公开(公告)号：US20190062907A1

公开(公告)日：2019-02-28

申请号：US16039817

申请日：2018-07-19

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  Ju Il Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/458 ,  C23C16/455

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.

公开(公告)号：US20240263304A1

公开(公告)日：2024-08-08

申请号：US18638154

申请日：2024-04-17

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  Ju Ill Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01J37/32

CPC classification number: C23C16/4411 ,  C23C16/45565 ,  C23C16/45572 ,  H01J37/32522 ,  C23C16/45551 ,  C23C16/4586 ,  H01J37/32082

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.

公开(公告)号：US11993843B2

公开(公告)日：2024-05-28

申请号：US16039817

申请日：2018-07-19

Applicant: ASM IP Holding B.V.

Inventor： Seung Wook Kim ,  JuIll Lee ,  Won Ki Jeong ,  Dong Rak Jung ,  Hong Hyun Kim

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/458 ,  H01J37/32

CPC classification number: C23C16/4411 ,  C23C16/45565 ,  C23C16/45572 ,  H01J37/32522 ,  C23C16/45551 ,  C23C16/4586 ,  H01J37/32082

Abstract: Provided is a cooling device capable of controlling the temperature of an upper portion of a reactor, or more particularly, a gas supply device, for example, a shower head. The cooling device includes a separator configured to uniformly and efficiently cool the gas supply device.