公开(公告)号：US20240222161A1

公开(公告)日：2024-07-04

申请号：US18387117

申请日：2023-11-06

Applicant: ADRC. CO. KR

Inventor： Jun Hyuk CHEON ,  Seongbok Kang ,  Jin-han Park

IPC: H01L21/67 ,  H01L21/268 ,  H01S5/02251 ,  H01S5/02253 ,  H01S5/02255 ,  H01S5/40

CPC classification number: H01L21/67115 ,  H01L21/268 ,  H01S5/02251 ,  H01S5/02253 ,  H01S5/02255 ,  H01S5/4025

Abstract: The present disclosure relates to blue laser annealing equipment and an annealing manufacturing process using the same. The blue laser annealing equipment includes at least one blue laser diode controller including at least one output fiber; at least one light path module connected to an output fiber of the blue laser diode controller to process light emitted from the output fiber and direct the light to a substrate and perform a dehydrogenation process or a crystallization process on a silicon layer applied to the substrate; and a stage capable of relative motion with respect to the light path module and loading the substrate so that the dehydrogenation process and the crystallization process are performed on a surface of the substrate with respect to the light path module.