Partition pattern match and integration method for alignment
    2.
    发明授权
    Partition pattern match and integration method for alignment 有权
    分区模式匹配和集成方法进行对齐

    公开(公告)号:US07783113B2

    公开(公告)日:2010-08-24

    申请号:US10961663

    申请日:2004-10-08

    IPC分类号: G06K9/62

    摘要: A partition pattern template generation method for alignment receives a learning image and performs partition template generation using the learning image to generate a plurality of partition template result output. A partition template acceptance test is performed using the plurality of partition template results to generate partition templates or failure result.A partition template search method for alignment receives an alignment image and partition templates and performs a plurality of template search steps to generate a plurality of matching scores output. A partition integration method is performed using the plurality of matching scores to generate a partition template search result.A partition integration error self checking method receives a preliminary template search result position and a plurality of the matching scores. A matching score profile comparison is performed using the plurality of the matching scores and the expected matching score profile to generate the template search result.

    摘要翻译: 用于对准的分割图案模板生成方法接收学习图像,并使用学习图像来执行分割模板生成,以生成多个分割模板结果输出。 使用多个分区模板结果执行分区模板验收测试,以生成分区模板或故障结果。 用于对准的分割模板搜索方法接收对准图像和分割模板,并且执行多个模板搜索步骤以生成多个匹配分数输出。 使用多个匹配分数来执行分区集成方法以生成分区模板搜索结果。 分区整合错误自检方法接收初步模板搜索结果位置和多个匹配分数。 使用多个匹配分数和预期匹配分数分布来执行匹配分数分布比较,以生成模板搜索结果。

    Template generating method and apparatus of the same, pattern detecting method, position detecting method and apparatus of the same, exposure apparatus and method of the same, device manufacturing method and template generating program
    3.
    发明申请
    Template generating method and apparatus of the same, pattern detecting method, position detecting method and apparatus of the same, exposure apparatus and method of the same, device manufacturing method and template generating program 审中-公开
    模板生成方法及其装置,图案检测方法,位置检测方法及其装置,曝光装置及其方法,装置制造方法和模板生成程序

    公开(公告)号:US20060126916A1

    公开(公告)日:2006-06-15

    申请号:US11285171

    申请日:2005-11-23

    申请人: Yuji Kokumai

    发明人: Yuji Kokumai

    IPC分类号: G06K9/00

    摘要: A method enabling easy generation of a template handling pattern deformation due to optical conditions or process conditions and suitably detecting pattern position is disclosed. A first method extracts a feature component, that is, symmetry, not affected by optical conditions etc. from the pattern image information and uses it as a template. At the time of pattern detection, image information is projected into a symmetry feature space and matching performed in the feature space to detect a pattern. Suitable template matching can be performed with being affected by pattern deformation. A second method generates a model of a pattern from input pattern data, calculates a plurality of pattern images (virtual models) obtained by imaging of the model for each imaging condition using an image deformation simulator, and determines a template considering their average or correlation.

    摘要翻译: 公开了一种能够容易地生成由光学条件或工艺条件引起的模板处理模式变形并适当地检测图案位置的方法。 第一种方法从图案图像信息中提取不受光学条件等影响的特征分量,即对称性,并将其用作模板。 在图案检测时,将图像信息投影到对称特征空间中,并且在特征空间中执行匹配以检测图案。 可以通过模式变形来实现合适的模板匹配。 第二种方法从输入图案数据生成图案的模型,通过使用图像变形模拟器计算通过对每个成像条件的模型进行成像而获得的多个图案图像(虚拟模型),并且考虑其平均值或相关性来确定模板。

    Alignment template goodness qualification method
    4.
    发明申请
    Alignment template goodness qualification method 审中-公开
    对齐模板善良鉴定方法

    公开(公告)号:US20060147105A1

    公开(公告)日:2006-07-06

    申请号:US11035867

    申请日:2005-01-05

    IPC分类号: G06K9/00

    摘要: An alignment template goodness qualification method receives a pattern image and a pattern based alignment template and performs template goodness measurement using the pattern image and the pattern based alignment template to generate template goodness result output. A template qualification is performed using the template goodness result to generate template qualification result output. If the template qualification result is acceptable, the pattern based alignment template is outputted as the qualified pattern based alignment template. Otherwise, an alternative template selection is performed using the pattern image, the pattern based alignment template and the template goodness result to generate alternative pattern based alignment template output. The template goodness measurements include signal content measurement, spatial discrimination measurement and pattern ambiguity measurement.

    摘要翻译: 对齐模板品质鉴定方法接收图案图像和基于图案的对准模板,并使用图案图像和基于图案的对准模板进行模板优良度测量,以生成模板优良结果输出。 使用模板优化结果执行模板限定,以生成模板验证结果输出。 如果模板限定结果可以接受,则基于模式的对齐模板将作为合格模式对齐模板输出。 否则,使用模式图像,基于模式的对准模板和模板优点结果来执行替代模板选择,以生成基于替代模式的对准模板输出。 模板优点测量包括信号内容测量,空间辨别测量和模式模糊度测量。

    Partition pattern match and integration method for alignment
    5.
    发明申请
    Partition pattern match and integration method for alignment 有权
    分区模式匹配和集成方法进行对齐

    公开(公告)号:US20060078192A1

    公开(公告)日:2006-04-13

    申请号:US10961663

    申请日:2004-10-08

    IPC分类号: G06K9/00

    摘要: A partition pattern template generation method for alignment receives a learning image and performs partition template generation using the learning image to generate a plurality of partition template result output. A partition template acceptance test is performed using the plurality of partition template results to generate partition templates or failure result. A partition template search method for alignment receives an alignment image and partition templates and performs a plurality of template search steps to generate a plurality of matching scores output. A partition integration method is performed using the plurality of matching scores to generate a partition template search result. A partition integration error self checking method receives a preliminary template search result position and a plurality of the matching scores. A matching score profile comparison is performed using the plurality of the matching scores and the expected matching score profile to generate the template search result.

    摘要翻译: 用于对准的分割图案模板生成方法接收学习图像,并使用学习图像来执行分割模板生成,以生成多个分割模板结果输出。 使用多个分区模板结果执行分区模板验收测试,以生成分区模板或故障结果。 用于对准的分割模板搜索方法接收对准图像和分割模板,并且执行多个模板搜索步骤以生成多个匹配分数输出。 使用多个匹配分数来执行分区集成方法以生成分区模板搜索结果。 分区整合错误自检方法接收初步模板搜索结果位置和多个匹配分数。 使用多个匹配分数和预期匹配分数分布来执行匹配分数分布比较,以生成模板搜索结果。

    Image processing apparatus for calculating a degree of similarity between images, method of image processing, processing apparatus for calculating a degree of approximation between data sets, method of processing, computer program product, and computer readable medium
    6.
    发明授权
    Image processing apparatus for calculating a degree of similarity between images, method of image processing, processing apparatus for calculating a degree of approximation between data sets, method of processing, computer program product, and computer readable medium 有权
    用于计算图像之间的相似度的图像处理装置,图像处理方法,用于计算数据集之间的近似程度的处理装置,处理方法,计算机程序产品和计算机可读介质

    公开(公告)号:US08761496B2

    公开(公告)日:2014-06-24

    申请号:US12453560

    申请日:2009-05-14

    CPC分类号: H04N5/91 G06K9/40

    摘要: There is provided an image processing apparatus including a weight generating section that generates weight data in which a weight of a first region is larger than a weight of a second region, where the first region has a larger difference between a target image and at least one of a plurality of to-be-selected images than the second region, a calculating section that calculates a degree of similarity between the target image and each of two or more of the plurality of to-be-selected images with a difference between the target image and the to-be-selected image being weighted in each region in accordance with the weight data, and an image selecting section that selects, from the two or more to-be-selected images, one or more to-be-selected images that are more similar to the target image by referring to the degrees of similarity of the two or more to-be-selected images.

    摘要翻译: 提供了一种图像处理装置,其包括:权重生成部,其生成权重数据,其中,第一区域的权重大于第二区域的权重,其中,所述第一区域在目标图像与至少一个 多个要被选择的图像比第二区域多的计算部分;计算部分,其计算目标图像与多个待选图像中的两个或更多个之间的目标图像之间的相似度与目标图像之间的差异 图像和所选择的图像根据权重数据在每个区域中被加权;以及图像选择部分,从所述两个或更多个待选择的图像中选择一个或多个待选图像 通过参考两个或更多个待选图像的相似度来更加类似于目标图像。

    Image processing apparatus, method of image processing, processing apparatus, method of processing, and recording medium
    7.
    发明申请
    Image processing apparatus, method of image processing, processing apparatus, method of processing, and recording medium 有权
    图像处理装置,图像处理方法,处理装置,处理方法和记录介质

    公开(公告)号:US20090297044A1

    公开(公告)日:2009-12-03

    申请号:US12453560

    申请日:2009-05-14

    IPC分类号: G06K9/68

    CPC分类号: H04N5/91 G06K9/40

    摘要: There is provided an image processing apparatus including a weight generating section that generates weight data in which a weight of a first region is larger than a weight of a second region, where the first region has a larger difference between a target image and at least one of a plurality of to-be-selected images than the second region, a calculating section that calculates a degree of similarity between the target image and each of two or more of the plurality of to-be-selected images with a difference between the target image and the to-be-selected image being weighted in each region in accordance with the weight data, and an image selecting section that selects, from the two or more to-be-selected images, one or more to-be-selected images that are more similar to the target image by referring to the degrees of similarity of the two or more to-be-selected images.

    摘要翻译: 提供了一种图像处理装置,其包括:权重生成部,其生成权重数据,其中,第一区域的权重大于第二区域的权重,其中,所述第一区域在目标图像与至少一个 多个要被选择的图像比第二区域多的计算部分;计算部分,其计算目标图像与多个待选图像中的两个或更多个之间的目标图像之间的相似度与目标图像之间的差异 图像和所选择的图像根据权重数据在每个区域中被加权;以及图像选择部分,从所述两个或更多个待选择的图像中选择一个或多个待选图像 通过参考两个或更多个待选图像的相似度来更加类似于目标图像。