公开(公告)号：US20190390323A1

公开(公告)日：2019-12-26

申请号：US16479123

申请日：2017-12-15

Applicant: THE ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES

Inventor： Xiaobin WU ,  Yan LUO ,  Yu WANG ,  Kuibo WANG ,  Wanlu XIE ,  Luosha ZHANG ,  Lijia ZHANG

IPC: C23C14/34 ,  C23C14/14 ,  C23C14/56 ,  C23C14/50 ,  C23C14/54

Abstract: A preparation device has a chamber, molten metal containers, a rotatable base in the chamber and having a deposition substrate, laser sets generating a dual-pulse laser, a base controller and a data collection control unit. The containers communicate with the chamber and each has a pulse pressurization apparatus pressing the molten metal into the chamber. The laser sets correspond to the containers such that beams of an emitted dual-pulse laser bombard the pulsed droplets, plasmas are generated and are sputtered and deposited on the substrate forming a multi-element alloy thin film. The unit collects base temperature and displacement information, and controls the pressurization frequency of the pulse pressurization apparatus, and the emission frequency and energy of the dual-pulse laser of the laser sets controlling the frequency and energy of the dual-pulse laser bombarding the corresponding pulsed droplets. The base controller controls the base temperature, rotation and movement.

公开(公告)号：US20150333468A1

公开(公告)日：2015-11-19

申请号：US14646176

申请日：2013-02-07

Applicant: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES

Inventor： Bin LIU ,  Jinbin DING ,  Kuibo WANG ,  Yu WANG ,  Yi ZHOU ,  Jiangshan ZHAO

IPC: H01S3/036 ,  H01S3/038 ,  H01S3/225

CPC classification number: H01S3/036 ,  H01S3/03 ,  H01S3/038 ,  H01S3/076 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2308

Abstract: The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.

Abstract translation: 本公开提出了一种具有对称构造并包括两对电极的排放腔的流动引导装置; 流动引导装置包括分别对应于一对两对电极的两个转子，其安装位置分别关于放电腔的对称平面对称，并且在电极的下方，其旋转轴线平行于 电极的轴向方向平行于排出腔的底面，并且两个转子具有相反的旋转方向和相同的转速。 导流装置还包括扰流板和导流板，使得当流过放电区域时，排出气体流以高速和均匀的循环方式通过排出腔。 因此，保证放电质量，以提高激光器的能量和可靠性。