公开(公告)号：US11150562B2

公开(公告)日：2021-10-19

申请号：US16486859

申请日：2018-02-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Jelle Nije ,  Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk ,  Tzu-Chao Chen ,  Frans Reinier Spiering ,  Sarathi Roy ,  Cédric Désiré Grouwstra

IPC: G03F7/20

Abstract: A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.

公开(公告)号：US11520238B2

公开(公告)日：2022-12-06

申请号：US17479078

申请日：2021-09-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Jelle Nije ,  Alexander Ypma ,  Dimitra Gkorou ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk ,  Tzu-Chao Chen ,  Frans Reinier Spiering ,  Sarathi Roy ,  Cédric Désiré Grouwstra

IPC: G03F7/20

Abstract: A method of optimizing an apparatus for multi-stage processing of product units such as wafers, the method includes: receiving object data representing one or more parameters measured across the product units and associated with different stages of processing of the product units; and determining fingerprints of variation of the object data across the product units, the fingerprints being associated with different respective stages of processing of the product units. The fingerprints may be determined by decomposing the object data into components using principal component analysis for each different respective stage; analyzing commonality of the fingerprints through the different stages to produce commonality results; and optimizing an apparatus for processing product units based on the commonality results.

公开(公告)号：US11099485B2

公开(公告)日：2021-08-24

申请号：US16493326

申请日：2018-04-09

Applicant: ASML NETHERLANDS B.V.

Inventor： Alexander Ypma ,  Vahid Bastani ,  Dag Sonntag ,  Jelle Nije ,  Hakki Ergün Cekli ,  Georgios Tsirogiannis ,  Robert Jan Van Wijk

IPC: G03F7/20 ,  G03F9/00

Abstract: A method of maintaining a set of fingerprints representing variation of one or more process parameters across wafers subjected to a device manufacturing method, the method including: receiving measurement data of one or more parameters measured on wafers; updating the set of fingerprints based on an expected evolution of the one or more process parameters; and evaluation of the updated set of fingerprints based on decomposition of the received measurement data in terms of the updated set of fingerprints. Each fingerprint may have a stored likelihood of occurrence, and the decomposition may involve: estimating, based the received measurement data, likelihoods of occurrence of the set of fingerprints in the received measurement data; and updating the stored likelihoods of occurrence based on the estimated likelihoods.