Method of surface interference microscopy
    3.
    发明授权
    Method of surface interference microscopy 失效
    表面干扰微观方法

    公开(公告)号:US3620593A

    公开(公告)日:1971-11-16

    申请号:US3620593D

    申请日:1970-02-02

    CPC classification number: G02B21/14

    Abstract: An incident beam of natural light is divided into two beams of linear polarized light, their polarizations being mutually perpendicular. One beam is directed to a specimen surface and the other to a reference surface. Upon reflection from their respective surfaces, the beams are recombined and analyzed. The resultant of this recombined beam is a linear polarized beam having a certain orientation which is a function of the difference in optical path of the two beams. This optical path difference relates to the magnitude of imperfections of the specimen surface under observation.

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