公开(公告)号：US11835752B2

公开(公告)日：2023-12-05

申请号：US17066524

申请日：2020-10-09

Applicant: ASML HOLDING N.V.

Inventor： King Pui Leung ,  Tao Chen ,  Ronan James Havelin ,  Igor Matheus Petronella AARTS ,  Adel Joobeur ,  Joseph Carbone

IPC: G02B6/02 ,  G02F1/365 ,  G01B11/02 ,  G02B6/122 ,  G02B6/293 ,  G03F9/00 ,  G02B6/27 ,  G02F1/35

CPC classification number: G02B6/02004 ,  G01B11/02 ,  G02B6/1228 ,  G02B6/2746 ,  G02B6/29377 ,  G02F1/365 ,  G03F9/7065 ,  G01B2210/56 ,  G02F1/3528

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.

公开(公告)号：US10802208B2

公开(公告)日：2020-10-13

申请号：US16094244

申请日：2017-03-17

Applicant: ASML HOLDING N.V.

Inventor： King Pui Leung ,  Tao Chen ,  Ronan James Havelin ,  Igor Matheus Petronella Aarts ,  Adel Joobeur ,  Joseph Carbone

IPC: G02B6/02 ,  G02F1/365 ,  G03F9/00 ,  G01B11/02 ,  G02B6/122 ,  G02B6/27 ,  G02B6/293 ,  G02F1/35

Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.

公开(公告)号：US08982481B2

公开(公告)日：2015-03-17

申请号：US13687630

申请日：2012-11-28

Applicant: ASML Holding N.V.

Inventor： Stanislav Y. Smirnov ,  Adel Joobeur ,  Yevgeniy Konstantinovich Shmarev ,  Arun Mahadevan Venkataraman

IPC: G02B17/00 ,  G02B17/08 ,  G03F7/20

CPC classification number: G02B17/08 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70625 ,  G03F7/70633

Abstract: A system and method is described for correcting aberrations caused by field curvature with a catadioptric objective. In one example, a catadioptric optical system includes a first catadioptric element and a second catadioptric element. The first catadioptric element includes a first surface positioned to reflect a beam and a second surface positioned to focus the beam reflected by the first surface. The second catadioptric element is configured to receive the beam reflected by the second surface of the first catadioptric element. The second catadioptric element includes a third surface positioned to reflect the beam, and a fourth reflective surface positioned to focus the beam reflected by the third reflective surface. A curvature of the third or fourth surfaces of the second catadioptric element is chosen to apply a positive contribution to a field curvature associated with the first catadioptric element.

Abstract translation: 描述了一种系统和方法，用于校正由反射折射物镜由场曲率引起的像差。 在一个示例中，反射折射光学系统包括第一反射折射元件和第二反射折射元件。 第一反射折射元件包括被定位成反射光束的第一表面和被定位成聚焦由第一表面反射的光束的第二表面。 第二反射折射元件被配置为接收由第一反射折射元件的第二表面反射的光束。 第二反射折射元件包括被定位成反射光束的第三表面和被定位成聚焦由第三反射表面反射的光束的第四反射表面。 选择第二反射折射元件的第三或第四表面的曲率以对与第一反射折射元件相关联的场曲率施加正贡献。