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公开(公告)号：US20240160096A1
公开(公告)日：2024-05-16
申请号：US18420846
申请日：2024-01-24
Applicant: AGC Inc.
Inventor： Yuya NAGATA , Daijiro AKAGI , Kenichi SASAKI , Hiroaki IWAOKA
Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The substrate, the multilayer reflective film, the protection film, and the phase shift film are arranged in this order. The phase shift film is made of an Ir-based material containing Ir as a main component, and the protection film is made of a Rh-based material containing Rh as a main component.
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公开(公告)号：US20240152044A1
公开(公告)日：2024-05-09
申请号：US18411376
申请日：2024-01-12
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Hiroaki IWAOKA , Shunya TAKI , Kenichi SASAKI , Ichiro ISHIKAWA , Toshiyuki UNO
IPC: G03F1/24
CPC classification number: G03F1/24
Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a phase shift film that shifts a phase of the EUV light, in this order. An opening pattern is to be formed in the phase shift film. The phase shift film has a refractive index of 0.920 or less with respect to the EUV light, an extinction coefficient of 0.024 or more with respect to the EUV light, a thickness of 50 nm or less, a normalized image log slope of 2.9 or more for a transferred image when a line-and-space pattern is formed on a target substrate, and a tolerance range of a focal depth of the transferred image is 60 nm or less.
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公开(公告)号：US20240295807A1
公开(公告)日：2024-09-05
申请号：US18649410
申请日：2024-04-29
Applicant: AGC Inc.
Inventor： Yuya NAGATA , Daijiro AKAGI , Kenichi SASAKI , Hiroaki IWAOKA
Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The phase shift film contains Ir as a main component. A ratio of a maximum value of an intensity of a peak of diffracted light from the phase shift film in a 2θ range of 35° to 45° to an average value of an intensity of the diffracted light in a 2θ range of 55° to 60° measured using an XRD method with a CuKα ray, upon being irradiated with the EUV light with an incident angle of θ, is 1.0 or more and 30 or less. A refractive index and an extinction coefficient of the phase shift film to the EUV light are 0.925 or less, and 0.030 or more, respectively.
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公开(公告)号：US20240176224A1
公开(公告)日：2024-05-30
申请号：US18394787
申请日：2023-12-22
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Shunya TAKI , Takuma KATO , Ichiro ISHIKAWA , Kenichi SASAKI
Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light, the substrate, the multilayer reflective film, the protection film, and the phase shift film being arranged in this order.
The phase shift film contains at least one first element X1 selected from the first group consisting of ruthenium (Ru), iridium (Ir), platinum (Pt), palladium (Pd), and gold (Au), and at least one second element X2 selected from the second group consisting of oxygen (O), boron (B), carbon (C), and nitrogen (N). In the phase shift film, a chemical shift of a peak of 3d5/2 or a peak of 4f7/2 of the first element X1 observed by X-ray electron spectroscopy is less than 0.3 eV.-
5.发明公开公开(公告)号：US20230288794A1
公开(公告)日：2023-09-14
申请号：US18321913
申请日：2023-05-23
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Hirotomo KAWAHARA , Kenichi SASAKI , Ichiro ISHIKAWA , Toshiyuki UNO
Abstract: A reflective mask blank for EUV lithography, includes, in the following order, a substrate, a multilayer reflective film reflecting EUV light, a protective film for the multilayer reflective film, and an absorption layer absorbing EUV light, in which the protective film includes rhodium (Rh) or a rhodium material including Rh and at least one element selected from the group consisting of nitrogen (N), oxygen (O), carbon (C), boron (B), ruthenium (Ru), niobium (Nb), molybdenum (Mo), tantalum (Ta), iridium (Ir), palladium (Pd), zirconium (Zr), and titanium (Ti).
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Patent Agency Ranking
公开(公告)号：US20220035234A1
公开(公告)日：2022-02-03
申请号：US17382755
申请日：2021-07-22
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Hirotomo KAWAHARA , Toshiyuki UNO , Ichiro ISHIKAWA , Kenichi SASAKI
IPC: G03F1/24 , G03F1/32 , H01L21/033
Abstract: A reflective mask blank for EUV lithography includes: a substrate; a multilayer reflective film for reflecting EUV light; and a phase shift film for shifting a phase of EUV light, the multilayer reflective film and the phase shift film formed on or above the substrate in this order. The phase shift film includes a layer 1 including ruthenium (Ru) and at least one selected from the group consisting of oxygen (O) and nitrogen (N). Among diffraction peaks derived from the phase shift film observed at 2θ: from 20° to 50° by out-of-plane XRD method, a peak having the highest intensity has a half value width FWHM of 1.0° or more.
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公开(公告)号：US20250155792A1
公开(公告)日：2025-05-15
申请号：US19022508
申请日：2025-01-15
Applicant: AGC Inc.
Inventor： Yuya NAGATA , Daijiro AKAGI , Kenichi SASAKI , Hiroaki IWAOKA
Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light. The substrate, the multilayer reflective film, the protection film, and the phase shift film are arranged in this order. The phase shift film is made of an Ir-based material containing Ir as a main component, and the protection film is made of a Rh-based material containing Rh as a main component.
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公开(公告)号：US20240427227A1
公开(公告)日：2024-12-26
申请号：US18823099
申请日：2024-09-03
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Hiroaki IWAOKA , Wataru NISHIDA , Ichiro ISHIKAWA , Kenichi SASAKI
IPC: G03F1/24
Abstract: A reflective mask blank for EUV lithography includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light. The substrate, the multilayer reflective film, the protection film, and the absorption film are arranged in this order from bottom to top. The protection film includes an upper layer made of a rhodium-based material containing Rh as a main component that contains only Rh, or contains Rh and at least one element selected from a group consisting of N, O, C, B, Ru, Nb, Mo, Ta, Ir, Pd, Zr, and Ti; and a lower layer satisfying a condition k
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公开(公告)号：US20240272541A1
公开(公告)日：2024-08-15
申请号：US18444020
申请日：2024-02-16
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Hiroaki IWAOKA , Wataru NISHIDA , Ichiro ISHIKAWA , Kenichi SASAKI
IPC: G03F1/24
CPC classification number: G03F1/24
Abstract: A reflective mask blank for EUV lithography includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light. The substrate, the multilayer reflective film, the protection film, and the absorption film are arranged in this order from bottom to top. The protection film includes an upper layer made of a rhodium-based material containing Rh as a main component that contains only Rh, or contains Rh and at least one element selected from a group consisting of N, O, C, B, Ru, Nb, Mo, Ta, Ir, Pd, Zr, and Ti; and a lower layer satisfying a condition
k-
10.发明公开公开(公告)号：US20230350285A1
公开(公告)日：2023-11-02
申请号：US18346563
申请日：2023-07-03
Applicant: AGC Inc.
Inventor： Daijiro AKAGI , Shunya TAKI , Takuma KATO , Ichiro ISHIKAWA , Kenichi SASAKI
Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and a phase shift film that shifts a phase of the EUV light, the substrate, the multilayer reflective film, the protection film, and the phase shift film being arranged in this order. The phase shift film contains at least one first element X1 selected from the first group consisting of ruthenium (Ru), iridium (Ir), platinum (Pt), palladium (Pd), and gold (Au), and at least one second element X2 selected from the second group consisting of oxygen (O), boron (B), carbon (C), and nitrogen (N). In the phase shift film, a chemical shift of a peak of 3d5/2 or a peak of 4f7/2 of the first element X1 observed by X-ray electron spectroscopy is less than 0.3 eV.
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