公开(公告)号：US20240209505A1

公开(公告)日：2024-06-27

申请号：US18423969

申请日：2024-01-26

Applicant: ASM IP Holding B.V.

Inventor： William Petro ,  Venkata Motupalli ,  Pawan Sharma ,  Ankit Kimtee ,  Eric James Shero ,  Todd Robert Dunn

IPC: C23C16/52 ,  C23C16/455

CPC classification number: C23C16/52 ,  C23C16/45544

Abstract: A precursor monitoring assembly for use in reactor systems to provide real-time and direct measurements of the availability of source materials from a source vessel. The assembly includes one or more force or load sensors, such as load cells, positioned between a bottom wall of an interior tray and an exterior wall (e.g., a base of a source vessel) and/or outside the source vessel. A signal conditioning element processes the output electrical signals from the sensors, then a controller processes the output signals from the signal conditioning components with a conversion factor, for example, to determine a current weight of source material stored in the source vessel. The controller uses this weight to calculate the amount of available source material or chemistry in the source vessel.

公开(公告)号：US20230234014A1

公开(公告)日：2023-07-27

申请号：US18100331

申请日：2023-01-23

Applicant: ASM IP Holding B.V.

Inventor： Venkata Motupalli ,  Pawan Sharma ,  Ankit Kimtee ,  Eric Shero ,  Todd Dunn

IPC: B01J19/00

CPC classification number: B01J19/004 ,  B01J19/0046

Abstract: A source vessel weight monitoring assembly for use in reactor systems to provide real-time and direct measurements of the availability of source or process materials from a source vessel. The assembly includes one or more force or load sensors, such as load cells, positioned between a bottom wall of the source vessel and a support element for the vessel (e.g., a base of a source vessel enclosure). The sensors are positioned to at least partially support the vessel, and a signal conditioning element processes the output electrical signals from the sensors, then a controller processes the output signals from the signal conditioning components with a conversion factor, for example, to determine a current weight of the source vessel and process material (e.g., solid, liquid, or gaseous precursor) stored therein. The controller uses this weight to calculate the amount of available process material or chemistry in the source vessel.