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公开(公告)号:US20240068086A1
公开(公告)日:2024-02-29
申请号:US18074363
申请日:2022-12-02
Applicant: Applied Materials, Inc.
Inventor: Sundarapandian Ramalinga Vijayalakshmi REDDY , Kirankumar Neelasandra SAVANDAIAH , Junqi WEI , Bridger Earl HOERNER , Kelvin Tai Ming BOH , Madan Kumar SHIMOGA MYLARAPPA
IPC: C23C14/34
CPC classification number: C23C14/3414
Abstract: Target assemblies for PVD chambers are provided herein. In some embodiments, a target assembly for a PVD chamber includes: a backing plate; and a target coupled to the backing plate and having a substrate facing surface opposite the backing plate, wherein a peripheral portion of the target includes an angled surface extending radially outward and toward the backing plate, wherein an annular portion of the angled surface has a surface roughness greater than a surface roughness of a remainder of the substrate facing surface of the target.
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公开(公告)号:US20210335582A1
公开(公告)日:2021-10-28
申请号:US16857828
申请日:2020-04-24
Applicant: APPLIED MATERIALS, INC.
Inventor: Yueh Sheng OW , Yuichi WADA , Junqi WEI , Kang ZHANG , Ananthkrishna JUPUDI , Sarath BABU , Kok Seong TEO , Kok Wei TAN
Abstract: Apparatus and methods use a unique process kit to protect a processing volume of a process chamber. The process kit includes a shield with a frame configured to be insertable into a shield and a foil liner composed of a metallic material that is attachable to the frame at specific points. The specific attachment points are spaced apart to produce an amount of flexibility based on a malleability of the metallic material. The amount of flexibility ranges from approximately 2.5 to approximately 4.5.
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公开(公告)号:US20240395514A1
公开(公告)日:2024-11-28
申请号:US18202335
申请日:2023-05-26
Applicant: Applied Materials, Inc.
Inventor: Prashant AGARWAL , Junqi WEI , Ananthkrishna JUPUDI , Clinton GOH , Tuck Foong KOH , Kai Liang LIEW
IPC: H01J37/32 , C23C14/02 , C23C14/34 , C23C14/54 , C23C14/56 , C23C14/58 , H01L21/324 , H01L21/67 , H05B6/80
Abstract: Embodiments of multi-chamber processing tools are provided herein. In some embodiments, a multi-chamber processing tool includes: a factory interface configured to receive a substrate; a pre-heat chamber directly coupled to the factory interface; a load lock chamber coupled to the factory interface and having a first slit valve disposed therebetween, wherein the load lock chamber is coupled to a pump configured to create a vacuum environment when the first slit valve is in a closed position; a degas chamber coupled to the factory interface and having a second slit valve, wherein the degas chamber is coupled to a second pump configured to create a vacuum environment when the second slit valve is in a closed position, and wherein the degas chamber includes a heat source; one or more process chambers; and a transfer chamber coupled to the load lock chamber, the degas chamber, and the one or more process chambers.
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公开(公告)号:US20210335581A1
公开(公告)日:2021-10-28
申请号:US16855559
申请日:2020-04-22
Applicant: APPLIED MATERIALS, INC.
Inventor: Sarath BABU , Ananthkrishna JUPUDI , Yueh Sheng OW , Junqi WEI , Kelvin Tai Ming BOH , Kang ZHANG , Yuichi WADA
IPC: H01J37/32
Abstract: Embodiments of process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a process chamber, includes: a top plate having a central recess disposed in an upper surface thereof; a channel extending from an outer portion of the top plate to the central recess; a plurality of holes disposed through the top plate from a bottom surface of the recess to a lower surface of the top plate; a cover plate configured to be coupled to the top plate and to form a seal along a periphery of the central recess such that the covered recess forms a plenum within the top plate; and a tubular body extending down from the lower surface of the top plate and surrounding the plurality of holes, the tubular body further configured to surround a substrate support.
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