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公开(公告)号：US20180212397A1
公开(公告)日：2018-07-26
申请号：US15746730
申请日：2015-07-22
Inventor： Yu WANG , Yi ZHOU , Xingliang SONG , Pengfei SHA , Yuanyuan FAN , Jiangshan ZHAO , Haiyan SHI , Hui LI , Jinbin DING , Yaoying SHAN , Qian WANG , Qianwei CAI , Zhuojun PENG
CPC classification number: H01S3/2308 , H01S3/005 , H01S3/0057 , H01S3/0071 , H01S3/034 , H01S3/038 , H01S3/076 , H01S3/0816 , H01S3/0835 , H01S3/1127 , H01S3/225 , H01S3/23 , H01S3/235
Abstract: The present disclosure provides an excimer laser system. A master oscillator chamber may generate laser pulses with a narrowed line width and a small energy by means of a line width narrowing module, as a seed light. The seed light is refracted by a master oscillator wavefront engineering box and then incident into a power amplifier chamber through a beam splitting system. The beam splitting system, a first high reflectance mirror, a second high reflectance mirror and a third high reflectance mirror may constitute a quadrilateral annular optical path, The power amplifier chamber may have a first pair of Brewster windows and a second pair of Brewster windows, wherein the first pair of Brewster windows is located in a first optical path of the annular optical path along with a discharging electrode of the power amplifier chamber, and the second pair of Brewster windows is located in a second optical path of annular optical path which is parallel to a first amplification optical path. The present disclosure reduces the length of a ring cavity of an excimer laser system with a ring cavity structure, increasing the amplification times and achieving a deeper gain saturation amplification than a traditional structure, thereby improving the output characteristic of the excimer laser system.
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公开(公告)号：US20150372443A1
公开(公告)日：2015-12-24
申请号：US14652223
申请日：2012-12-20
Inventor： Yi ZHOU , Yaoying SHAN , Yuanyuan FAN , Xingliang SONG , Lijia ZHANG , Huirong CUI , Yu WANG
CPC classification number: H01S3/08004 , H01S3/08 , H01S3/08009 , H01S3/08036 , H01S3/082 , H01S3/10 , H01S3/225
Abstract: Disclosed is an excimer laser composite cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module. The laser discharge cavity contains work gas for generating laser when it is activated by an excitation source. The laser discharge cavity, the laser output module, and the line-width narrowing module constitute a line-width narrowing cavity configured to narrow down a line-width of the laser generated by the work gas. The laser discharge cavity, the laser output module, and the laser amplification module constitute an amplification cavity configured to amplify power of the laser with the line-width having been narrowed down by the line-width narrowing cavity.
Abstract translation: 公开了一种准分子激光复合腔，包括激光放电腔，激光输出模块，线宽窄化模块和激光放大模块。 激光放电腔包含用于在激发源激活时产生激光的工作气体。 激光放电腔，激光输出模块和线宽变窄模块构成了一个线宽缩窄腔，其被配置为缩小由工作气体产生的激光的线宽。 激光放电腔，激光输出模块和激光放大模块构成放大腔，该放大腔被配置为放大线宽度被线宽变窄腔缩小的激光功率。
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公开(公告)号：US20190390323A1
公开(公告)日：2019-12-26
申请号：US16479123
申请日：2017-12-15
Inventor： Xiaobin WU , Yan LUO , Yu WANG , Kuibo WANG , Wanlu XIE , Luosha ZHANG , Lijia ZHANG
Abstract: A preparation device has a chamber, molten metal containers, a rotatable base in the chamber and having a deposition substrate, laser sets generating a dual-pulse laser, a base controller and a data collection control unit. The containers communicate with the chamber and each has a pulse pressurization apparatus pressing the molten metal into the chamber. The laser sets correspond to the containers such that beams of an emitted dual-pulse laser bombard the pulsed droplets, plasmas are generated and are sputtered and deposited on the substrate forming a multi-element alloy thin film. The unit collects base temperature and displacement information, and controls the pressurization frequency of the pulse pressurization apparatus, and the emission frequency and energy of the dual-pulse laser of the laser sets controlling the frequency and energy of the dual-pulse laser bombarding the corresponding pulsed droplets. The base controller controls the base temperature, rotation and movement.
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4.发明申请FLOW GUIDE DEVICE FOR DUAL-ELECTRODE DISCHARGE CAVITY, DUAL ELECTRODE DISCHARGE CAVITY UTILIZE THE SAME AND EXCIMER LASER 有权用于双电极放电孔，双电极放电孔的流动导向装置利用相同的激光器和激光器公开(公告)号：US20150333468A1
公开(公告)日：2015-11-19
申请号：US14646176
申请日：2013-02-07
Inventor： Bin LIU , Jinbin DING , Kuibo WANG , Yu WANG , Yi ZHOU , Jiangshan ZHAO
CPC classification number: H01S3/036 , H01S3/03 , H01S3/038 , H01S3/076 , H01S3/097 , H01S3/0971 , H01S3/225 , H01S3/2308
Abstract: The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.
Abstract translation: 本公开提出了一种具有对称构造并包括两对电极的排放腔的流动引导装置; 流动引导装置包括分别对应于一对两对电极的两个转子，其安装位置分别关于放电腔的对称平面对称，并且在电极的下方，其旋转轴线平行于 电极的轴向方向平行于排出腔的底面，并且两个转子具有相反的旋转方向和相同的转速。 导流装置还包括扰流板和导流板，使得当流过放电区域时，排出气体流以高速和均匀的循环方式通过排出腔。 因此，保证放电质量，以提高激光器的能量和可靠性。
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