公开(公告)号：US20150132551A1

公开(公告)日：2015-05-14

申请号：US14531549

申请日：2014-11-03

Applicant: APPLIED MATERIALS, INC.

Inventor： Yong CAO ,  Daniel Lee DIEHL ,  Rongjun WANG ,  Xianmin TANG ,  Tai-Chou Papo CHEN ,  Tingjun XU

IPC: H01L31/0216 ,  H01L31/18 ,  H01L31/032 ,  C23C14/35

CPC classification number: H01L31/02161 ,  C23C14/0042 ,  C23C14/0084 ,  C23C14/0652 ,  C23C14/0676 ,  C23C14/35 ,  G02B1/115 ,  H01L31/02168 ,  H01L31/18 ,  Y02E10/50 ,  Y10T428/24942

Abstract: A method for forming an anti-reflective coating (ARC) includes positioning a substrate below a target and flowing a first gas to deposit a first portion of the graded ARC onto the substrate. The method includes gradually flowing a second gas to deposit a second portion of the graded ARC, and gradually flowing a third gas while simultaneously gradually decreasing the flow of the second gas to deposit a third portion of the graded ARC. The method also includes flowing the third gas after stopping the flow of the second gas to form a fourth portion of the graded ARC. In another embodiment a film stack having a substrate having a graded ARC disposed thereon is provided. The graded ARC includes a first portion, a second portion disposed on the first portion, a third portion disposed on the second portion, and a fourth portion disposed on the third portion.

Abstract translation: 用于形成抗反射涂层（ARC）的方法包括将基底定位在靶材下方并流动第一气体以将渐变ARC的第一部分沉积到基底上。 该方法包括逐渐流动第二气体以沉积分级ARC的第二部分，并逐渐流动第三气体，同时逐渐减少第二气体的流动以沉积渐变ARC的第三部分。 该方法还包括在停止第二气体的流动之后流动第三气体以形成分级ARC的第四部分。 在另一个实施例中，提供了具有设置在其上的具有分级ARC的基板的薄膜叠层。 分级ARC包括第一部分，设置在第一部分上的第二部分，设置在第二部分上的第三部分和设置在第三部分上的第四部分。