公开(公告)号：US20170244006A1

公开(公告)日：2017-08-24

申请号：US15506133

申请日：2015-09-01

申请人： APPLIED MATERIALS, INC.

发明人： BRIAN H. BURROWS ,  NILESH BAGUL ,  SUMEDH ACHARYA ,  BAHUBALI UPADHYE ,  LANCE A. SCUDDER ,  ROGER N. ANDERSON

IPC分类号： H01L31/18 ,  H01L21/673 ,  C23C16/54 ,  C23C16/458 ,  C23C16/455 ,  H01L21/67 ,  C23C16/44

CPC分类号： H01L31/1876 ,  C23C16/4408 ,  C23C16/45519 ,  C23C16/45523 ,  C23C16/4585 ,  C23C16/4586 ,  C23C16/4587 ,  C23C16/481 ,  C23C16/54 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/67326 ,  H01L21/6773 ,  H01L31/18 ,  Y02E10/50 ,  Y02P70/521

摘要： In some embodiments, an inline substrate processing tool may include a substrate carrier having a plurality of slots configured to retain a plurality of substrates parallel to each other when disposed in the slots, a first substrate processing module and a second substrate processing module disposed in a linear arrangement, wherein each substrate processing module includes an enclosure and a track that supports the substrate carrier and provides a path for the substrate carrier to move linearly through the first and second substrate processing modules, and a first gas cap disposed between the first and second substrate processing modules, wherein the first gas cap includes a first process gas conduit to provide a first process gas to the first substrate processing module, and a second process gas conduit to provide a second process gas to the second substrate processing module.