公开(公告)号：US20190341283A1

公开(公告)日：2019-11-07

申请号：US16516499

申请日：2019-07-19

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun KIM ,  Dae Youn KIM ,  Izumi ARAI

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

公开(公告)号：US20170040204A1

公开(公告)日：2017-02-09

申请号：US15211538

申请日：2016-07-15

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun KIM ,  Dae Youn KIM ,  Izumi ARAI

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/67201 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67742 ,  H01L21/67754 ,  H01L21/68742

Abstract: Provided is a substrate processing apparatus including a load-lock chamber; a transfer chamber connected to the load-lock chamber; and one or more processing chambers connected to the transfer chamber. The transfer chamber includes a transfer arm that transfers a substrate between the load-lock chamber and the one or more processing chambers, the load-lock chamber includes a plurality of load-lock stations for accommodating a plurality of substrates as a matrix of m×n. According to the substrate processing apparatus, a time taken to transfer substrates may be reduced greatly, and productivity may be improved.

Abstract translation: 提供了一种基板处理装置，其包括装载锁定室; 连接到所述装载锁定室的传送室; 以及连接到传送室的一个或多个处理室。 传送室包括传送臂，其在负载锁定室和一个或多个处理室之间传送衬底，负载锁定室包括多个负载锁定站，用于容纳多个衬底作为矩阵m× n。 根据基板处理装置，可以大大降低转印基板所花费的时间，可以提高生产率。

公开(公告)号：US20130206069A1

公开(公告)日：2013-08-15

申请号：US13761331

申请日：2013-02-07

Applicant: ASM IP Holding B.V.

Inventor： Soo Hyun KIM

IPC: C23C16/458

CPC classification number: C23C16/458 ,  C23C16/4586 ,  H01J37/32715 ,  H01L21/68742 ,  H01L21/68785

Abstract: In a deposition apparatus, a coming-off prevention unit is formed on the side surface of a substrate supporting pin to prevent the substrate supporting pin from being separated from the deposition apparatus even if the substrate supporting pin sticking on the substrate due to static electricity occurring during the deposition process is moved. Therefore, damage of the substrate supporting pin or the substrate, which may occur when the substrate supporting pin comes off, can be prevented. Further, as a rod is inserted into a hole formed in the substrate supporting pin, the substrate supporting pin is prevented from coming off from a motion path, when the substrate supporting pin is moved in a vertical direction. Accordingly, damage of the substrate supporting pin, which may occur when the substrate supporting pin comes off during the vertical motion, can be prevented.

Abstract translation: 在沉积装置中，在基板支撑销的侧表面上形成防脱落单元，以防止基板支撑销与沉积装置分离，即使由于静电导致基板支撑销粘附在基板上 在沉积过程中移动。 因此，可以防止当基板支撑销脱落时可能发生的基板支撑销或基板的损坏。 此外，当将杆插入到形成在基板支撑销中的孔中时，当基板支撑销沿垂直方向移动时，基板支撑销被阻止从运动路径脱离。 因此，可以防止在垂直运动时衬底支撑销脱落时可能发生的衬底支撑销的损坏。