FABRICATING ACTIVE-BRIDGE-COUPLED GPU CHIPLETS

    公开(公告)号:US20210098419A1

    公开(公告)日:2021-04-01

    申请号:US16585480

    申请日:2019-09-27

    IPC分类号: H01L23/00 H01L25/065 G06F8/41

    摘要: Various multi-die arrangements and methods of manufacturing the same are disclosed. In some embodiments, a method of manufacture includes a face-to-face process in which a first GPU chiplet and a second GPU chiplet are bonded to a temporary carrier wafer. A face surface of an active bridge chiplet is bonded to a face surface of the first and second GPU chiplets before mounting the GPU chiplets to a carrier substrate. In other embodiments, a method of manufacture includes a face-to-back process in which a face surface of an active bridge chiplet is bonded to a back surface of the first and second GPU chiplets.