公开(公告)号：US20190035647A1

公开(公告)日：2019-01-31

申请号：US16039938

申请日：2018-07-19

Applicant: ASM IP Holding B.V.

Inventor： Ju Il Lee ,  Hie Chul Kim ,  Dae Youn Kim

IPC: H01L21/67

Abstract: Provided is a substrate-processing device capable of preventing a top lid from sagging downward by the own weight of the substrate-processing device and/or a vacuum suction force generated by a vacuum pump and/or thermal shock at high temperature process, in a chamber including a plurality of reactors. Also, provided is a rotating shaft for transferring a substrate between the plurality of reactors.

公开(公告)号：US20190062907A1

公开(公告)日：2019-02-28

申请号：US16039817

申请日：2018-07-19

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  Ju Il Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/458 ,  C23C16/455

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.