公开(公告)号：US20120073377A1

公开(公告)日：2012-03-29

申请号：US13312381

申请日：2011-12-06

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L23/00

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

摘要翻译： 一种换能器，其包括通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动的过滤器组件。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获几psi的数量级的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以消除传感器前部存在的静压，同时消除动态压力。

公开(公告)号：US08074521B2

公开(公告)日：2011-12-13

申请号：US12614741

申请日：2009-11-09

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L13/02

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A filter assembly for use with a static-dynamic piezoresistive pressure transducer that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly is disclosed. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi or less. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while keeping dynamic pressure from reaching the back of the sensor. In this manner, the filter assembly enables the transducer to accurately read dynamic pressure in the presence of high static pressure without rupturing the thin diaphragm of the dynamic pressure sensor.

摘要翻译： 公开了一种与静态压阻式压力传感器一起使用的过滤器组件，其通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获小于或等于几psi的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以抵消存在于传感器前部的静压力，同时保持动态压力不到达传感器的后部。 以这种方式，过滤器组件使得换能器能够在存在高静态压力的情况下准确地读取动态压力而不破坏动态压力传感器的薄膜。

公开(公告)号：US08307713B2

公开(公告)日：2012-11-13

申请号：US12938141

申请日：2010-11-02

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US20100139408A1

公开(公告)日：2010-06-10

申请号：US11716138

申请日：2007-03-09

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L13/02

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频和低频静压泵，其一端具有高频低动态压力，滤波器操作以过滤所述高频动压，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，并且可以衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US20110061467A1

公开(公告)日：2011-03-17

申请号：US12938141

申请日：2010-11-02

申请人： ANTHONY D. KURTZ ,  Tonghuo Shang ,  Boaz Kochman

发明人： ANTHONY D. KURTZ ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L9/06

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US07823455B2

公开(公告)日：2010-11-02

申请号：US11716138

申请日：2007-03-09

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

公开(公告)号：US07188528B2

公开(公告)日：2007-03-13

申请号：US11100652

申请日：2005-04-07

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/00

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频和低频静压泵，其一端具有高频低动态压力，滤波器操作以过滤所述高频动压，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US20050235754A1

公开(公告)日：2005-10-27

申请号：US11100652

申请日：2005-04-07

申请人： Anthony Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08 ,  G01L13/02 ,  G01L19/06

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一滤芯端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US08613224B2

公开(公告)日：2013-12-24

申请号：US13312381

申请日：2011-12-06

申请人： Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L13/02

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

摘要翻译： 一种换能器，其包括通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动的过滤器组件。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获几psi的数量级的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以消除传感器前部存在的静压，同时消除动态压力。

公开(公告)号：US20100175482A1

公开(公告)日：2010-07-15

申请号：US12719789

申请日：2010-03-08

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Tonghuo Shang ,  Adam Hurst

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Tonghuo Shang ,  Adam Hurst

IPC分类号： G01L9/06 ,  H04R31/00

CPC分类号： G01L19/0609 ,  G01L19/0681 ,  Y10T29/49005 ,  Y10T29/49007

摘要： It is an objective of the present invention to provide a pressure transducer assembly for measuring pressures in high temperature environments that employs an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter has a plurality of apertures extending from one end to the other end, each aperture is of a small diameter as compared to the diameter of the transducer and the damper operates to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation.

摘要翻译： 本发明的目的是提供一种用于测量在高温环境中的压力的​​压力传感器组件，该压力传感器组件采用在一端由声学微滤器端接的细长管。 微滤器具有从一端延伸到另一端的多个孔，与换能器的直径相比，每个孔具有小的直径，并且阻尼器用于吸收以有限的或不反射的方式撞击在其上的声波。 为了改善声波的吸收，细长管可以是锥形的和/或安装到支撑块上并进一步卷曲以减小装置的整体尺寸和质量。 具有隔膜齐平的压力传感器可以安装到细长管并延伸到管的内壁。 热气体通过细长管传播，其相应的压力由传感器测量。 声学滤波器用于吸收由热气体产生的声波，因此能够使压力传感器主要响应于与燃气轮机操作相关联的高频波。