公开(公告)号：US20040012041A1

公开(公告)日：2004-01-22

申请号：US10280492

申请日：2002-10-25

申请人： Applied Materials, Inc.

发明人： Lawrence C. West ,  Claes Bjorkman ,  Dan Maydan ,  Samuel Broydo

IPC分类号： H01L021/00

CPC分类号： G02B6/43 ,  G02B6/12 ,  G02B6/12004 ,  G02B6/30 ,  G02B6/4201 ,  G02B6/4214 ,  G02B6/4245 ,  G02B6/4257 ,  G02B6/4274 ,  G02B6/4283

摘要： An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.

摘要翻译： 至少部分由第一半导体材料制成并且具有前侧和后侧的光学就绪衬底，所述前侧具有足够质量的顶表面，以允许使用半导体制造处理技术在其上制造微电子电路。 光学就绪衬底包括在衬底的顶表面下方的第一层区域中制造在衬底的前侧上的光信号分配电路。 光信号分配电路由互连的半导体光子元件组成，并被设计成向要在其上制造的微电子电路提供信号。

公开(公告)号：US20040114853A1

公开(公告)日：2004-06-17

申请号：US10623666

申请日：2003-07-21

申请人： APPLIED MATERIALS, INC.

发明人： Claes Bjorkman ,  Lawrence C. West ,  Dan Maydan ,  Samuel Broydo

IPC分类号： G02B006/12

CPC分类号： G02B6/43 ,  G02B6/12 ,  G02B6/12004 ,  G02B6/30 ,  G02B6/4204 ,  G02B6/4214 ,  G02B6/4245 ,  G02B6/4257 ,  G02B6/4274 ,  G02B6/4283 ,  H01L21/84 ,  H01L27/1203

摘要： An article of manufacture comprising an optical-ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.

摘要翻译： 一种制造方法，包括由第一半导体层制成的光学就绪衬底，在第一半导体层的顶部上的绝缘层和在绝缘层的顶部上的第二半导体层，其中第二半导体层具有顶表面和 横向分为包括第一区域和第二区域的两个区域，第一区域的顶表面具有足以允许在其中形成微电子电路的质量，并且第二区域包括其中形成的光信号分配电路， 所述光信号分配电路由互连的半导体光子元件组成并且被设计成向要在第二半导体层的第一区域中制造的微电子电路提供信号。

公开(公告)号：US20040013338A1

公开(公告)日：2004-01-22

申请号：US10280505

申请日：2002-10-25

申请人： Applied Materials, Inc.

发明人： Claes Bjorkman ,  Lawrence C. West ,  Dan Maydan ,  Samuel Broydo

IPC分类号： G02B006/12

CPC分类号： G02B6/12004 ,  G02B6/12 ,  G02B6/30 ,  G02B6/4214 ,  G02B6/4245 ,  G02B6/4257 ,  G02B6/4274 ,  G02B6/4283 ,  G02B6/43

摘要： An article of manufacture comprising an optical ready substrate made of a first semiconductor layer, an insulating layer on top of the first semiconductor layer, and a second semiconductor layer on top of the insulating layer, wherein the second semiconductor layer has a top surface and is laterally divided into two regions including a first region and a second region, the top surface of the first region being of a quality that is sufficient to permit microelectronic circuitry to be formed therein and the second region including an optical signal distribution circuit formed therein, the optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuit to be fabricated in the first region of the second semiconductor layer.

摘要翻译： 一种制品，包括由第一半导体层制成的光学就绪衬底，在第一半导体层的顶部上的绝缘层和在绝缘层的顶部上的第二半导体层，其中第二半导体层具有顶表面，并且是 横向分为包括第一区域和第二区域的两个区域，第一区域的顶表面的质量足以允许在其中形成微电子电路，并且第二区域包括其中形成的光信号分配电路， 光信号分配电路由互连的半导体光子元件组成，并被设计为向要在第二半导体层的第一区域中制造的微电子电路提供信号。