公开(公告)号：US11450514B1

公开(公告)日：2022-09-20

申请号：US17203786

申请日：2021-03-17

Applicant: Applied Materials, Inc.

Inventor： Wei Dou ,  Yong Cao ,  Mingdong Li ,  Shane Lavan ,  Jothilingam Ramalingam ,  Chengyu Liu

IPC: C23C14/14 ,  H01J37/32 ,  C23C14/34 ,  C23C14/54 ,  C23C14/06

Abstract: Embodiments of methods and apparatus for reducing particle formation in physical vapor deposition (PVD) chambers are provided herein. In some embodiments, a method of reducing particle formation in a PVD chamber includes: performing a plurality of first deposition processes on a corresponding series of substrates disposed on a substrate support in the PVD chamber, wherein the PVD chamber includes a cover ring disposed about the substrate support and having a texturized outer surface, and wherein a silicon nitride (SiN) layer having a first thickness is deposited onto the texturized outer surface during each of the plurality of first deposition processes; and performing a second deposition process on the cover ring between subsets of the plurality of first deposition processes to deposit an amorphous silicon layer having a second thickness onto an underlying silicon nitride (SiN) layer.

公开(公告)号：USD1072774S1

公开(公告)日：2025-04-29

申请号：US29769610

申请日：2021-02-06

Applicant: Applied Materials, Inc.

Designer： Shane Lavan ,  Madan Kumar Shimoga Mylarappa ,  Sundarapandian Ramalinga Vijayalakshmi Reddy ,  Avinash Nayak ,  Wei Dou ,  Yong Cao ,  Kirankumar Neelasandra Savandaiah ,  Mingdong Li

公开(公告)号：US20250092491A1

公开(公告)日：2025-03-20

申请号：US18370534

申请日：2023-09-20

Applicant: APPLIED MATERIALS, INC.

Inventor： Chien-Min Liao ,  Chao Liu ,  Tom Cho ,  Hyeon Geu Kim ,  Andrew Nguyen ,  Hari Ponnekanti ,  Mingdong Li ,  Changgong Wang ,  Bruce Alger

IPC: C22C21/06 ,  B22F1/16 ,  B22F1/17 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687

Abstract: Described herein is a chamber component having a body comprising one or more aluminum alloy compositions. A surface of the chamber component has an aluminum alloy composition comprising aluminum (Al), wherein the Al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (Mg), wherein the Mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. The aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.