公开(公告)号：US11898245B2

公开(公告)日：2024-02-13

申请号：US17187218

申请日：2021-02-26

Applicant: Applied Materials, Inc.

Inventor： Chien-Min Liao ,  Chi-Feng Liu ,  Yi Nung Wu ,  Hsiu Yang ,  Yixing Lin ,  Boon Sen Chan ,  Siamak Salimian

IPC: C23C16/44 ,  C23C16/455 ,  H05B1/02

CPC classification number: C23C16/4405 ,  C23C16/4412 ,  C23C16/45565 ,  H05B1/0233

Abstract: Methods and apparatus for a baking chamber for processing a chamber component are provided herein. In some embodiments, a baking chamber includes: an enclosure defining a first chamber, wherein the first chamber comprises: a first chamber body having a first floor and first sidewalls that couple the first floor to a first lid of the first chamber body to define a first interior volume; a first support disposed in the first interior volume; a first gas line disposed in the first interior volume proximate the first lid; a first showerhead disposed between the first gas line and the first support; a first exhaust coupled to the first floor; and a first heater disposed in the first interior volume between the first support and the first floor; and wherein the enclosure includes a door configured to facilitate transferring the chamber component into and out of the enclosure.

公开(公告)号：US20250092491A1

公开(公告)日：2025-03-20

申请号：US18370534

申请日：2023-09-20

Applicant: APPLIED MATERIALS, INC.

Inventor： Chien-Min Liao ,  Chao Liu ,  Tom Cho ,  Hyeon Geu Kim ,  Andrew Nguyen ,  Hari Ponnekanti ,  Mingdong Li ,  Changgong Wang ,  Bruce Alger

IPC: C22C21/06 ,  B22F1/16 ,  B22F1/17 ,  H01J37/32 ,  H01L21/683 ,  H01L21/687

Abstract: Described herein is a chamber component having a body comprising one or more aluminum alloy compositions. A surface of the chamber component has an aluminum alloy composition comprising aluminum (Al), wherein the Al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (Mg), wherein the Mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. The aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.

公开(公告)号：US11856706B2

公开(公告)日：2023-12-26

申请号：US16702031

申请日：2019-12-03

Applicant: Applied Materials, Inc.

Inventor： Hsui Yang ,  Yao-Hung Yang ,  Jeevan Shanbhag ,  Chien-Min Liao ,  Earl Hunter ,  David Ganon ,  Mariana Luigi ,  Siamak Salimian ,  Tom K. Cho ,  Chun-Chung Chen

IPC: H05K13/08 ,  H01L21/67

CPC classification number: H05K13/087 ,  H01L21/67276 ,  H01L21/67294

Abstract: The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.

公开(公告)号：US11532466B2

公开(公告)日：2022-12-20

申请号：US16933922

申请日：2020-07-20

Applicant: Applied Materials, Inc.

Inventor： Chien-Min Liao ,  Yao-Hung Yang ,  Tom K. Cho ,  Siamak Salimian ,  Hsiu Yang ,  Chun-Chung Chen

IPC: H01J37/32

Abstract: Certain embodiments provide a method and non-transitory computer readable medium having instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.

公开(公告)号：US11359722B2

公开(公告)日：2022-06-14

申请号：US16517299

申请日：2019-07-19

Applicant: Applied Materials, Inc.

Inventor： Shagun P. Maheshwari ,  Yao-Hung Yang ,  King F. Lee ,  Andrew Yu ,  Aniruddha Pal ,  Tom K. Cho ,  Chien-Min Liao

IPC: F16J15/02

Abstract: A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.

公开(公告)号：US11074426B1

公开(公告)日：2021-07-27

申请号：US16887892

申请日：2020-05-29

Applicant: Applied Materials, Inc.

Inventor： Chien-Min Liao ,  Yao-Hung Yang ,  Hsiu Yang ,  Jeevan Shanbhag ,  Chun-Chung Chen ,  Tom K. Cho

IPC: G06K7/14 ,  G06Q10/08 ,  H04L9/06

Abstract: The present disclosure relates to systems and methods for semiconductor tool part tracking and kit verification. Data relating to part identification and performance are encoded to a unique code that is encoded into machine-readable form, such as a data matrix. A multi-dimensional array (MDA) of the data matrices of a group of parts is a ‘golden MDA’. When assembled into a kit, the parts are scanned and compared to the golden MDA. If there's a match, a kit unique code is used to generate a kit data matrix. The part data matrix codes are provided to a database to determine if a part combination will cause a coupling effect, based on part usage history.