公开(公告)号：US11150562B2

公开(公告)日：2021-10-19

申请号：US16486859

申请日：2018-02-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Jelle Nije ,  Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk ,  Tzu-Chao Chen ,  Frans Reinier Spiering ,  Sarathi Roy ,  Cédric Désiré Grouwstra

IPC: G03F7/20

Abstract: A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.

公开(公告)号：US11520238B2

公开(公告)日：2022-12-06

申请号：US17479078

申请日：2021-09-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Jelle Nije ,  Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk ,  Tzu-Chao Chen ,  Frans Reinier Spiering ,  Sarathi Roy ,  Cédric Désiré Grouwstra

IPC: G03F7/20

Abstract: A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.