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公开(公告)号：US20240271932A1
公开(公告)日：2024-08-15
申请号：US18324178
申请日：2023-05-26
发明人： Shan Yang , Xiao Kan , Zhan Zhan , Shitao Yan , Zhao Ma , Hongtao Peng , Houming Chong , Zaixiang Pua , Kahkeen Lai , Veronica Tan , Yang Li
IPC分类号： G01C19/00 , G01C19/574
CPC分类号： G01C19/005 , G01C19/574
摘要： The present invention provides an MEMS gyroscope and an electronic product. The MEMS gyroscope comprises a plurality of first mass blocks, a second mass block and coupling parts, wherein the plurality of first mass blocks are located at two opposite sides of the second mass block in a first direction; and each coupling part comprises a coupling link and a plurality of connecting beams connected to two ends of the coupling link, the connecting beams are flexible beams, and the coupling part is positioned between the first mass blocks and the second mass block and connects the first mass blocks with the second mass block. Through the arrangement of the coupling links, strong coupling can be realized between the first mass blocks and the second mass block, so that the anti-interference performance of the MEMS gyroscope is enhanced during work and the working stability is improved.
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公开(公告)号：US20240345127A1
公开(公告)日：2024-10-17
申请号：US18399706
申请日：2023-12-29
发明人： Shitao Yan , Xiao Kan , Zhao Ma , Zhan Zhan , Shan Yang , Yang Li , Veronica Tan , Kahkeen Lai , Hongtao Peng , Houming Chong , Zaixiang Pua
IPC分类号： G01P15/125 , G01P15/18
CPC分类号： G01P15/125 , G01P15/18
摘要： The present invention relates to an accelerometer, which comprises a substrate and detecting devices. The substrate is provided with supporting anchor points and electrode fixing anchor points; the detecting device comprises two detecting plates and corresponding detecting electrodes, and the detecting electrodes are connected to the electrode fixing anchor points through connecting arms; the detecting plate is elastically connected to the supporting anchor point, the two detecting plates are asymmetrically arranged with respect to axes of the supporting anchor points, and the two detecting plates are parallel to each other and in opposite directions; and the detecting electrodes and the detecting plates are arranged at intervals to form a detecting capacitor. The wiring of in-plane detecting electrodes of different detecting devices can be separated, and wire crossing can be avoided to reduce the influence of parasitic capacitance caused by complex wiring, thus improving the detection accuracy of the accelerometer.
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公开(公告)号：US20240337490A1
公开(公告)日：2024-10-10
申请号：US18401223
申请日：2023-12-29
发明人： Shan Yang , Xiao Kan , Zhan Zhan , Shitao Yan , Zhao Ma , Hongtao Peng , Yang Li , Veronica Tan , Kahkeen Lai , Zaixiang Pua , Houming Chong
IPC分类号： G01C19/5705
CPC分类号： G01C19/5705
摘要： The present invention provides a dual-axis gyroscope and an electronic device. The dual-axis gyroscope comprises first mass blocks, second mass blocks, a driving unit and a detecting unit. Tightly coupled connections are formed between adjacent first mass blocks, and between adjacent second mass blocks, thus improving the accuracy of displacement ratios of the first mass blocks and the second mass blocks, and enhancing the operational accuracy and stability of the dual-axis gyroscope. Furthermore, the requirement for the machining precision of the first mass blocks and the second mass blocks is reduced, thus lowering the manufacturing cost of the dual-axis gyroscope and the electronic device.
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公开(公告)号：US20240310407A1
公开(公告)日：2024-09-19
申请号：US18337425
申请日：2023-06-19
发明人： Shitao Yan , Shan Yang , Zhan Zhan , Zhao Ma , Xiao Kan , Yang Li , Veronica Tan , Kahkeen Lai , Hongtao Peng , Houming Chong , Zaixiang Pua
IPC分类号： G01P15/125 , G01P15/08 , G01P15/18
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18
摘要： An accelerometer includes a substrate. The substrate includes anchor points. An external coupling unit is annular and is parallel to the substrate. A first torsion plate is disposed on an inner side of the external coupling unit and is connected to the anchor points. Inner coupling beams are disposed on a side, close to the anchor points, of the first torsion plate. A second torsion plate is disposed on the inner side of the external coupling unit and is connected to the anchor points, the second torsion plate is connected to the first torsion plate through two of the inner coupling beams, the second torsion plate and the first torsion plate are mutually embedded, the first torsion plate and the second torsion plate are symmetrical about a first axis of symmetry. The accelerometer reduces cross coupling reduced, and accuracy and anti-interference performance of the accelerometer are improved.
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