公开(公告)号：US20190341283A1

公开(公告)日：2019-11-07

申请号：US16516499

申请日：2019-07-19

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun KIM ,  Dae Youn KIM ,  Izumi ARAI

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

公开(公告)号：US20170040204A1

公开(公告)日：2017-02-09

申请号：US15211538

申请日：2016-07-15

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun KIM ,  Dae Youn KIM ,  Izumi ARAI

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/67201 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/68742

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

Abstract translation: 提供了一种基板处理装置，其包括装载锁定室; 连接到所述装载锁定室的传送室; 以及连接到传送室的一个或多个处理室。 传送室包括传送臂，其在负载锁定室和一个或多个处理室之间传送衬底，负载锁定室包括多个负载锁定站，用于容纳多个衬底作为矩阵m× n。 根据基板处理装置，可以大大降低转印基板所花费的时间，可以提高生产率。