公开(公告)号：US20240209505A1

公开(公告)日：2024-06-27

申请号：US18423969

申请日：2024-01-26

Applicant: ASM IP Holding B.V.

Inventor： William Petro ,  Venkata Motupalli ,  Pawan Sharma ,  Ankit Kimtee ,  Eric James Shero ,  Todd Robert Dunn

IPC: C23C16/52 ,  C23C16/455

CPC classification number: C23C16/52 ,  C23C16/45544

Abstract: A precursor monitoring assembly for use in reactor systems to provide real-time and direct measurements of the availability of source materials from a source vessel. The assembly includes one or more force or load sensors, such as load cells, positioned between a bottom wall of an interior tray and an exterior wall (e.g., a base of a source vessel) and/or outside the source vessel. A signal conditioning element processes the output electrical signals from the sensors, then a controller processes the output signals from the signal conditioning components with a conversion factor, for example, to determine a current weight of source material stored in the source vessel. The controller uses this weight to calculate the amount of available source material or chemistry in the source vessel.

公开(公告)号：US20230234014A1

公开(公告)日：2023-07-27

申请号：US18100331

申请日：2023-01-23

Applicant: ASM IP Holding B.V.

Inventor： Venkata Motupalli ,  Pawan Sharma ,  Ankit Kimtee ,  Eric Shero ,  Todd Dunn

IPC: B01J19/00

CPC classification number: B01J19/004 ,  B01J19/0046

Abstract: A source vessel weight monitoring assembly for use in reactor systems to provide real-time and direct measurements of the availability of source or process materials from a source vessel. The assembly includes one or more force or load sensors, such as load cells, positioned between a bottom wall of the source vessel and a support element for the vessel (e.g., a base of a source vessel enclosure). The sensors are positioned to at least partially support the vessel, and a signal conditioning element processes the output electrical signals from the sensors, then a controller processes the output signals from the signal conditioning components with a conversion factor, for example, to determine a current weight of the source vessel and process material (e.g., solid, liquid, or gaseous precursor) stored therein. The controller uses this weight to calculate the amount of available process material or chemistry in the source vessel.

公开(公告)号：US20230341155A1

公开(公告)日：2023-10-26

申请号：US18135792

申请日：2023-04-18

Applicant: ASM IP Holding B.V.

Inventor： Pawan Sharma ,  Aadil Vora ,  Ankit Kimtee

IPC: F25B21/02 ,  F25B41/40

CPC classification number: F25B21/02 ,  F25B41/40 ,  F25B2321/021 ,  F25B2321/023 ,  F25B2700/21

Abstract: A precursor vessel cooling assembly, a reactor system including the assembly, and methods of using the assembly and system are disclosed. The precursor vessel cooling assembly includes a thermoelectric cooling device and a fluid-cooled plate to maintain a desired temperature of a precursor vessel or other portion of the precursor vessel cooling assembly.

公开(公告)号：US20230287565A1

公开(公告)日：2023-09-14

申请号：US18117514

申请日：2023-03-06

Applicant: ASM IP Holding B.V.

Inventor： Ankit Kimtee ,  Pawan Sharma ,  Sudhanshu Biyani

IPC: C23C16/448 ,  C23C16/52

CPC classification number: C23C16/448 ,  C23C16/52 ,  H01L21/67248

Abstract: A reactor system for use in semiconductor processing that makes use of a liquid source for deposition that needs to be maintained within a specific temperature control band or range. The reactor system includes a temperature control system that includes a heating and cooling apparatus for providing both heating and cooling of a vessel that stores the liquid source to maintain the liquid source within a desired temperature control band or range. In this manner, the heating and cooling apparatus may be used in a reactor system in which the vessel needs to be cooled, needs to be heated, or uses concurrent or alternating heating and cooling to provide enhanced control of the source temperature within a particular temperature control band.