lim ,  Hyoung-Joon Kim

IPC分类号： C09J5/02 ,  B29C65/66 ,  H01L39/02 ,  H01L39/06 ,  B32B15/04

CPC分类号： C30B23/02 ,  C30B25/025 ,  C30B29/22 ,  H01L39/2422 ,  Y10S428/93 ,  Y10T29/49014

摘要： Disclosed herein is a technique for manufacturing a superconducting tape grown epitaxially by a replication process. According to the technique, a long superconducting tape can be manufactured using a loop-shaped base. Further disclosed is a method for manufacturing a metal oxide device which comprises the steps of forming a solvent-soluble separation layer on a base having a single crystal or textured surface, forming a superconducting layer on the separation layer, forming a support layer on the superconducting layer, and removing the separation layer by dissolution in a solvent. According to the method, it is possible to manufacture a superconducting tape consisting of the superconducting layer and the support layer separated from the bath, and having the same crystallinity as that of the base (replication).

摘要翻译： 本文公开了一种用于制造通过复制工艺外延生长的超导带的技术。 根据该技术，可以使用环形基底制造长的超导带。 还公开了一种金属氧化物器件的制造方法，其特征在于，在具有单晶或纹理表面的基底上形成溶剂可溶性分离层，在分离层上形成超导层，在超导体上形成支撑层 层，并通过溶解在溶剂中去除分离层。 根据该方法，可以制造由超导层和与浴分离的支撑层构成的超导带，并且具有与基底（复制）相同的结晶度。

公开(公告)号：US07838061B2

公开(公告)日：2010-11-23

申请号：US11653170

申请日：2007-01-12

申请人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

发明人： Sang Soo Oh ,  Ho Seop Kim ,  Kyu Jung Song ,  Do Jun Youm ,  Sun Mi Lim ,  Yong Hwan Jung ,  Sang Moo Lee ,  Ye Hyun Jung ,  Jae Eun Yoo

IPC分类号： B05D5/12 ,  B05D3/14 ,  H01L39/24 ,  C23C14/00

CPC分类号： H01L39/2445 ,  C23C14/087 ,  C23C14/22 ,  H01L39/2483

摘要： Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.

摘要翻译： 本文公开了一种通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的方法，其中高温超导材料通过蒸发高温超导材料以蒸气状态沉积在基底上，以及 同时，通过加热装入壳体中的聚束束材料，将聚束束材料形成为气体原子，并且所形成的气体原子通过壳体入口的喷嘴，然后在基板上喷雾和生长 聚束束的形式，从而在高温超导膜中形成钉扎中心。

公开(公告)号：US20050029091A1

公开(公告)日：2005-02-10

申请号：US10895560

申请日：2004-07-21

申请人： Chan Park ,  Do-Jun Youm ,  Ho-Sup Kim ,  Kook-Chae Chung ,  Byung-Su Lee ,  Sun-Me Lim

发明人： Chan Park ,  Do-Jun Youm ,  Ho-Sup Kim ,  Kook-Chae Chung ,  Byung-Su Lee ,  Sun-Me Lim

IPC分类号： C23C14/34 ,  C23C14/00 ,  C23C14/08 ,  C23C14/32

CPC分类号： C23C14/08 ,  C23C14/0047 ,  C23C14/0068

摘要： Disclosed herein is a reactive sputtering deposition apparatus in which a partition plate is provided between a sputtering target and a substrate. The reactive sputtering deposition apparatus comprises a deposition chamber for creating an inner process atmosphere of the apparatus, a target including a metal material to be deposited, a substrate on which a reaction product of the metal material separated from the target with a reactive gas is deposited, and a partition plate dividing the deposition chamber into a reaction chamber at the side of the substrate and a sputtering chamber at the side of the target and provided between the target and the substrate, wherein an opening is formed through a central portion of the partition plate to allow the metal material separated from the target to reach the substrate. According to the reactive sputtering deposition apparatus, the transfer of the reactive gas to the metal target is minimized and thus the oxidation of the metal target is prevented, thereby enabling deposition of a metal oxide thin film on the substrate at a high rate. Further disclosed is a reactive sputtering deposition method using the apparatus.

摘要翻译： 本文公开了一种反应溅射沉积设备，其中在溅射靶和衬底之间设置有隔板。 反应性溅射沉积装置包括用于产生装置的内部工艺气氛的沉积室，包括待沉积的金属材料的靶材，沉积有与靶材与反应气体分离的金属材料的反应产物沉积在其上的基板 以及分隔板，其将沉积室分为在基板一侧的反应室和位于靶的侧面的溅射室，并设置在目标和基板之间，其中，通过分隔件的中心部分形成开口 以允许从靶分离的金属材料到​​达基底。 根据反应溅射沉积装置，反应气体向金属靶的转移被最小化，从而防止了金属靶的氧化，从而能够高速地在基板上沉积金属氧化物薄膜。 进一步公开了使用该装置的反应溅射沉积方法。

公开(公告)号：US20110111963A1

公开(公告)日：2011-05-12

申请号：US12906024

申请日：2010-10-15

申请人： Sang Soo Oh ,  Ho seop Kim ,  Kyu jung Song ,  Do jun Youm ,  Sun mi Lim ,  Yong hwan Jung ,  Sang moo Lee ,  Ye hyun Jung ,  Jae enn Yoo

发明人： Sang Soo Oh ,  Ho seop Kim ,  Kyu jung Song ,  Do jun Youm ,  Sun mi Lim ,  Yong hwan Jung ,  Sang moo Lee ,  Ye hyun Jung ,  Jae enn Yoo

IPC分类号： H01L39/00 ,  C23C16/06

CPC分类号： H01L39/2445 ,  C23C14/087 ,  C23C14/22 ,  H01L39/2483

摘要： Disclosed herein is a high temperature superconducting film and an apparatus for fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a material housing, and the formed gas atoms pass through a nozzle of an inlet of the material housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.

摘要翻译： 本文公开了一种高温超导膜和通过使用蒸发法的辅助聚束束喷射在真空室中制造高温超导膜的装置，其中通过蒸发蒸发方法将高温超导材料沉积在基底上， 高温超导材料，并且同时通过加热装入材料壳体中的簇束材料将簇束材料形成为气体原子，并且形成的气体原子通过材料壳体的入口的喷嘴，然后 以簇束的形式在衬底上喷涂和生长，从而在高温超导膜中形成钉扎中心。

公开(公告)号：US20100107979A1

公开(公告)日：2010-05-06

申请号：US12530315

申请日：2008-03-07

申请人： Do-Jun Youm ,  Ja-Eun Yoo ,  Byoung-Su Lee ,  Sang-Moo Lee ,  Ye-Hyun Jung ,  Jae-Young Lee

发明人： Do-Jun Youm ,  Ja-Eun Yoo ,  Byoung-Su Lee ,  Sang-Moo Lee ,  Ye-Hyun Jung ,  Jae-Young Lee

IPC分类号： B05C11/00 ,  B05C13/00 ,  B05C15/00

CPC分类号： H01L39/2432 ,  C23C14/562 ,  H01L39/2422

摘要： Provided is an apparatus for continuously fabricating superconducting tapes. An evaporation using drum in dual chamber (EDDC) method is suitable for mass production of high-temperature superconducting tapes. However, the EDDC method is limited to fabrication of high-temperature superconducting tapes having a limited length. In an attempt, high-temperature super-conducting tapes having a sufficiently large length can be fabricated using the EDDC method by releasing a long high-temperature superconducting tape from one reel and winding the long high-temperature superconducting tape around the other reel. In this case, it is important to stably move a high-temperature superconducting tape spirally wound around a drum from one reel to the other reel. Therefore, the provided apparatus uses endless tract belts separately disposed around a drum to stably and continuously move a high-temperature superconducting tape spirally wound around the drum along the centerline of the drum from one reel to the other reel.

摘要翻译： 提供了用于连续制造超导带的装置。 使用双室蒸发（EDDC）方法的蒸发适用于大规模生产高温超导带。 然而，EDDC方法限于制造具有有限长度的高温超导带。 试图通过使用EDDC方法，通过从一个卷轴上释放长的高温超导带并将长的高温超导带缠绕在另一卷轴上，可以制造具有足够长的高温超导带。 在这种情况下，重要的是将围绕鼓的螺旋卷绕的高温超导带从一个卷轴稳定地移动到另一个卷轴。 因此，所提供的装置使用分开设置在滚筒周围的环形带，以便将沿鼓的中心线螺旋卷绕在滚筒周围的高温超导带从一个卷轴稳定地连续移动到另一个卷轴。

公开(公告)号：US20050269021A1

公开(公告)日：2005-12-08

申请号：US10944608

申请日：2004-09-17

申请人： Chan Park ,  Do-Jun Youm ,  Ho-Sup Kim ,  Kook-Chae Chung ,  Byung-Su Lee ,  Sun-Me Lim ,  Hyoung-Joon Kim

发明人： Chan Park ,  Do-Jun Youm ,  Ho-Sup Kim ,  Kook-Chae Chung ,  Byung-Su Lee ,  Sun-Me Lim ,  Hyoung-Joon Kim

IPC分类号： C23C14/00 ,  C23C16/00 ,  C30B23/02 ,  C30B25/02 ,  C30B29/22 ,  H01B12/00 ,  H01B12/06 ,  H01L39/02 ,  H01L39/24 ,  B32B31/00

CPC分类号： C30B23/02 ,  C30B25/025 ,  C30B29/22 ,  H01L39/2422 ,  Y10S428/93 ,  Y10T29/49014

摘要： Disclosed herein is a technique for manufacturing a superconducting tape grown epitaxially by a replication process. According to the technique, a long superconducting tape can be manufactured using a loop-shaped base. Further disclosed is a method for manufacturing a metal oxide device which comprises the steps of forming a solvent-soluble separation layer on a base having a single crystal or textured surface, forming a superconducting layer on the separation layer, forming a support layer on the superconducting layer, and removing the separation layer by dissolution in a solvent. According to the method, it is possible to manufacture a superconducting tape consisting of the superconducting layer and the support layer separated from the bath, and having the same crystallinity as that of the base (replication).

摘要翻译： 本文公开了一种用于制造通过复制工艺外延生长的超导带的技术。 根据该技术，可以使用环形基底制造长的超导带。 还公开了一种金属氧化物器件的制造方法，其特征在于，在具有单晶或纹理表面的基底上形成溶剂可溶性分离层，在分离层上形成超导层，在超导体上形成支撑层 层，并通过溶解在溶剂中去除分离层。 根据该方法，可以制造由超导层和与浴分离的支撑层构成的超导带，并且具有与基底（复制）相同的结晶度。

公开(公告)号：US6147033A

公开(公告)日：2000-11-14

申请号：US407892

申请日：1999-09-29

申请人： Do Jun Youm ,  Doo Hoon Goo ,  Sang Hyun Oh

发明人： Do Jun Youm ,  Doo Hoon Goo ,  Sang Hyun Oh

IPC分类号： C23C14/56 ,  C23C16/54 ,  H01B13/00 ,  H01L39/24 ,  C23C14/00

CPC分类号： C23C14/562 ,  C23C16/545 ,  H01L39/2432

摘要： This invention relates to an apparatus and method for forming a high temperature superconducting film on a tape substrate. In this invention, the superconducting film is deposited on the tape substrate wound around a cylindrical substrate holder inserted in an auxiliary chamber. The holder rotates during the whole deposition process. Vapors of film materials are supplied from a main chamber through an opening between the two chambers. According to the present invention, it is possible to form a highly uniform high temperature superconducting film on a tape substrate at high speeds suitable for large scale production. The manufacturing speed can easily be controlled by the size of the substrate holder.

摘要翻译： 本发明涉及一种在带基材上形成高温超导膜的装置和方法。 在本发明中，超导膜沉积在卷绕在插入辅助室中的圆柱形基片架上的带基片上。 保持架在整个沉积过程中旋转。 薄膜材料的蒸气从主室通过两个室之间的开口供应。 根据本发明，可以在适于大规模生产的高速下在带基材上形成高度均匀的高温超导膜。 制造速度可以容易地通过基板支架的尺寸来控制。