摘要:
An alignment template goodness qualification method receives a pattern image and a pattern based alignment template and performs template goodness measurement using the pattern image and the pattern based alignment template to generate template goodness result output. A template qualification is performed using the template goodness result to generate template qualification result output. If the template qualification result is acceptable, the pattern based alignment template is outputted as the qualified pattern based alignment template. Otherwise, an alternative template selection is performed using the pattern image, the pattern based alignment template and the template goodness result to generate alternative pattern based alignment template output. The template goodness measurements include signal content measurement, spatial discrimination measurement and pattern ambiguity measurement.
摘要:
A partition pattern template generation method for alignment receives a learning image and performs partition template generation using the learning image to generate a plurality of partition template result output. A partition template acceptance test is performed using the plurality of partition template results to generate partition templates or failure result. A partition template search method for alignment receives an alignment image and partition templates and performs a plurality of template search steps to generate a plurality of matching scores output. A partition integration method is performed using the plurality of matching scores to generate a partition template search result. A partition integration error self checking method receives a preliminary template search result position and a plurality of the matching scores. A matching score profile comparison is performed using the plurality of the matching scores and the expected matching score profile to generate the template search result.
摘要:
A partition pattern template generation method for alignment receives a learning image and performs partition template generation using the learning image to generate a plurality of partition template result output. A partition template acceptance test is performed using the plurality of partition template results to generate partition templates or failure result.A partition template search method for alignment receives an alignment image and partition templates and performs a plurality of template search steps to generate a plurality of matching scores output. A partition integration method is performed using the plurality of matching scores to generate a partition template search result.A partition integration error self checking method receives a preliminary template search result position and a plurality of the matching scores. A matching score profile comparison is performed using the plurality of the matching scores and the expected matching score profile to generate the template search result.
摘要:
A phase-contrast microscope system includes: an illumination optical system that illuminates a specimen with an illumination light from a light source; an imaging optical system that forms an image of the specimen from a light from the specimen; a first spatial modulation element that is disposed in a position of a pupil of the imaging optical system and changes an amplitude transmittance distribution of the light from the specimen; an image sensor that detects the image of the specimen by the imaging optical system and outputs a picture signal; a calculation section that calculates the amplitude transmittance distribution of the light from the specimen appropriate for observing the specimen on the basis of the output data detected by the image sensor and the amplitude transmittance distribution of the light from the specimen formed by the first spatial modulation element.
摘要:
An imaging apparatus includes an imaging unit that images a test object, an analysis unit that outputs a feature amount of an image which is captured by the imaging unit, a storage unit that stores an evaluation function which has the image feature amount as a variable, for evaluation of the image, a selection unit that selects one image from two or more images including an image specified based on a value of the evaluation function, and a changing unit that changes the evaluation function based on the one image in a case where the one image selected by the selection unit is different from the specified image.
摘要:
The invention provides a quartz glass crucible for pulling up single-crystal silicon, and a method for producing single-crystal silicon by using it. The quartz glass crucible is characterized by having a crystallization promoter-containing layer as the inner surface thereof and is characterized in that, when single-crystal silicon is pulled up, macular crystallized regions are formed in the inner surface thereof by the action of the crystallization promoter. In the quartz glass crucible, a crystallized substance is not generated sparsely in the inner surface thereof and therefore does not shed off; outgassing holes are not generated through micro-peeling off of a part of the crystal layer formed in the inner surface thereof, unlike in a case where a crystal layer is formed entirely in the inner surface thereof; molten silicon does not penetrate into the area between the crystal layer and the underlying glass layer through the outgassing holes formed by micro-peeling off; and therefore the quartz glass crucible brings about a high yield.
摘要:
An optical communication apparatus includes an erbium-doped optical fiber amplifier for amplifying a modulated optical signal, wherein a light which is not modulated is inputted to the erbium-doped optical fiber amplifier together with the optical signal.
摘要:
A washing machine includes a washing shaft for rotating agitating blades disposed in a dewatering tank, and the washing shaft is disposed coaxially on a hollow dewatering shaft for rotating the dewatering tank. The washing shaft is connected to the output side of a reduction mechanism, and a washing side input shaft is connected to the input side of the reduction mechanism to rotate the washing shaft by decelerating the rotation of a drive motor. A rotor of the drive motor is coupled to the lower part of the washing side input shaft. Therefore, the rotating torque of the agitating blades can be increased without increasing the torque of the drive motor. In addition, if the laundry collides against the agitating blades, the eccentricity to the washing side input shaft is suppressed, thereby the increase of the washing capacity can be handled without increasing the size of the drive motor.
摘要:
A heating garment includes a heat source provided inside a garment, and a heat conducting path for transmitting air heated by the heat source from the heat source upwardly along a back of the garment. By so doing, not only can a portable, light-weight and compact combustor be provided, but the use of this combustor is effective to accomplish heating inside the garment while the supply of fuel and the amount of heat supplied can be controlled, to thereby provide a comfortable temperature environment inside the garment. It is also possible to obtain the heating garment ready comfortably and quick to warm.
摘要:
An imaging apparatus includes an imaging unit that images a test object, an analysis unit that outputs a feature amount of an image which is captured by the imaging unit, a storage unit that stores an evaluation function which has the image feature amount as a variable, for evaluation of the image, a selection unit that selects one image from two or more images including an image specified based on a value of the evaluation function, and a changing unit that changes the evaluation function based on the one image in a case where the one image selected by the selection unit is different from the specified image.