公开(公告)号：US20250092491A1

公开(公告)日：2025-03-20

申请号：US18370534

申请日：2023-09-20

Applicant: APPLIED MATERIALS, INC.

Inventor： Chien-Min Liao ,  Chao Liu ,  Tom Cho ,  Hyeon Geu Kim ,  Andrew Nguyen ,  Hari Ponnekanti ,  Mingdong Li ,  Changgong Wang ,  Bruce Alger

IPC: C22C21/06 ,  B22F1/16 ,  B22F1/17 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687

Abstract: Described herein is a chamber component having a body comprising one or more aluminum alloy compositions. A surface of the chamber component has an aluminum alloy composition comprising aluminum (Al), wherein the Al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (Mg), wherein the Mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. The aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.