公开(公告)号：US20170213705A1

公开(公告)日：2017-07-27

申请号：US15414555

申请日：2017-01-24

Applicant: APPLIED MATERIALS, INC.

Inventor： OFER AMIR ,  JENNIFER Y. SUN ,  MICHAEL R. RICE ,  MICHAEL C. KUCHAR ,  JOSEPH F. SOMMERS

IPC: H01J37/32 ,  B08B3/12 ,  H01L21/67

CPC classification number: H01J37/32477 ,  B08B3/12 ,  H01J37/32091 ,  H01J37/32853 ,  H01L21/67126

Abstract: Slit valve gates and methods for cleaning are provided. Slit valves include: a slit valve gate configured to seal an opening of a process chamber, the slit valve gate comprising a surface that faces an processing volume of the process chamber; and a non-porous anodized coating on the surface of the slit valve gate. Methods of cleaning include: immersing the slit valve gate in a tank comprising deionized water; sonicating the slit valve gate at a first power density of about 6 W/cm2 to about 15 W/cm2 and a frequency of about 25 kHz to about 40 kHz for a first period of time; sonicating the slit valve gate at a second power density of about 30 W/cm2 to about 45 W/cm2 and a frequency of about 25 kHz to about 40 kHz for a second period of time; and removing the slit valve gate from the tank.