公开(公告)号：US20120073377A1

公开(公告)日：2012-03-29

申请号：US13312381

申请日：2011-12-06

申请人： Anthony D. Kurtz ,  Nora Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Nora Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L23/00

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

摘要翻译： 一种换能器，其包括通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动的过滤器组件。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获几psi的数量级的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以消除传感器前部存在的静压，同时消除动态压力。

公开(公告)号：US08074521B2

公开(公告)日：2011-12-13

申请号：US12614741

申请日：2009-11-09

申请人： Anthony D. Kurtz ,  Nora Kurtz, legal representative ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L13/02

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A filter assembly for use with a static-dynamic piezoresistive pressure transducer that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly is disclosed. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi or less. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while keeping dynamic pressure from reaching the back of the sensor. In this manner, the filter assembly enables the transducer to accurately read dynamic pressure in the presence of high static pressure without rupturing the thin diaphragm of the dynamic pressure sensor.

摘要翻译： 公开了一种与静态压阻式压力传感器一起使用的过滤器组件，其通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获小于或等于几psi的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以抵消存在于传感器前部的静压力，同时保持动态压力不到达传感器的后部。 以这种方式，过滤器组件使得换能器能够在存在高静态压力的情况下准确地读取动态压力而不破坏动态压力传感器的薄膜。

公开(公告)号：US08613224B2

公开(公告)日：2013-12-24

申请号：US13312381

申请日：2011-12-06

申请人： Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Adam Hurst ,  Tonghuo Shang

IPC分类号： G01L13/02

CPC分类号： G01L19/00 ,  G01L9/0052 ,  G01L15/00 ,  G01L19/0609

摘要： A transducer comprising a filter assembly that measures low amplitude, dynamic pressure perturbations superimposed on top of a high static pressure through the implementation of a low-pass mechanical filter assembly. The filter assembly may comprise a dual lumen reference tube and a removable filter subassembly further comprising a porous metal filter and narrow diameter tube. The transducer, which may be capable of operating at ultra-high temperatures and in harsh environments, may comprise of a static piezoresistive pressure sensor, which measures the large pressures on the order of 200 psi and greater, and an ultrasensitive, dynamic piezoresistive pressure sensor which may capture small, high frequency pressure oscillations on the order of a few psi. The filter assembly may transmit static pressure to the back of the dynamic pressure sensor to cancel out the static pressure present at the front of the sensor while removing dynamic pressure.

摘要翻译： 一种换能器，其包括通过实施低通机械过滤器组件来测量叠加在高静态压力之上的低振幅动态压力扰动的过滤器组件。 过滤器组件可以包括双腔参考管和可移除的过滤器子组件，其还包括多孔金属过滤器和窄直径管。 可以在超高温和恶劣环境下工作的换能器可以包括静压压力传感器，该压力传感器测量大约200psi和更大的压力，以及超灵敏的压阻压力传感器 这可以捕获几psi的数量级的小的高频压力振荡。 过滤器组件可以将静压传递到动态压力传感器的背面，以消除传感器前部存在的静压，同时消除动态压力。

公开(公告)号：US20050235754A1

公开(公告)日：2005-10-27

申请号：US11100652

申请日：2005-04-07

申请人： Anthony Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08 ,  G01L13/02 ,  G01L19/06

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一滤芯端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US08307713B2

公开(公告)日：2012-11-13

申请号：US12938141

申请日：2010-11-02

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US20100139408A1

公开(公告)日：2010-06-10

申请号：US11716138

申请日：2007-03-09

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L13/02

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频和低频静压泵，其一端具有高频低动态压力，滤波器操作以过滤所述高频动压，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，并且可以衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US20110061467A1

公开(公告)日：2011-03-17

申请号：US12938141

申请日：2010-11-02

申请人： ANTHONY D. KURTZ ,  Tonghuo Shang ,  Boaz Kochman

发明人： ANTHONY D. KURTZ ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L9/06

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频，低频静压泵，其一端具有高频低动态压力，滤波器用于过滤所述高频动态压力，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US07823455B2

公开(公告)日：2010-11-02

申请号：US11716138

申请日：2007-03-09

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/08

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

公开(公告)号：US07188528B2

公开(公告)日：2007-03-13

申请号：US11100652

申请日：2005-04-07

申请人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

发明人： Anthony D. Kurtz ,  Tonghuo Shang ,  Boaz Kochman

IPC分类号： G01L7/00

CPC分类号： G01L7/08 ,  G01L9/06 ,  G01L13/025 ,  G01L19/0609

摘要： A semiconductor filter is provided to operate in conjunction with a differential pressure transducer. The filter receives a high and very low frequency static pressure attendant with a high frequency low dynamic pressure at one end, the filter operates to filter said high frequency dynamic pressure to provide only the static pressure at the other filter end. A differential transducer receives both dynamic and static pressure at one input port and receives said filtered static pressure at the other port where said transducer provides an output solely indicative of dynamic pressure. The filter in one embodiment has a series of etched channels directed from an input end to an output end. The channels are etched pores of extremely small diameter and operate to attenuate or filter the dynamic pressure. In another embodiment, a spiral tubular groove is found between a silicon wafer and a glass cover wafer, an input port of the groove receives both the static and dynamic pressure with an output port of the groove providing only static pressure. The groove filters attenuate dynamic pressure to enable the differential transducer to provide an output only indicative of dynamic pressure by cancellation of the static pressure.

摘要翻译： 提供半导体滤波器以与差压传感器一起操作。 过滤器在一端接收高频和低频静压泵，其一端具有高频低动态压力，滤波器操作以过滤所述高频动压，仅提供另一过滤端的静压力。 差分换能器在一个输入端口处接收动态和静态压力，并且在另一端口处接收所述过滤的静态压力，其中所述换能器提供仅指示动态压力的输出。 一个实施例中的滤波器具有从输入端指向输出端的一系列蚀刻通道。 通道是非常小直径的蚀刻孔，用于衰减或过滤动态压力。 在另一个实施例中，在硅晶片和玻璃盖晶片之间发现螺旋管状沟槽，槽的输入端口接收静态压力和动态压力，而槽的输出端口仅提供静态压力。 沟槽滤波器衰减动态压力，使得差分换能器仅通过消除静压来提供仅指示动态压力的输出。

公开(公告)号：US08463084B2

公开(公告)日：2013-06-11

申请号：US12774971

申请日：2010-05-06

申请人： Boaz Kochman ,  Joseph VanDeWeert ,  Nora Kurtz

发明人： Anthony D. Kurtz ,  Boaz Kochman ,  Joseph VanDeWeert

IPC分类号： G02B6/00

CPC分类号： G01L9/0079 ,  G02B6/136 ,  G02B2006/12138 ,  G02B2006/12159 ,  Y10T29/49826

摘要： It is an objective of the present invention to provide a highly sensitive optical pressure sensor that uses a Mach-Zehnder Interferometer to measure pressure. The pressure sensor comprises a deflectable diaphragm including a substantially central boss and channel and an optical waveguide having a first arm and a second arm, wherein the first arm is substantially aligned with an edge of the boss and the second arm is substantially aligned with an edge of the channel, and further wherein the first and second arms contain a periodic array of etched holes to improve the overall sensitivity of the pressure sensor. The pressure sensor further comprises a light source coupled to the optical waveguide for introducing light to the waveguide and a light detector coupled to the waveguide for detecting changes in the intensity of light. The change in light intensity is then correlated to an applied pressure.

摘要翻译： 本发明的目的是提供使用马赫 - 曾德干涉仪来测量压力的高灵敏度光学压力传感器。 压力传感器包括可偏转膜片，其包括基本上中心的凸台和通道以及具有第一臂和第二臂的光波导，其中第一臂基本上与凸台的边缘对齐，并且第二臂基本上与边缘 并且其中所述第一和第二臂包含蚀刻孔的周期性阵列以改善所述压力传感器的总体灵敏度。 压力传感器还包括耦合到光波导以将光引入波导的光源和耦合到波导的光检测器，用于检测光强度的变化。 然后将光强度的变化与施加的压力相关。